JP2019050213A - ホウ素層を有するシリコン基板を含むフォトカソード - Google Patents
ホウ素層を有するシリコン基板を含むフォトカソード Download PDFInfo
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- JP2019050213A JP2019050213A JP2018220050A JP2018220050A JP2019050213A JP 2019050213 A JP2019050213 A JP 2019050213A JP 2018220050 A JP2018220050 A JP 2018220050A JP 2018220050 A JP2018220050 A JP 2018220050A JP 2019050213 A JP2019050213 A JP 2019050213A
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- silicon
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 163
- 239000010703 silicon Substances 0.000 title claims description 163
- 229910052710 silicon Inorganic materials 0.000 title claims description 162
- 229910052796 boron Inorganic materials 0.000 title claims description 85
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims description 84
- 239000000758 substrate Substances 0.000 title claims description 76
- 230000004044 response Effects 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 44
- 239000002019 doping agent Substances 0.000 claims description 23
- 230000003667 anti-reflective effect Effects 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 abstract description 26
- 239000010410 layer Substances 0.000 description 117
- 230000006870 function Effects 0.000 description 44
- 238000007689 inspection Methods 0.000 description 34
- 238000001444 catalytic combustion detection Methods 0.000 description 27
- 235000012431 wafers Nutrition 0.000 description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 230000007547 defect Effects 0.000 description 19
- 150000001340 alkali metals Chemical class 0.000 description 14
- 229910052783 alkali metal Inorganic materials 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 11
- 239000013078 crystal Substances 0.000 description 11
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 238000005286 illumination Methods 0.000 description 8
- 230000006798 recombination Effects 0.000 description 8
- 238000005215 recombination Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 239000006117 anti-reflective coating Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- KOPBYBDAPCDYFK-UHFFFAOYSA-N caesium oxide Chemical compound [O-2].[Cs+].[Cs+] KOPBYBDAPCDYFK-UHFFFAOYSA-N 0.000 description 4
- 229910001942 caesium oxide Inorganic materials 0.000 description 4
- 230000013742 energy transducer activity Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 3
- 229910052792 caesium Inorganic materials 0.000 description 3
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- CFOAUMXQOCBWNJ-UHFFFAOYSA-N [B].[Si] Chemical compound [B].[Si] CFOAUMXQOCBWNJ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- FRIKWZARTBPWBN-UHFFFAOYSA-N [Si].O=[Si]=O Chemical compound [Si].O=[Si]=O FRIKWZARTBPWBN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- -1 but not limited to Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000005527 interface trap Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- YWCYJWYNSHTONE-UHFFFAOYSA-O oxido(oxonio)boron Chemical compound [OH2+][B][O-] YWCYJWYNSHTONE-UHFFFAOYSA-O 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/38—Photoelectric screens; Charge-storage screens not using charge storage, e.g. photo-emissive screen, extended cathode
- H01J29/385—Photocathodes comprising a layer which modified the wave length of impinging radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/12—Condensers affording bright-field illumination
- G02B21/125—Condensers affording bright-field illumination affording both dark- and bright-field illumination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/34—Photo-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/26—Image pick-up tubes having an input of visible light and electric output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14806—Structural or functional details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14893—Charge coupled imagers comprising a photoconductive layer deposited on the CCD structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
Abstract
Description
Claims (20)
- 対向する第1面及び第2面を有するシリコン基板と、
前記シリコン基板の前記第2面に直接配置された主にホウ素から成る第1層と、
を含む、伝導フォトカソードであって、
前記第1面から前記シリコン基板に入る光子を吸収し、前記吸収された光子に応じて光電子が生成され、該光電子を前記第2面と前記第1層とを通過して放出するように構成された、伝導フォトカソード。 - 前記シリコン基板の厚さが10μmから100μmの範囲である、請求項1に記載の伝導フォトカソード。
- 前記シリコン基板の厚さおよび前記シリコン基板のドーパント濃度が、紫外線(UV)波長、遠紫外線波長、可視光波長のうち少なくともいずれかを有する光子を吸収するために最適化された、請求項1に記載の伝導フォトカソード。
- 前記第1層が、約1nmから5nmの範囲の厚さを有する、請求項1に記載の伝導フォトカソード。
