JP7122278B2 - 蒸着マスクおよびその製造方法 - Google Patents

蒸着マスクおよびその製造方法 Download PDF

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JP7122278B2
JP7122278B2 JP2019048122A JP2019048122A JP7122278B2 JP 7122278 B2 JP7122278 B2 JP 7122278B2 JP 2019048122 A JP2019048122 A JP 2019048122A JP 2019048122 A JP2019048122 A JP 2019048122A JP 7122278 B2 JP7122278 B2 JP 7122278B2
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frame
mask
vapor deposition
deposition mask
layer
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Japanese (ja)
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JP2019094573A (ja
JP2019094573A5 (enExample
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裕仁 田丸
良弘 小林
樹一郎 石川
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Maxell Ltd
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Maxell Ltd
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Priority to JP2022126458A priority patent/JP2022167910A/ja
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Priority to JP2024085697A priority patent/JP7766744B2/ja
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JP2019048122A 2019-03-15 2019-03-15 蒸着マスクおよびその製造方法 Active JP7122278B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019048122A JP7122278B2 (ja) 2019-03-15 2019-03-15 蒸着マスクおよびその製造方法
JP2022126458A JP2022167910A (ja) 2019-03-15 2022-08-08 蒸着マスク
JP2024085697A JP7766744B2 (ja) 2019-03-15 2024-05-27 蒸着マスク

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JP2019048122A JP7122278B2 (ja) 2019-03-15 2019-03-15 蒸着マスクおよびその製造方法

Related Parent Applications (1)

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JP2017224428 Division 2017-11-22 2017-11-22

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JP2022126458A Division JP2022167910A (ja) 2019-03-15 2022-08-08 蒸着マスク

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JP2019094573A JP2019094573A (ja) 2019-06-20
JP2019094573A5 JP2019094573A5 (enExample) 2020-10-08
JP7122278B2 true JP7122278B2 (ja) 2022-08-19

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JP2019048122A Active JP7122278B2 (ja) 2019-03-15 2019-03-15 蒸着マスクおよびその製造方法
JP2022126458A Pending JP2022167910A (ja) 2019-03-15 2022-08-08 蒸着マスク
JP2024085697A Active JP7766744B2 (ja) 2019-03-15 2024-05-27 蒸着マスク

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JP2022126458A Pending JP2022167910A (ja) 2019-03-15 2022-08-08 蒸着マスク
JP2024085697A Active JP7766744B2 (ja) 2019-03-15 2024-05-27 蒸着マスク

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7122278B2 (ja) * 2019-03-15 2022-08-19 マクセル株式会社 蒸着マスクおよびその製造方法
CN112575286B (zh) * 2019-09-27 2022-09-23 旭晖应用材料股份有限公司 金属遮罩
TWI707965B (zh) * 2019-09-27 2020-10-21 旭暉應用材料股份有限公司 金屬遮罩
JP2021161509A (ja) * 2020-04-01 2021-10-11 株式会社ジャパンディスプレイ 蒸着マスクの作製方法
JP7606319B2 (ja) * 2020-10-19 2024-12-25 株式会社ジャパンディスプレイ 蒸着マスクの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003231964A (ja) 2001-12-05 2003-08-19 Toray Ind Inc 蒸着マスクおよびその製造方法並びに有機電界発光装置およびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100708654B1 (ko) * 2004-11-18 2007-04-18 삼성에스디아이 주식회사 마스크 조립체 및 이를 이용한 마스크 프레임 조립체
KR101135544B1 (ko) * 2009-09-22 2012-04-17 삼성모바일디스플레이주식회사 마스크 조립체, 이의 제조 방법 및 이를 이용한 평판표시장치용 증착 장치
KR102702151B1 (ko) * 2017-07-31 2024-09-04 맥셀 주식회사 증착 마스크
JP7122278B2 (ja) * 2019-03-15 2022-08-19 マクセル株式会社 蒸着マスクおよびその製造方法
JP7049400B2 (ja) * 2020-06-22 2022-04-06 マクセル株式会社 蒸着マスク

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003231964A (ja) 2001-12-05 2003-08-19 Toray Ind Inc 蒸着マスクおよびその製造方法並びに有機電界発光装置およびその製造方法

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JP2019094573A (ja) 2019-06-20
JP2024102376A (ja) 2024-07-30
JP2022167910A (ja) 2022-11-04
JP7766744B2 (ja) 2025-11-10

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