JP2019021911A5 - - Google Patents

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Publication number
JP2019021911A5
JP2019021911A5 JP2018110443A JP2018110443A JP2019021911A5 JP 2019021911 A5 JP2019021911 A5 JP 2019021911A5 JP 2018110443 A JP2018110443 A JP 2018110443A JP 2018110443 A JP2018110443 A JP 2018110443A JP 2019021911 A5 JP2019021911 A5 JP 2019021911A5
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JP
Japan
Prior art keywords
region
forming region
adjusting unit
energy
pattern forming
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JP2018110443A
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English (en)
Japanese (ja)
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JP7262934B2 (ja
JP2019021911A (ja
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Priority to KR1020180078592A priority Critical patent/KR102375485B1/ko
Publication of JP2019021911A publication Critical patent/JP2019021911A/ja
Publication of JP2019021911A5 publication Critical patent/JP2019021911A5/ja
Priority to KR1020220031201A priority patent/KR102523310B1/ko
Application granted granted Critical
Publication of JP7262934B2 publication Critical patent/JP7262934B2/ja
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JP2018110443A 2017-07-14 2018-06-08 インプリント装置、物品製造方法および、平坦化装置 Active JP7262934B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020180078592A KR102375485B1 (ko) 2017-07-14 2018-07-06 임프린트 장치, 물품 제조 방법, 및 성형 장치
KR1020220031201A KR102523310B1 (ko) 2017-07-14 2022-03-14 임프린트 장치, 물품 제조 방법, 및 성형 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017137750 2017-07-14
JP2017137750 2017-07-14

Publications (3)

Publication Number Publication Date
JP2019021911A JP2019021911A (ja) 2019-02-07
JP2019021911A5 true JP2019021911A5 (zh) 2021-07-26
JP7262934B2 JP7262934B2 (ja) 2023-04-24

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ID=65355939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018110443A Active JP7262934B2 (ja) 2017-07-14 2018-06-08 インプリント装置、物品製造方法および、平坦化装置

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JP (1) JP7262934B2 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195789B2 (ja) * 2018-06-29 2022-12-26 キヤノン株式会社 平坦化装置、及び物品の製造方法
JP7278135B2 (ja) * 2019-04-02 2023-05-19 キヤノン株式会社 インプリント装置および物品製造方法
US11181819B2 (en) * 2019-05-31 2021-11-23 Canon Kabushiki Kaisha Frame curing method for extrusion control
JP7325232B2 (ja) * 2019-06-07 2023-08-14 キヤノン株式会社 膜形成装置および物品製造方法
JP7284639B2 (ja) * 2019-06-07 2023-05-31 キヤノン株式会社 成形装置、および物品製造方法
JP7263152B2 (ja) * 2019-06-27 2023-04-24 キヤノン株式会社 成形装置、成形装置を用いた物品製造方法
US11550216B2 (en) * 2019-11-25 2023-01-10 Canon Kabushiki Kaisha Systems and methods for curing a shaped film

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4481698B2 (ja) 2004-03-29 2010-06-16 キヤノン株式会社 加工装置
JP4928963B2 (ja) 2007-01-30 2012-05-09 東芝機械株式会社 転写方法及び装置
US8012394B2 (en) 2007-12-28 2011-09-06 Molecular Imprints, Inc. Template pattern density doubling
JP5787922B2 (ja) 2013-03-15 2015-09-30 株式会社東芝 パターン形成方法及びパターン形成装置
JP6632270B2 (ja) 2014-09-08 2020-01-22 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法
JP6437387B2 (ja) 2015-05-25 2018-12-12 東芝メモリ株式会社 基板平坦化方法

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