- 前記シリコン基板の前記第1面に直接配置された主にホウ素から成る第2層をさらに含む、請求項1に記載の伝導フォトカソード。
- 前記第2層に配置された反射防止材料を含む第3層をさらに備える、請求項5に記載の伝導フォトカソード。
- 前記シリコン基板の前記第1面と前記第2面との間に外部電位差を発生させるための手段をさらに備える、請求項4に記載の伝導フォトカソード。
- 前記シリコン基板が、前記第1面から離れて配置された部分よりも前記第1面付近の部分において高いp型ドーパント濃度を有するように、前記第1面から前記第2面へ向かって広がるp型拡散領域を含む、請求項1に記載の伝導フォトカソード。
- 対向する被照射面と出力面とを有するシリコン基板と、
前記シリコン基板の前記出力面に直接配置された主にホウ素から成る第1層と、
を含む伝導フォトカソードであって、
前記シリコン基板が前記被照射面から前記シリコン基板に入る光子に応じて光電子を生成し、前記生成された光電子が前記出力面から放出されるように、前記シリコン基板の前記被照射面と前記出力面とのあいだの厚さおよび前記シリコン基板のドーパント濃度が構成された、
伝導フォトカソード。 - 前記シリコン基板の厚さが10μmから100μmの範囲である、請求項9に記載の伝導フォトカソード。
- 前記シリコン基板の前記厚さおよび前記シリコン基板の前記ドーパント濃度が、紫外線(UV)波長、遠紫外線波長、可視光波長のうち少なくともいずれかを有する光子を吸収するために最適化された、請求項9に記載の伝導フォトカソード。
- 前記第1層が約1nmから5nmの範囲の厚さを有する、請求項9に記載の伝導フォトカソード。
- 前記シリコン基板の前記被照射面に直接配置された主にホウ素から成る第2層をさらに含む、請求項9に記載の伝導フォトカソード。
- 前記第2層に配置された反射防止材料を含む第3層をさらに備える、請求項13に記載の伝導フォトカソード。
- 前記シリコン基板の前記被照射面と前記出力面との間に外部電位差を発生させるための手段をさらに備える、請求項13に記載の伝導フォトカソード。
- 前記シリコン基板が、前記被照射面から離れて配置された部分よりも前記被照射面付近の部分において高いp型ドーパント濃度を有するように、前記被照射面から前記出力面へ向かって広がるp型拡散領域を含む、請求項9に記載の伝導フォトカソード。
- 対向する第1面及び第2面を有するシリコン基板と、
前記シリコン基板の前記第2面に直接配置された主にホウ素から成る第1層と、
前記シリコン基板の前記第1面に直接配置された主にホウ素から成る第2層と、
を含む、伝導フォトカソードであって、
前記第1面及び前記第2面が、1nmから5nmの範囲の厚さをそれぞれが有するピンホールフリーホウ素層を含む、伝導フォトカソード。 - 前記シリコン基板の厚さおよび前記シリコン基板のドーパント濃度が最適化されて、前記第2層と前記第1面を通過して前記シリコン基板に入る光子を吸収し、前記吸収した光子に応じて光電子を生成し、前記光電子が前記第2面と前記第1層とから放出される、請求項17に記載の伝導フォトカソード。
- 前記シリコン基板の厚さが10μmから100μmの範囲である、請求項18に記載の伝導フォトカソード。
- 前記厚さおよび前記ドーパント濃度が、紫外線(UV)波長、遠紫外線波長、可視光波長のうち少なくともいずれかを有する光子を吸収するために最適化された、請求項18に記載の伝導フォトカソード。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261679200P | 2012-08-03 | 2012-08-03 | |
US61/679,200 | 2012-08-03 | ||
US13/947,975 | 2013-07-22 | ||
US13/947,975 US9601299B2 (en) | 2012-08-03 | 2013-07-22 | Photocathode including silicon substrate with boron layer |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017233528A Division JP6442592B2 (ja) | 2012-08-03 | 2017-12-05 | ホウ素層を有するシリコン基板を含むフォトカソード |
Publications (2)
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JP2019050213A true JP2019050213A (ja) | 2019-03-28 |
JP6595074B2 JP6595074B2 (ja) | 2019-10-23 |
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ID=50024546
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
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JP2015525489A Active JP6257622B2 (ja) | 2012-08-03 | 2013-07-29 | ホウ素層を有するシリコン基板を含むフォトカソード |
JP2017233528A Active JP6442592B2 (ja) | 2012-08-03 | 2017-12-05 | ホウ素層を有するシリコン基板を含むフォトカソード |
JP2018220050A Active JP6595074B2 (ja) | 2012-08-03 | 2018-11-26 | ホウ素層を有するシリコン基板を含むフォトカソード |
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JP2015525489A Active JP6257622B2 (ja) | 2012-08-03 | 2013-07-29 | ホウ素層を有するシリコン基板を含むフォトカソード |
JP2017233528A Active JP6442592B2 (ja) | 2012-08-03 | 2017-12-05 | ホウ素層を有するシリコン基板を含むフォトカソード |
Country Status (7)
Country | Link |
---|---|
US (3) | US9601299B2 (ja) |
EP (1) | EP2880693B1 (ja) |
JP (3) | JP6257622B2 (ja) |
KR (3) | KR102161724B1 (ja) |
CN (2) | CN108155200B (ja) |
TW (1) | TWI635602B (ja) |
WO (1) | WO2014022297A1 (ja) |
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US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
NL2011568A (en) * | 2012-10-31 | 2014-05-06 | Asml Netherlands Bv | Sensor and lithographic apparatus. |
US9151940B2 (en) | 2012-12-05 | 2015-10-06 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
US9529182B2 (en) | 2013-02-13 | 2016-12-27 | KLA—Tencor Corporation | 193nm laser and inspection system |
US9608399B2 (en) | 2013-03-18 | 2017-03-28 | Kla-Tencor Corporation | 193 nm laser and an inspection system using a 193 nm laser |
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US20190066962A1 (en) | 2019-02-28 |
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CN104704640B (zh) | 2017-12-22 |
US20170069455A1 (en) | 2017-03-09 |
TW201411818A (zh) | 2014-03-16 |
JP6442592B2 (ja) | 2018-12-19 |
CN104704640A (zh) | 2015-06-10 |
JP6595074B2 (ja) | 2019-10-23 |
EP2880693A1 (en) | 2015-06-10 |
EP2880693A4 (en) | 2016-06-01 |
US20140034816A1 (en) | 2014-02-06 |
US10199197B2 (en) | 2019-02-05 |
KR20150040994A (ko) | 2015-04-15 |
CN108155200B (zh) | 2022-01-14 |
TWI635602B (zh) | 2018-09-11 |
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US9601299B2 (en) | 2017-03-21 |
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WO2014022297A1 (en) | 2014-02-06 |
KR102080364B1 (ko) | 2020-02-21 |
KR102161724B1 (ko) | 2020-10-05 |
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