JP2018521454A5 - - Google Patents

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Publication number
JP2018521454A5
JP2018521454A5 JP2017559699A JP2017559699A JP2018521454A5 JP 2018521454 A5 JP2018521454 A5 JP 2018521454A5 JP 2017559699 A JP2017559699 A JP 2017559699A JP 2017559699 A JP2017559699 A JP 2017559699A JP 2018521454 A5 JP2018521454 A5 JP 2018521454A5
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JP
Japan
Prior art keywords
electrode
dielectric barrier
ground electrode
power
discharge plasma
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JP2017559699A
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English (en)
Japanese (ja)
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JP6788615B2 (ja
JP2018521454A (ja
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Priority claimed from KR1020150070145A external-priority patent/KR101682903B1/ko
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Publication of JP2018521454A5 publication Critical patent/JP2018521454A5/ja
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Publication of JP6788615B2 publication Critical patent/JP6788615B2/ja
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JP2017559699A 2015-05-20 2016-05-18 表面処理用線形誘電体バリア放電プラズマ発生装置 Active JP6788615B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2015-0070145 2015-05-20
KR1020150070145A KR101682903B1 (ko) 2015-05-20 2015-05-20 표면 처리용 선형 유전체 장벽 방전 플라즈마 발생장치
PCT/KR2016/005218 WO2016186431A1 (ko) 2015-05-20 2016-05-18 표면 처리용 선형 유전체 장벽 방전 플라즈마 발생장치

Publications (3)

Publication Number Publication Date
JP2018521454A JP2018521454A (ja) 2018-08-02
JP2018521454A5 true JP2018521454A5 (enExample) 2019-08-15
JP6788615B2 JP6788615B2 (ja) 2020-11-25

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ID=57320659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017559699A Active JP6788615B2 (ja) 2015-05-20 2016-05-18 表面処理用線形誘電体バリア放電プラズマ発生装置

Country Status (4)

Country Link
JP (1) JP6788615B2 (enExample)
KR (1) KR101682903B1 (enExample)
CN (1) CN107624268B (enExample)
WO (1) WO2016186431A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110124482A (zh) * 2018-02-09 2019-08-16 中国石油化工股份有限公司 低温等离子体反应器和分解硫化氢的方法
RU2753275C1 (ru) * 2018-02-09 2021-08-12 Чайна Петролиум энд Кемикал Корпорейшн Устройство для осуществления низкотемпературной плазменной реакции и способ разложения сероводорода
KR102024568B1 (ko) * 2018-02-13 2019-09-24 한국기초과학지원연구원 환형 면방전 플라즈마 장치를 이용한 점상 식각 모듈 및 점상 식각 모듈의 식각 프로파일을 제어하는 방법
KR102376127B1 (ko) * 2018-05-30 2022-03-18 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 활성 가스 생성 장치
DE102019101063B4 (de) * 2019-01-16 2021-02-25 Cinogy Gmbh Plasma-Behandlungsanordnung und Verfahren zur Anpassung der Größe einer Auflagefläche der Plasma-Behandlungsanordnung an die Größe der zu behandelnden Oberfläche
CN110035594B (zh) * 2019-03-18 2021-04-13 西安交通大学 基于介质阻挡放电等离子体的材料改性装置、系统及方法
CN115717233B (zh) * 2022-04-14 2025-05-27 南京工业大学 一种多模式低温等离子体金属表面薄膜沉积装置及方法

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
KR100253723B1 (ko) * 1997-07-03 2000-04-15 지종기 진공 분위기를 형성하여 전극의 내구성을 높인 고온 직류 플라즈마 토취
JP2934852B1 (ja) * 1998-03-23 1999-08-16 科学技術振興事業団 プラズマ処理装置
EP0997926B1 (en) * 1998-10-26 2006-01-04 Matsushita Electric Works, Ltd. Plasma treatment apparatus and method
EP1073091A3 (en) * 1999-07-27 2004-10-06 Matsushita Electric Works, Ltd. Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus
JP2002018276A (ja) * 2000-07-10 2002-01-22 Pearl Kogyo Kk 大気圧プラズマ処理装置
JP2003208999A (ja) * 2002-01-10 2003-07-25 Sekisui Chem Co Ltd 放電プラズマ処理方法及びその装置
KR20030091438A (ko) * 2002-05-28 2003-12-03 (주)플라젠 플라즈마 분사장치 및 그 장치를 이용한 표면처리방법
KR100530735B1 (ko) * 2002-09-12 2005-11-28 송석균 상압 플라즈마 발생장치
CN100553400C (zh) * 2003-05-14 2009-10-21 积水化学工业株式会社 制造等离子处理设备的方法
CN1826843A (zh) * 2003-07-23 2006-08-30 积水化学工业株式会社 等离子处理装置和电极结构
JP2006040667A (ja) 2004-07-26 2006-02-09 Sharp Corp プラズマ表面処理装置
JP2006306687A (ja) * 2005-05-02 2006-11-09 Hino Motors Ltd 燃料改質器
US8328982B1 (en) * 2005-09-16 2012-12-11 Surfx Technologies Llc Low-temperature, converging, reactive gas source and method of use
KR100789562B1 (ko) * 2005-12-01 2007-12-28 주식회사 엘지화학 금속적층판의 제조방법 및 이에 의해 제조된 금속적층판
KR100760551B1 (ko) * 2006-06-27 2007-09-20 주식회사 에이피피 상압 플라즈마 발생장치
KR100872682B1 (ko) * 2007-02-02 2008-12-10 강방권 균일한 상압 플라즈마 발생장치
CN101277575A (zh) * 2007-03-28 2008-10-01 赖中平 在彩色滤光片上提高喷墨打印产出量率的制程方法及其装置
KR101092963B1 (ko) * 2010-01-26 2011-12-12 비아이 이엠티 주식회사 대기압 플라즈마 발생장치
CN103889138B (zh) * 2012-12-24 2016-06-29 中国科学院微电子研究所 等离子体放电装置

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