JP2018526822A - 摩擦が低減された支持表面を特徴とするウエハチャック - Google Patents
摩擦が低減された支持表面を特徴とするウエハチャック Download PDFInfo
- Publication number
- JP2018526822A JP2018526822A JP2018507638A JP2018507638A JP2018526822A JP 2018526822 A JP2018526822 A JP 2018526822A JP 2018507638 A JP2018507638 A JP 2018507638A JP 2018507638 A JP2018507638 A JP 2018507638A JP 2018526822 A JP2018526822 A JP 2018526822A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer chuck
- chuck
- friction
- radial direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/24—Chucks characterised by features relating primarily to remote control of the gripping means
- B23B31/28—Chucks characterised by features relating primarily to remote control of the gripping means using electric or magnetic means in the chuck
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/24—Chucks characterised by features relating primarily to remote control of the gripping means
- B23B31/30—Chucks characterised by features relating primarily to remote control of the gripping means using fluid-pressure means in the chuck
- B23B31/307—Vacuum chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
【選択図】図8A
Description
本出願は、発明者であるEdward Gratrix他の名義において2015年8月14日付けで出願された「Wafer chuck featuring reduced friction support surface for enhanced wafer settling thereon」という名称の米国仮特許出願第62/205,425号明細書の利益を主張する。この仮特許出願の内容は、適宜、引用により、そのすべてが本明細書に包含される。
なし。
まずは最初に、ウエハは、なぜフラットな状態ではないのか。ウエハが加工される際には、且つ、製造の固有の制約により、ウエハは、フラットな状態にはない。しばしば、フロントエンド半導体ライン内において実行されるプロセスにより、薄膜がウエハに追加されており、その結果、ウエハは、多少湾曲することになる。この曲りは、上向き又は下向きのうちの、任意の方向でありうる。フラットな状態からの逸脱の過半は、曲がりの形態を有しており、且つ、変形は、球形又は円筒形としてのものである。
図5A〜図7Dに対応するラッピング試験の結果は、方向性をラッピングプロセスに対して付与することが可能であり、表面高さ又は表面粗度の勾配を工学的に設計することが可能であり、且つ、具体的には、これに対して方向性を付与することが可能であることを示している。又、結果は、2つの表面の間の摩擦を克服するべく必要とされる力に対して方向性を付与することができることをも示唆しており、且つ、具体的には、ラッピング方向に直交する摩擦力が、ラッピング方向に平行な摩擦力を上回ることになることを示唆している。ウエハチャック上において安着するウエハは、半径方向において(即ち、半径の方向において)「緩和」される必要があることから、これは、ラッピングが、或いは、少なくともラッピング動作の最後のストロークが、ウエハチャック支持表面に沿って半径方向において実行される必要があることを示唆している。
Claims (13)
- 主には半径方向において方向付けられたスクラッチを有する支持表面を有することを特徴とするウエハチャック。
- ウエハを支持するように構成された表面を有するウエハチャックにおいて、前記表面は、周囲方向におけるよりも半径方向において小さな摩擦係数を有することを特徴とするウエハチャック。
- ウエハを支持するように構成された表面を有するウエハチャックにおいて、前記表面は、前記表面上における前記ウエハの予期される摺動の方向において計測された、前記表面の粗度の勾配を極小化するように、摩擦学的な方式によって加工されていることを特徴とするウエハチャック。
- 請求項3に記載のウエハチャックにおいて、前記予期される摺動の方向は、半径方向であることを特徴とするウエハチャック。
- 星形形状のパターンにおけるスクラッチを有するウエハチャックにおいて、前記星形は、少なくとも8つのポイントを有することを特徴とするウエハチャック。
- そのウエハ支持表面が、好ましい向きを有するラッピングスクラッチを有するウエハチャックにおいて、前記好ましい向きは、半径方向であることを特徴とするウエハチャック。
- 請求項1に記載のウエハチャックにおいて、前記ウエハチャックとほぼ同一の硬度を有するラッピングツールによって製造されることを特徴とするウエハチャック。
- 請求項1に記載のウエハチャックにおいて、SiCを有するラッピングツールによって製造されることを特徴とするウエハチャック。
- 請求項1に記載のウエハチャックにおいて、ドーナツ形の形状を有するラッピングツールによって製造されることを特徴とするウエハチャック。
- 請求項9に記載のウエハチャックにおいて、前記ラッピングツールは、約28ミリメートルの直径を有し、且つ、約180グラムの負荷を前記ウエハチャックに印加することを特徴とするウエハチャック。
- 請求項10に記載のウエハチャックにおいて、前記ラッピングツールは、約3メートル/分の速度において前記ウエハチャック上において運動することを特徴とするウエハチャック。
- 請求項1に記載のウエハチャックにおいて、環状形状を有するラッピングツールによって製造されることを特徴とするウエハチャック。
- 請求項1に記載のウエハチャックにおいて、前記支持表面は、複数のピンを有することを特徴とするウエハチャック。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562205425P | 2015-08-14 | 2015-08-14 | |
US62/205,425 | 2015-08-14 | ||
