JP2019071347A - プラズマ処理方法 - Google Patents
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- 238000003672 processing method Methods 0.000 title claims abstract description 15
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- 238000000034 method Methods 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000012545 processing Methods 0.000 claims description 64
- 238000009832 plasma treatment Methods 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 22
- 230000001105 regulatory effect Effects 0.000 abstract 1
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- 238000002474 experimental method Methods 0.000 description 8
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- 238000005513 bias potential Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
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- 150000002500 ions Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- -1 titanium halide Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
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Abstract
Description
式(1)から分かるように、シースSHLの厚みは、プラズマPLと下部電極16との間の電位差に正の相関を有し、シースSHLとプラズマPLとの界面におけるプラズマの密度に負の相関を有する。シースSHLの厚みを増大させるために高周波の電力を低下させると、シースSHLとプラズマPLとの界面におけるプラズマの密度、即ち、式(1)のnsは低下するが、同時に、プラズマPLと下部電極16との間の電位差、即ち、式(1)のV0も低下する。したがって、図8に示すように、高周波の電力を低下させても、シースSHLの厚みを大きく増大させることはできない。故に、図8に示すように、高周波の電力を低下させても、パーティクルに与えられるエネルギーEGは小さく、パーティクルは、プラズマPLと上部電極20との間のシースSHUの下端SUAまでは移動できず、シースSHLの下端SLA又はその近傍に移動することしかできない。
<実験の条件>
内部空間12sに供給したArガスの流量:100sccm
内部空間12s内の圧力:4Pa
高周波電源26Aによって発生された高周波の周波数:13.56MHz
Claims (3)
- プラズマ処理装置において実行されるプラズマ処理方法であって、
前記プラズマ処理装置は、
チャンバ本体と、
前記チャンバ本体内に提供された内部空間にガスを供給するように構成されたガス供給部と、
下部電極を含み、前記内部空間の中に設けられており、その上に載置される基板を支持するように構成された支持台と、
前記支持台の上方に設けられた上部電極と、
前記内部空間の中でプラズマを生成するために高周波を供給するように構成された高周波電源と、
前記上部電極の電圧の位相に対して相対的に前記下部電極の電圧の位相を調整するように構成された位相調整回路と、
前記内部空間に連通可能に設けられた排気装置と、
を備え、
該プラズマ処理方法は、基板が前記支持台上に載置された状態で実行され、
前記基板に対するプラズマ処理を実行する工程であり、該プラズマ処理のために、前記ガス供給部から前記内部空間にガスが供給され、該ガスを励起させてプラズマを生成するために前記高周波電源から高周波が供給される、該工程と、
プラズマ処理を実行する前記工程において生成された前記プラズマを消失させることなく、前記支持台と前記プラズマとの間のシースの厚みを増大させるように前記位相調整回路によって前記上部電極の電圧の位相に対して相対的に前記下部電極の電圧の位相を調整する工程と、
位相を調整する前記工程の実行後、前記高周波の供給を停止した状態で、前記排気装置を用いて、前記内部空間の中のガス及びパーティクルを排出する工程と、
を含む、プラズマ処理方法。 - 位相を調整する前記工程において、前記シースがプラズマ処理を実行する前記工程の実行中且つ位相を調整する前記工程の実行前の前記シースの厚みに対して、1.246倍以上の厚みを有するように、前記位相調整回路によって前記上部電極の前記電圧の前記位相に対して相対的に前記下部電極の前記電圧の前記位相が調整される、請求項1に記載のプラズマ処理方法。
- 前記上部電極は、前記支持台の上方で延在する第1部分、及び、該支持台と前記チャンバ本体の側壁との間の空間の上方で延在する第2部分を含み、
前記第2部分は前記第1部分に対して下方に突き出している、
請求項1又は2に記載のプラズマ処理方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2017196630A JP6902450B2 (ja) | 2017-10-10 | 2017-10-10 | プラズマ処理方法 |
TW107133726A TW201928103A (zh) | 2017-10-10 | 2018-09-26 | 電漿處理方法 |
CN201880064580.7A CN111164739A (zh) | 2017-10-10 | 2018-09-26 | 等离子体处理方法 |
PCT/JP2018/035654 WO2019073798A1 (ja) | 2017-10-10 | 2018-09-26 | プラズマ処理方法 |
KR1020207012762A KR102323157B1 (ko) | 2017-10-10 | 2018-09-26 | 플라스마 처리 방법 |
US16/754,402 US11450512B2 (en) | 2017-10-10 | 2018-09-26 | Plasma processing method |
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JP2017196630A JP6902450B2 (ja) | 2017-10-10 | 2017-10-10 | プラズマ処理方法 |
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JP6902450B2 JP6902450B2 (ja) | 2021-07-14 |
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JP (1) | JP6902450B2 (ja) |
KR (1) | KR102323157B1 (ja) |
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TW (1) | TW201928103A (ja) |
WO (1) | WO2019073798A1 (ja) |
Cited By (1)
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WO2021178185A1 (en) * | 2020-03-06 | 2021-09-10 | Lam Research Corporation | Tuning voltage setpoint in a pulsed rf signal for a tunable edge sheath system |
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- 2018-09-26 TW TW107133726A patent/TW201928103A/zh unknown
- 2018-09-26 US US16/754,402 patent/US11450512B2/en active Active
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Patent Citations (6)
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JP2007035949A (ja) * | 2005-07-27 | 2007-02-08 | Hitachi High-Technologies Corp | プラズマ処理装置 |
JP2007081208A (ja) * | 2005-09-15 | 2007-03-29 | Hitachi High-Technologies Corp | プラズマ処理方法及び処理装置 |
JP2008244103A (ja) * | 2007-03-27 | 2008-10-09 | Tokyo Electron Ltd | プラズマ処理装置 |
Cited By (1)
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WO2021178185A1 (en) * | 2020-03-06 | 2021-09-10 | Lam Research Corporation | Tuning voltage setpoint in a pulsed rf signal for a tunable edge sheath system |
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JP6902450B2 (ja) | 2021-07-14 |
US11450512B2 (en) | 2022-09-20 |
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CN111164739A (zh) | 2020-05-15 |
US20210142982A1 (en) | 2021-05-13 |
WO2019073798A1 (ja) | 2019-04-18 |
TW201928103A (zh) | 2019-07-16 |
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