JP2019033167A5 - - Google Patents
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- Publication number
- JP2019033167A5 JP2019033167A5 JP2017153003A JP2017153003A JP2019033167A5 JP 2019033167 A5 JP2019033167 A5 JP 2019033167A5 JP 2017153003 A JP2017153003 A JP 2017153003A JP 2017153003 A JP2017153003 A JP 2017153003A JP 2019033167 A5 JP2019033167 A5 JP 2019033167A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- ferromagnetic
- tunnel junction
- ferromagnetic layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000005291 magnetic effect Effects 0.000 claims 102
- 230000005294 ferromagnetic effect Effects 0.000 claims 69
- 230000005415 magnetization Effects 0.000 claims 36
- 230000004888 barrier function Effects 0.000 claims 18
- 238000004519 manufacturing process Methods 0.000 claims 16
- 238000000151 deposition Methods 0.000 claims 12
- 230000008021 deposition Effects 0.000 claims 12
- 238000001020 plasma etching Methods 0.000 claims 9
- 230000005347 demagnetization Effects 0.000 claims 7
- 239000000463 material Substances 0.000 claims 7
- 238000005229 chemical vapour deposition Methods 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 238000000059 patterning Methods 0.000 claims 4
- 230000005293 ferrimagnetic effect Effects 0.000 claims 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005520 cutting process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017153003A JP7023637B2 (ja) | 2017-08-08 | 2017-08-08 | 磁気トンネル接合素子の製造方法 |
| KR1020170181971A KR102285125B1 (ko) | 2017-08-08 | 2017-12-28 | 자기 터널 접합 소자, 그것을 사용한 자기 메모리 및 자기 터널 접합 소자의 제조 방법 |
| TW107103019A TWI716666B (zh) | 2017-08-08 | 2018-01-29 | 磁性穿隧接合元件、使用此之磁性記憶體及磁性穿隧接合元件之製造方法 |
| US15/906,775 US11165015B2 (en) | 2017-08-08 | 2018-02-27 | Magnetic tunnel junction device, magnetoresistive random access memory using same and manufacturing method of magnetic tunnel junction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017153003A JP7023637B2 (ja) | 2017-08-08 | 2017-08-08 | 磁気トンネル接合素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019033167A JP2019033167A (ja) | 2019-02-28 |
| JP2019033167A5 true JP2019033167A5 (enExample) | 2020-06-11 |
| JP7023637B2 JP7023637B2 (ja) | 2022-02-22 |
Family
ID=65275889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017153003A Active JP7023637B2 (ja) | 2017-08-08 | 2017-08-08 | 磁気トンネル接合素子の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11165015B2 (enExample) |
| JP (1) | JP7023637B2 (enExample) |
| KR (1) | KR102285125B1 (enExample) |
| TW (1) | TWI716666B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110235201A (zh) * | 2016-12-27 | 2019-09-13 | 艾沃思宾技术公司 | 包括在磁隧道结中的合成反铁磁体中的数据存储 |
| CN109904309B (zh) * | 2019-03-19 | 2023-04-18 | 中国科学院微电子研究所 | 一种多态磁存储器及其制造方法 |
| CN112531106A (zh) * | 2019-09-18 | 2021-03-19 | 中电海康集团有限公司 | 磁性隧道结的制备方法 |
| US12063867B2 (en) * | 2021-08-05 | 2024-08-13 | International Business Machines Corporation | Dual spacer for double magnetic tunnel junction devices |
| WO2025197974A1 (ja) * | 2024-03-22 | 2025-09-25 | 国立大学法人東北大学 | 垂直磁化膜、垂直磁化磁気抵抗効果素子 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6781173B2 (en) * | 2002-08-29 | 2004-08-24 | Micron Technology, Inc. | MRAM sense layer area control |
| JP2006261592A (ja) | 2005-03-18 | 2006-09-28 | Fujitsu Ltd | 磁気抵抗効果素子及びその製造方法 |