PCT/US2016/046436 WO2017030873A1 (en) | 2015-08-14 | 2016-08-10 | Wafer chuck featuring reduced friction support surface |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018526822A true JP2018526822A (ja) | 2018-09-13 |
JP2018526822A5 JP2018526822A5 (ja) | 2021-05-13 |
JP7041051B2 JP7041051B2 (ja) | 2022-03-23 |
Family
ID=58050865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018507638A Active JP7041051B2 (ja) | 2015-08-14 | 2016-08-10 | 摩擦が低減された支持表面を特徴とするウエハチャック |
Country Status (4)
Country | Link |
---|---|
US (1) | US10790181B2 (ja) |
EP (1) | EP3334566B1 (ja) |
JP (1) | JP7041051B2 (ja) |
WO (1) | WO2017030873A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112969966A (zh) * | 2018-11-05 | 2021-06-15 | Asml控股股份有限公司 | 在硬陶瓷涂层中制造纳米脊的方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09191015A (ja) * | 1996-01-11 | 1997-07-22 | Canon Inc | 熱処理装置 |
JPH1071562A (ja) * | 1996-05-10 | 1998-03-17 | Canon Inc | 化学機械研磨装置および方法 |
JP2000061842A (ja) * | 1998-08-18 | 2000-02-29 | Toshiba Mach Co Ltd | 研磨装置 |
JP2002057209A (ja) * | 2000-06-01 | 2002-02-22 | Tokyo Electron Ltd | 枚葉式処理装置および枚葉式処理方法 |
JP2008198843A (ja) * | 2007-02-14 | 2008-08-28 | Tokyo Electron Ltd | 基板載置台及びその表面処理方法 |
JP2009214271A (ja) * | 2008-03-12 | 2009-09-24 | Tosoh Corp | 研磨装置用の研磨工具および研磨方法 |
JP2018511185A (ja) * | 2015-02-23 | 2018-04-19 | エム キューブド テクノロジーズ, インコーポレーテッドM Cubed Technologies, Inc. | 静電チャック用薄膜電極 |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4551192A (en) | 1983-06-30 | 1985-11-05 | International Business Machines Corporation | Electrostatic or vacuum pinchuck formed with microcircuit lithography |
US4692836A (en) * | 1983-10-31 | 1987-09-08 | Toshiba Kikai Kabushiki Kaisha | Electrostatic chucks |
US5342068A (en) * | 1993-08-26 | 1994-08-30 | Texas Instruments Incorporated | Laminar flow vacuum chuck |
JPH07171747A (ja) | 1993-12-21 | 1995-07-11 | Ricoh Co Ltd | 研削研磨装置 |
US5692873A (en) | 1995-03-31 | 1997-12-02 | Motorola, Inc. | Apparatus for holding a piece of semiconductor |
JPH0936070A (ja) | 1995-07-21 | 1997-02-07 | Nippon Steel Corp | 半導体ウエハの研磨装置 |
KR100264228B1 (ko) | 1996-05-10 | 2000-12-01 | 미다라이 후지오 | 화학 기계 연마 장치 및 방법 |
US6217655B1 (en) | 1997-01-31 | 2001-04-17 | Applied Materials, Inc. | Stand-off pad for supporting a wafer on a substrate support chuck |
US6063202A (en) * | 1997-09-26 | 2000-05-16 | Novellus Systems, Inc. | Apparatus for backside and edge exclusion of polymer film during chemical vapor deposition |
US6215642B1 (en) | 1999-03-11 | 2001-04-10 | Nikon Corporation Of Japan | Vacuum compatible, deformable electrostatic chuck with high thermal conductivity |
US6264467B1 (en) * | 1999-04-14 | 2001-07-24 | Applied Materials, Inc. | Micro grooved support surface for reducing substrate wear and slip formation |
TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
US6353271B1 (en) | 1999-10-29 | 2002-03-05 | Euv, Llc | Extreme-UV scanning wafer and reticle stages |
WO2001056074A1 (fr) | 2000-01-28 | 2001-08-02 | Hitachi Tokyo Electronics Co., Ltd. | Support de tranche, systeme d'exposition et procede de fabrication de dispositif a semiconducteur |
JP3859937B2 (ja) | 2000-06-02 | 2006-12-20 | 住友大阪セメント株式会社 | 静電チャック |
US6717159B2 (en) | 2000-10-18 | 2004-04-06 | Nikon Corporation | Low distortion kinematic reticle support |
