JP2018513093A5 - - Google Patents
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- Publication number
- JP2018513093A5 JP2018513093A5 JP2017549726A JP2017549726A JP2018513093A5 JP 2018513093 A5 JP2018513093 A5 JP 2018513093A5 JP 2017549726 A JP2017549726 A JP 2017549726A JP 2017549726 A JP2017549726 A JP 2017549726A JP 2018513093 A5 JP2018513093 A5 JP 2018513093A5
- Authority
- JP
- Japan
- Prior art keywords
- silica
- titania
- glass portion
- titania glass
- composite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 31
- 239000011521 glass Substances 0.000 claims 29
- 239000002131 composite material Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 5
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims 4
- 239000002019 doping agent Substances 0.000 claims 1
- 238000010583 slow cooling Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562138483P | 2015-03-26 | 2015-03-26 | |
| US62/138,483 | 2015-03-26 | ||
| PCT/US2016/023557 WO2016154190A1 (en) | 2015-03-26 | 2016-03-22 | Glass composite for use in extreme ultra-violet lithography |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020026898A Division JP7012761B2 (ja) | 2015-03-26 | 2020-02-20 | 極紫外線リソグラフィーに使用するためのガラス複合体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018513093A JP2018513093A (ja) | 2018-05-24 |
| JP2018513093A5 true JP2018513093A5 (enExample) | 2018-10-25 |
Family
ID=55661618
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017549726A Pending JP2018513093A (ja) | 2015-03-26 | 2016-03-22 | 極紫外線リソグラフィーに使用するためのガラス複合体 |
| JP2020026898A Active JP7012761B2 (ja) | 2015-03-26 | 2020-02-20 | 極紫外線リソグラフィーに使用するためのガラス複合体 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020026898A Active JP7012761B2 (ja) | 2015-03-26 | 2020-02-20 | 極紫外線リソグラフィーに使用するためのガラス複合体 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10427974B2 (enExample) |
| EP (1) | EP3274311B1 (enExample) |
| JP (2) | JP2018513093A (enExample) |
| WO (1) | WO2016154190A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3173386B1 (de) * | 2015-11-25 | 2018-05-02 | Heraeus Quarzglas GmbH & Co. KG | Verfahren zur herstellung eines verbundkörpers aus hochkieselsäurehaltigem werkstoff |
| US10486997B2 (en) * | 2016-11-10 | 2019-11-26 | Goodrich Corporation | Joining members using additive manufacturing |
| CN111295170B (zh) | 2017-10-27 | 2024-07-02 | 康宁股份有限公司 | 通过大气压等离子体处理聚合物材料的表面的方法 |
| US12117731B2 (en) | 2022-12-13 | 2024-10-15 | Carl Zeiss Smt Gmbh | Method for producing a mirror of a microlithographic projection exposure apparatus |
| DE102023200970A1 (de) | 2023-02-07 | 2024-08-08 | Carl Zeiss Smt Gmbh | Optisches element mit polierschicht |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3690855A (en) | 1970-08-19 | 1972-09-12 | Corning Glass Works | Method for producing tio2-sio2 glasses |
| JPS63201026A (ja) * | 1987-02-12 | 1988-08-19 | Seiko Instr & Electronics Ltd | 石英部品の振動加熱接合法 |
| JP4350168B2 (ja) | 1997-03-07 | 2009-10-21 | コーニング インコーポレイテッド | チタニアドープ溶融シリカの製造方法 |
| US6131410A (en) | 1998-03-16 | 2000-10-17 | The Regents Of The University Of California | Vacuum fusion bonding of glass plates |
| USRE41220E1 (en) | 1999-07-22 | 2010-04-13 | Corning Incorporated | Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements |
| EP1195360A1 (de) | 2000-09-01 | 2002-04-10 | Degussa AG | Verfahren zur Herstellung von SiO2-TiO2-Gläsern mit geringem thermischen Ausdehnungskoeffizient |
| EP1184350B1 (de) * | 2000-09-01 | 2006-05-17 | Degussa AG | Verfahren zur Herstellung von SiO2-TiO2-Gläsern mit geringem thermischen Ausdehnungskoeffizient |
| US7053017B2 (en) | 2002-03-05 | 2006-05-30 | Corning Incorporated | Reduced striae extreme ultraviolet elements |
| JP2004131373A (ja) | 2002-09-09 | 2004-04-30 | Corning Inc | シリカ・チタニア極端紫外線光学素子の製造方法 |
| US7155936B2 (en) | 2003-08-08 | 2007-01-02 | Corning Incorporated | Doped silica glass articles and methods of forming doped silica glass boules and articles |