| US7301801B2 (en) * | 2005-10-28 | 2007-11-27 | International Business Machines Corporation | Tuned pinned layers for magnetic tunnel junctions with multicomponent free layers |
| JP2007266498A (ja) * | 2006-03-29 | 2007-10-11 | Toshiba Corp | 磁気記録素子及び磁気メモリ |
| JP2008283018A (ja) * | 2007-05-11 | 2008-11-20 | Tdk Corp | トンネル型磁気検出素子及びその製造方法 |
| JP5157268B2 (ja) | 2007-06-13 | 2013-03-06 | 株式会社日立製作所 | スピン蓄積磁化反転型のメモリ素子及びスピンram |
| JP5260040B2 (ja) | 2007-12-19 | 2013-08-14 | 株式会社日立製作所 | 単一方向電流磁化反転磁気抵抗効果素子と磁気記録装置 |
| US8223533B2 (en) * | 2008-09-26 | 2012-07-17 | Kabushiki Kaisha Toshiba | Magnetoresistive effect device and magnetic memory |
| US8344433B2 (en) * | 2009-04-14 | 2013-01-01 | Qualcomm Incorporated | Magnetic tunnel junction (MTJ) and methods, and magnetic random access memory (MRAM) employing same |
| US8362580B2 (en) * | 2009-12-08 | 2013-01-29 | Qualcomm Incorporated | Spin-transfer switching magnetic element utilizing a composite free layer comprising a superparamagnetic layer |
| US8981502B2 (en) * | 2010-03-29 | 2015-03-17 | Qualcomm Incorporated | Fabricating a magnetic tunnel junction storage element |
| JP5725735B2 (ja) | 2010-06-04 | 2015-05-27 | 株式会社日立製作所 | 磁気抵抗効果素子及び磁気メモリ |
| JP5492144B2 (ja) | 2011-05-27 | 2014-05-14 | 株式会社日立製作所 | 垂直磁化磁気抵抗効果素子及び磁気メモリ |
| JP2013093349A (ja) * | 2011-10-24 | 2013-05-16 | Toshiba Corp | 磁気記憶素子 |
| US9054030B2 (en) * | 2012-06-19 | 2015-06-09 | Micron Technology, Inc. | Memory cells, semiconductor device structures, memory systems, and methods of fabrication |
| US8747680B1 (en) * | 2012-08-14 | 2014-06-10 | Everspin Technologies, Inc. | Method of manufacturing a magnetoresistive-based device |
| US9231191B2 (en) * | 2012-08-20 | 2016-01-05 | Industrial Technology Research Institute | Magnetic tunnel junction device and method of making same |
| US9373775B2 (en) * | 2012-09-13 | 2016-06-21 | Micron Technology, Inc. | Methods of forming magnetic memory cells |
| JP5571142B2 (ja) | 2012-09-25 | 2014-08-13 | 株式会社東芝 | 磁気メモリ |
| JP2014229758A (ja) * | 2013-05-22 | 2014-12-08 | ソニー株式会社 | 半導体装置およびその製造方法 |
| GB2529773B (en) * | 2013-06-21 | 2020-10-28 | Intel Corp | MTJ spin hall MRAM bit-cell and array |
| JP5752831B2 (ja) | 2014-05-07 | 2015-07-22 | 株式会社東芝 | 磁気メモリ |
| US9576636B1 (en) * | 2015-04-03 | 2017-02-21 | Everspin Technologies, Inc. | Magnetic memory having ROM-like storage and method therefore |
| JP6130886B2 (ja) | 2015-09-16 | 2017-05-17 | 株式会社東芝 | 磁気素子及び記憶装置 |
| US9741926B1 (en) * | 2016-01-28 | 2017-08-22 | Spin Transfer Technologies, Inc. | Memory cell having magnetic tunnel junction and thermal stability enhancement layer |
| JP2018073913A (ja) * | 2016-10-26 | 2018-05-10 | 株式会社デンソー | 磁気センサおよびその製造方法 |
| CN110235201A (zh) * | 2016-12-27 | 2019-09-13 | 艾沃思宾技术公司 | 包括在磁隧道结中的合成反铁磁体中的数据存储 |
| US10794968B2 (en) * | 2017-08-24 | 2020-10-06 | Everspin Technologies, Inc. | Magnetic field sensor and method of manufacture |
-
2017
- 2017-08-08 JP JP2017153003A patent/JP7023637B2/ja active Active
- 2017-12-28 KR KR1020170181971A patent/KR102285125B1/ko active Active
-
2018
- 2018-01-29 TW TW107103019A patent/TWI716666B/zh active
- 2018-02-27 US US15/906,775 patent/US11165015B2/en active Active
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