KR100422444B1 (ko) | 2001-05-29 | 2004-03-12 | 삼성전자주식회사 | 정전 척에 설치되는 웨이퍼 공간 지지장치 및 그 제조방법 |
US9627244B2 (en) | 2002-12-20 | 2017-04-18 | Mattson Technology, Inc. | Methods and systems for supporting a workpiece and for heat-treating the workpiece |
CN100467210C (zh) * | 2004-03-25 | 2009-03-11 | 揖斐电株式会社 | 真空卡盘和吸附板 |
US7150677B2 (en) | 2004-09-22 | 2006-12-19 | Mitsubishi Materials Corporation | CMP conditioner |
JP4049172B2 (ja) | 2005-07-13 | 2008-02-20 | 住友電気工業株式会社 | ウェハプローバ用ウェハ保持体およびそれを搭載したウェハプローバ |
JP4756583B2 (ja) | 2005-08-30 | 2011-08-24 | 株式会社東京精密 | 研磨パッド、パッドドレッシング評価方法、及び研磨装置 |
EP1772901B1 (en) * | 2005-10-07 | 2012-07-25 | Rohm and Haas Electronic Materials, L.L.C. | Wafer holding article and method for semiconductor processing |
US8057633B2 (en) * | 2006-03-28 | 2011-11-15 | Tokyo Electron Limited | Post-etch treatment system for removing residue on a substrate |
WO2007145505A1 (en) * | 2006-06-12 | 2007-12-21 | Xycarb Ceramics B.V. | Method for manufacturing a device for supporting a substrate during the manufacture of semiconductor components, as well as such a device |
NL1031985C2 (nl) * | 2006-06-12 | 2007-12-13 | Xycarb Ceramics B V | Werkwijze voor het vervaardigen van een inrichting voor het ondersteunen van een substraat tijdens de vervaardiging van halfgeleider-componenten alsmede een dergelijke inrichting. |
US20080100812A1 (en) * | 2006-10-26 | 2008-05-01 | Nikon Corporation | Immersion lithography system and method having a wafer chuck made of a porous material |
JP5099476B2 (ja) | 2006-12-28 | 2012-12-19 | 株式会社ニコン | 清掃装置及び清掃システム、パターン形成装置、清掃方法及び露光方法、並びにデバイス製造方法 |
JP5018249B2 (ja) | 2007-06-04 | 2012-09-05 | 株式会社ニコン | クリーニング装置、クリーニング方法、露光装置、及びデバイス製造方法 |
JP2010153407A (ja) | 2008-12-23 | 2010-07-08 | Nikon Corp | 清掃方法及び装置、並びに露光方法及び装置 |
JP5402391B2 (ja) * | 2009-01-27 | 2014-01-29 | 信越化学工業株式会社 | 半導体用合成石英ガラス基板の加工方法 |
NL2004153A (en) | 2009-02-24 | 2010-08-25 | Asml Netherlands Bv | Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system. |
US20100330890A1 (en) | 2009-06-30 | 2010-12-30 | Zine-Eddine Boutaghou | Polishing pad with array of fluidized gimballed abrasive members |
JP5810517B2 (ja) | 2010-12-02 | 2015-11-11 | 富士電機株式会社 | 吸着装置および吸着方法 |
JP2013095973A (ja) | 2011-11-02 | 2013-05-20 | Tocalo Co Ltd | 半導体製造装置用部材 |
US10137576B2 (en) * | 2011-12-16 | 2018-11-27 | Brooks Automation, Inc. | Transport apparatus |
JP6085616B2 (ja) | 2012-02-03 | 2017-02-22 | エーエスエムエル ネザーランズ ビー.ブイ. | 基板ホルダ、リソグラフィ装置、デバイス製造方法及び基板ホルダの製造方法 |
JP6085152B2 (ja) | 2012-11-22 | 2017-02-22 | 日本特殊陶業株式会社 | 真空チャック |
US20140184003A1 (en) | 2012-12-31 | 2014-07-03 | Cascade Microtech, Inc. | Systems and methods for rotational alignment of a device under test |
JP6034717B2 (ja) | 2013-02-22 | 2016-11-30 | 株式会社荏原製作所 | ドレッサの研磨部材上の摺動距離分布の取得方法、ドレッサの研磨部材上の摺動ベクトル分布の取得方法、および研磨装置 |
JP2014128877A (ja) | 2014-03-03 | 2014-07-10 | Femutekku:Kk | 表面加工装置及び方法 |
NL2014516A (en) * | 2014-04-30 | 2016-03-08 | Asml Netherlands Bv | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method. |
JP2016058675A (ja) | 2014-09-12 | 2016-04-21 | 株式会社東芝 | 研磨装置および半導体ウェハの研磨方法 |
KR102618488B1 (ko) | 2014-11-23 | 2023-12-27 | 엠 큐브드 테크놀로지스 | 웨이퍼 핀 척 제조 및 수리 |