| US20060179879A1 (en) * | 2004-12-29 | 2006-08-17 | Ellison Adam J G | Adjusting expansivity in doped silica glasses |
| TW200940472A (en) | 2007-12-27 | 2009-10-01 | Asahi Glass Co Ltd | TiO2-containing silica glass |
| JP5365247B2 (ja) | 2008-02-25 | 2013-12-11 | 旭硝子株式会社 | ＴｉＯ２を含有するシリカガラスおよびそれを用いたリソグラフィ用光学部材 |
| JP5417884B2 (ja) | 2008-02-27 | 2014-02-19 | 旭硝子株式会社 | ＴｉＯ２を含有するシリカガラスおよびそれを用いたリソグラフィ用光学部材 |
| DE102008011354B3 (de) | 2008-02-27 | 2009-09-24 | Carl Zeiss Smt Ag | Verfahren zum Verbinden zweier Komponenten zu einer Verbundstruktur durch "fusion bonding" sowie damit hergestellte Verbundstruktur, optisches Element, Haltevorrichtung, Projektionsobjektiv und Projektionsbelichtungsanlage |
| JP5644058B2 (ja) | 2008-03-21 | 2014-12-24 | 旭硝子株式会社 | ＴｉＯ２を含有するシリカガラス |
| JP5287271B2 (ja) | 2009-01-13 | 2013-09-11 | 旭硝子株式会社 | ＴｉＯ２を含有するシリカガラスの成型方法およびそれによって成型されたＥＵＶリソグラフィ用光学部材 |
| US8328417B2 (en) | 2009-08-20 | 2012-12-11 | Corning Incorporated | Photoelastic method for absolute determination of zero CTE crossover in low expansion silica-titania glass samples |
| DE102010039779A1 (de) | 2009-08-28 | 2011-03-24 | Corning Inc. | Glas mit geringer wärmeausdehnung für euvl-anwendungen |
| US8713969B2 (en) | 2009-08-31 | 2014-05-06 | Corning Incorporated | Tuning Tzc by the annealing of ultra low expansion glass |
| DE102009043680A1 (de) | 2009-09-30 | 2011-03-31 | Heraeus Quarzglas Gmbh & Co. Kg | Rohling aus Titan-dotiertem, hochkieselsäurehaltigem Glas für ein Spiegelsubstrat für den Einsatz in der EUV-Lithographie und Verfahren für seine Herstellung |
| EP2518030A4 (en) | 2009-12-01 | 2013-09-11 | Asahi Glass Co Ltd | SILICA GLASS CONTAINING TIO2 |
| US20110207593A1 (en) * | 2010-02-25 | 2011-08-25 | Carlos Duran | Expansivity in Low Expansion Silica-Titania Glasses |
| US8541325B2 (en) * | 2010-02-25 | 2013-09-24 | Corning Incorporated | Low expansivity, high transmission titania doped silica glass |
| US20120026473A1 (en) | 2010-07-29 | 2012-02-02 | Michael Lucien Genier | Highly reflective, hardened silica titania article and method of making |
| JP5724657B2 (ja) * | 2011-06-14 | 2015-05-27 | 旭硝子株式会社 | ガラス基板保持手段、およびそれを用いたｅｕｖマスクブランクスの製造方法 |
| US20130047669A1 (en) * | 2011-08-31 | 2013-02-28 | Sezhian Annamalai | Method of making a silica-titania glass having a ternary doped critical zone |
| US9034450B2 (en) * | 2011-08-31 | 2015-05-19 | Corning Incorporated | Binary silica-titania glass articles having a ternary doped silica-titania critical zone |
| US8901019B2 (en) * | 2012-11-30 | 2014-12-02 | Corning Incorporated | Very low CTE slope doped silica-titania glass |
| US9505649B2 (en) * | 2013-09-13 | 2016-11-29 | Corning Incorporated | Ultralow expansion glass |
| US9382151B2 (en) * | 2014-01-31 | 2016-07-05 | Corning Incorporated | Low expansion silica-titania articles with a Tzc gradient by compositional variation |
| US9382150B2 (en) * | 2014-03-14 | 2016-07-05 | Corning Incorporated | Boron-doped titania-silica glass having very low CTE slope |
| US9611169B2 (en) * | 2014-12-12 | 2017-04-04 | Corning Incorporated | Doped ultra-low expansion glass and methods for making the same |
| US9822030B2 (en) * | 2015-02-13 | 2017-11-21 | Corning Incorporated | Ultralow expansion titania-silica glass |
| US9932261B2 (en) * | 2015-11-23 | 2018-04-03 | Corning Incorporated | Doped ultra-low expansion glass and methods for annealing the same |
-
2016
- 2016-03-22 EP EP16714686.9A patent/EP3274311B1/en active Active
- 2016-03-22 US US15/559,958 patent/US10427974B2/en active Active
- 2016-03-22 JP JP2017549726A patent/JP2018513093A/ja active Pending
- 2016-03-22 WO PCT/US2016/023557 patent/WO2016154190A1/en not_active Ceased
-
2020
- 2020-02-20 JP JP2020026898A patent/JP7012761B2/ja active Active
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