JP2019004523A - 圧電振動デバイス - Google Patents
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Abstract
Description
本実施の形態にかかる水晶振動子101では、図1に示すように、水晶振動板2(本発明でいう圧電振動板)と、水晶振動板2の第1励振電極221(図4参照)を覆い、水晶振動板2の一主面211に形成された第1励振電極221を気密封止する第1封止部材3と、この水晶振動板2の他主面212に、水晶振動板2の第2励振電極222(図5参照)を覆い、第1励振電極221と対になって形成された第2励振電極222を気密封止する第2封止部材4が設けられている。この水晶振動子101では、水晶振動板2と第1封止部材3とが接合され、水晶振動板2と第2封止部材4とが接合されてサンドイッチ構造のパッケージ12が構成される。
また、本実施の形態では、圧電振動デバイスとして水晶振動子を用いているが、これに限定されるものではなく、圧電振動デバイスとして水晶発振器を用いてもよい。以下、圧電振動を行う圧電振動デバイスとして水晶発振器に本発明を適用した場合を示す。なお、便宜上、上記の水晶振動子101(図1〜図9参照)と共通の構成については、同一符号を付し、説明を省略する。また、共通の構成によって生じる作用効果も上記の水晶振動子101と同様であり、説明を省略する。以下では、本実施の形態にかかる水晶発振器について、上記の水晶振動子101とは異なる構成ついて主に説明する。
102 水晶発振器
13 内部空間
2 水晶振動板
211 一主面
212 他主面
221 第1励振電極
222 第2励振電極
23 振動部
269 第3貫通孔
3 第1封止部材
311 一主面
312 他主面
350 第7貫通孔
4 第2封止部材
71 貫通電極
72 貫通部分
Claims (5)
- 基板の一主面に第1励振電極が形成され、前記基板の他主面に前記第1励振電極と対になる第2励振電極が形成された圧電振動板と、
前記圧電振動板の前記第1励振電極を覆う第1封止部材と、
前記圧電振動板の前記第2励振電極を覆う第2封止部材と、が設けられ、
前記第1封止部材と前記圧電振動板とが接合され、前記第2封止部材と前記圧電振動板とが接合されて、前記第1励振電極と前記第2励振電極とを含む前記圧電振動板の振動部を気密封止した内部空間が形成された圧電振動デバイスにおいて、
前記第1励振電極及び前記第2励振電極は、前記圧電振動板の振動部を気密封止する封止部には電気的に接続されておらず、
前記圧電振動板には、一主面と他主面との間を貫通する圧電振動板用貫通孔が形成され、前記圧電振動板用貫通孔には、前記一主面と前記他主面とに形成された電極の導通を図るための貫通電極が形成され、かつ、貫通部分が形成され、
前記第1封止部材には、一主面と他主面との間を貫通する第1封止部材用貫通孔が形成され、前記第1封止部材用貫通孔には、前記一主面と前記他主面とに形成された電極の導通を図るための貫通電極が形成され、かつ、貫通部分が形成され、当該貫通電極は、前記圧電振動板用貫通孔の前記貫通電極に導通されており、
前記圧電振動板用貫通孔及び前記第1封止部材用貫通孔は、平面視で前記封止部よりも外方に設けられており、
前記圧電振動板用貫通孔と前記第1封止部材用貫通孔とが平面視で重畳しないように配置されていることを特徴とする圧電振動デバイス。 - 請求項1に記載の圧電振動デバイスにおいて、
前記第2封止部材には、一主面と他主面との間を貫通する第2封止部材用貫通孔が形成され、前記第2封止部材用貫通孔には、前記一主面と前記他主面とに形成された電極の導通を図るための貫通電極が形成され、かつ、貫通部分が形成され、当該貫通電極は、前記圧電振動板用貫通孔の前記貫通電極に導通されており、
前記第2封止部材用貫通孔は、平面視で前記封止部よりも外方に設けられており、
前記圧電振動板用貫通孔と前記第2封止部材用貫通孔とが平面視で重畳しないように配置されていることを特徴とする圧電振動デバイス。 - 請求項2に記載の圧電振動デバイスにおいて、
前記第2封止部材の他主面には、外部の回路基板に流動性導電接合材を用いて電気的に接続する一外部電極端子及び他外部電極端子が少なくとも設けられ、
前記圧電振動板の前記第1励振電極は、前記第1封止部材の前記一主面に形成された第1端子を経由して、前記第2封止部材の前記一外部電極端子に接続され、
前記圧電振動板の前記第2励振電極は、前記第1封止部材の前記一主面に形成された第2端子を経由して、前記第2封止部材の前記他外部電極端子に接続されていることを特徴とする圧電振動デバイス。 - 請求項2または3に記載の圧電振動デバイスにおいて、
前記圧電振動板用貫通孔の前記貫通電極、前記第1封止部材用貫通孔の前記貫通電極、及び、前記第2封止部材用貫通孔の前記貫通電極は、前記封止部には電気的に接続されていないことを特徴とする圧電振動デバイス。 - 請求項3または4に記載の圧電振動デバイスにおいて、
前記第1端子及び前記第2端子には、平面視で前記内部空間よりも外方側に位置する外側部分が設けられており、当該外側部分が、前記圧電振動板の前記振動部の検査用端子とされることを特徴とする圧電振動デバイス。
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