JP2019021911A5 - - Google Patents

Download PDF

Info

Publication number
JP2019021911A5
JP2019021911A5 JP2018110443A JP2018110443A JP2019021911A5 JP 2019021911 A5 JP2019021911 A5 JP 2019021911A5 JP 2018110443 A JP2018110443 A JP 2018110443A JP 2018110443 A JP2018110443 A JP 2018110443A JP 2019021911 A5 JP2019021911 A5 JP 2019021911A5
Authority
JP
Japan
Prior art keywords
region
forming region
adjusting unit
energy
pattern forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018110443A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019021911A (ja
JP7262934B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to KR1020180078592A priority Critical patent/KR102375485B1/ko
Publication of JP2019021911A publication Critical patent/JP2019021911A/ja
Publication of JP2019021911A5 publication Critical patent/JP2019021911A5/ja
Priority to KR1020220031201A priority patent/KR102523310B1/ko
Application granted granted Critical
Publication of JP7262934B2 publication Critical patent/JP7262934B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2018110443A 2017-07-14 2018-06-08 インプリント装置、物品製造方法および、平坦化装置 Active JP7262934B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020180078592A KR102375485B1 (ko) 2017-07-14 2018-07-06 임프린트 장치, 물품 제조 방법, 및 성형 장치
KR1020220031201A KR102523310B1 (ko) 2017-07-14 2022-03-14 임프린트 장치, 물품 제조 방법, 및 성형 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017137750 2017-07-14
JP2017137750 2017-07-14

Publications (3)

Publication Number Publication Date
JP2019021911A JP2019021911A (ja) 2019-02-07
JP2019021911A5 true JP2019021911A5 (fr) 2021-07-26
JP7262934B2 JP7262934B2 (ja) 2023-04-24

Family

ID=65355939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018110443A Active JP7262934B2 (ja) 2017-07-14 2018-06-08 インプリント装置、物品製造方法および、平坦化装置

Country Status (1)

Country Link
JP (1) JP7262934B2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195789B2 (ja) * 2018-06-29 2022-12-26 キヤノン株式会社 平坦化装置、及び物品の製造方法
JP7278135B2 (ja) * 2019-04-02 2023-05-19 キヤノン株式会社 インプリント装置および物品製造方法
US11181819B2 (en) * 2019-05-31 2021-11-23 Canon Kabushiki Kaisha Frame curing method for extrusion control
JP7284639B2 (ja) * 2019-06-07 2023-05-31 キヤノン株式会社 成形装置、および物品製造方法
JP7325232B2 (ja) * 2019-06-07 2023-08-14 キヤノン株式会社 膜形成装置および物品製造方法
JP7263152B2 (ja) * 2019-06-27 2023-04-24 キヤノン株式会社 成形装置、成形装置を用いた物品製造方法
US11550216B2 (en) 2019-11-25 2023-01-10 Canon Kabushiki Kaisha Systems and methods for curing a shaped film
JP7558674B2 (ja) * 2020-04-06 2024-10-01 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4481698B2 (ja) 2004-03-29 2010-06-16 キヤノン株式会社 加工装置
JP4928963B2 (ja) 2007-01-30 2012-05-09 東芝機械株式会社 転写方法及び装置
US8012394B2 (en) 2007-12-28 2011-09-06 Molecular Imprints, Inc. Template pattern density doubling
JP5787922B2 (ja) 2013-03-15 2015-09-30 株式会社東芝 パターン形成方法及びパターン形成装置
JP6632270B2 (ja) 2014-09-08 2020-01-22 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法
JP6437387B2 (ja) 2015-05-25 2018-12-12 東芝メモリ株式会社 基板平坦化方法

Similar Documents

Publication Publication Date Title
JP2019021911A5 (fr)
ATE554050T1 (de) Prägeverfahren und verfahren zur verarbeitung eines substrats
TWI472444B (zh) 立體圖紋製作方法與立體圖紋製作裝置
US20140346713A1 (en) Method and device for forming fine patterns
WO2016085334A3 (fr) Appareil permettant de fabriquer un objet à l'aide d'une impression 3d
TW200644120A (en) Ultraviolet curing process for low k dielectric films
JP2014027016A5 (ja) インプリント装置、インプリント方法、および、物品製造方法
JP2019075551A5 (fr)
SG10201709477TA (en) Imprint apparatus, imprinting method, and method for manufacturing article
JP2014120604A5 (fr)
EP3761114A4 (fr) Composition de résine sensible à la lumière active ou sensible au rayonnement, film de réserve, procédé de formation de motifs, procédé de production de dispositif électronique, et résine
US8772179B2 (en) Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor device
WO2008087597A3 (fr) Procédé de production de dispositif et appareil lithographique
JP2019080047A5 (fr)
MX2020009708A (es) Metodo para producir una lente de plastico que tiene una capa de recubrimiento.
KR20090039576A (ko) 도광판(導光板)의 제조방법
EP3757676A4 (fr) Composition de résine photosensible, procédé de production associé, film de réserve, procédé de formation de motif et procédé de production d'un dispositif électronique
MX2022006642A (es) Pelicula antidesgaste estructurada por medio de impresion digital con nivel de brillo ajustable.
DK1310381T3 (da) Fremgangsmåde til fremstilling af baneformede materialer med overfladestruktur og et apparat dertil
Hu et al. Fabrication of microlens arrays by a rolling process with soft polydimethylsiloxane molds
JP2019149415A5 (fr)
KR20090002815A (ko) 롤 스탬프를 이용한 양면 임프린트 방법
JP2022117092A5 (fr)
TWI495552B (zh) Method of manufacturing transfer die
JP2005144717A5 (fr)