-
2016
- 2016-08-10 EP EP16837531.9A patent/EP3334566B1/en active Active
- 2016-08-10 JP JP2018507638A patent/JP7041051B2/ja active Active
- 2016-08-10 US US15/567,935 patent/US10790181B2/en active Active
- 2016-08-10 WO PCT/US2016/046436 patent/WO2017030873A1/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09191015A (ja) * | 1996-01-11 | 1997-07-22 | Canon Inc | 熱処理装置 |
JPH1071562A (ja) * | 1996-05-10 | 1998-03-17 | Canon Inc | 化学機械研磨装置および方法 |
JP2000061842A (ja) * | 1998-08-18 | 2000-02-29 | Toshiba Mach Co Ltd | 研磨装置 |
JP2002057209A (ja) * | 2000-06-01 | 2002-02-22 | Tokyo Electron Ltd | 枚葉式処理装置および枚葉式処理方法 |
JP2008198843A (ja) * | 2007-02-14 | 2008-08-28 | Tokyo Electron Ltd | 基板載置台及びその表面処理方法 |
JP2009214271A (ja) * | 2008-03-12 | 2009-09-24 | Tosoh Corp | 研磨装置用の研磨工具および研磨方法 |
JP2018511185A (ja) * | 2015-02-23 | 2018-04-19 | エム キューブド テクノロジーズ, インコーポレーテッドM Cubed Technologies, Inc. | 静電チャック用薄膜電極 |
Also Published As
Publication number | Publication date |
---|---|
EP3334566A1 (en) | 2018-06-20 |
WO2017030873A1 (en) | 2017-02-23 |
JP7041051B2 (ja) | 2022-03-23 |
US10790181B2 (en) | 2020-09-29 |
US20180122684A1 (en) | 2018-05-03 |
EP3334566A4 (en) | 2019-06-19 |
EP3334566B1 (en) | 2021-11-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10242905B2 (en) | Wafer pin chuck fabrication and repair | |
TW567109B (en) | Method and apparatus for polishing outer peripheral chamfered part of wafer | |
JP2022174267A (ja) | 基板のボンディング装置及び方法 | |
KR101856250B1 (ko) | 반도체용 유리 기판 및 그의 제조 방법 | |
JP2007225105A (ja) | 低摩擦摺動部材、その製造装置並びに製造方法 | |
JP7021632B2 (ja) | ウェーハの製造方法およびウェーハ | |
US9180572B2 (en) | Chemical mechanical polishing conditioner and manufacturing methods thereof | |
JP2018030227A (ja) | 基板の製造方法 | |
JP2018526822A (ja) | 摩擦が低減された支持表面を特徴とするウエハチャック | |
JP7032307B2 (ja) | チャック表面の決定論的な仕上げのための方法 | |
JP2023095890A (ja) | リソグラフィ装置で用いる基板ホルダ及びデバイス製造方法 | |
TWI712555B (zh) | 用於夾持翹曲晶圓之裝置及方法 | |
JP6942117B2 (ja) | チャック面から汚染を除去するための方法 | |
JP6840639B2 (ja) | 両面研磨装置用キャリア | |
JP2021053726A (ja) | ワークの両面研磨方法 | |
JP2018526822A5 (ja) | ||
US20190232458A1 (en) | CMP groove processing positioning method and positioning device | |
EP4064352A3 (en) | Method for manufacturing semiconductor device | |
US20150306728A1 (en) | Systems for, methods of, and apparatus for processing substrate surfaces | |
JP2006175534A (ja) | 研磨方法及び研磨装置 | |
JP2009000749A (ja) | 非球面研磨工具 | |
JP2010071646A (ja) | プローブの加工方法 | |
TWM569924U (zh) | Resistance sheet clamping device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190807 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190807 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201104 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20210204 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20210402 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211005 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20211105 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211224 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220215 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220310 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7041051 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |