JP2018512563A - センサデバイス及び方法 - Google Patents

センサデバイス及び方法 Download PDF

Info

Publication number
JP2018512563A
JP2018512563A JP2017538640A JP2017538640A JP2018512563A JP 2018512563 A JP2018512563 A JP 2018512563A JP 2017538640 A JP2017538640 A JP 2017538640A JP 2017538640 A JP2017538640 A JP 2017538640A JP 2018512563 A JP2018512563 A JP 2018512563A
Authority
JP
Japan
Prior art keywords
region
sensor
flow path
particle
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017538640A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018512563A5 (enExample
Inventor
デクラン パトリック ケリー
デクラン パトリック ケリー
マイケル マルティン シェジャ
マイケル マルティン シェジャ
コルネリス レインダー ロンダ
コルネリス レインダー ロンダ
コレイ カラカヤ
コレイ カラカヤ
ヤン フレデリック サイヴァー
ヤン フレデリック サイヴァー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of JP2018512563A publication Critical patent/JP2018512563A/ja
Publication of JP2018512563A5 publication Critical patent/JP2018512563A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D49/00—Separating dispersed particles from gases, air or vapours by other methods
    • B01D49/02—Separating dispersed particles from gases, air or vapours by other methods by thermal repulsion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D51/00—Auxiliary pretreatment of gases or vapours to be cleaned
    • B01D51/02—Amassing the particles, e.g. by flocculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0019—Means for transferring or separating particles prior to analysis, e.g. hoppers or particle conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/155—Monitoring cleanness of window, lens, or other parts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2017538640A 2015-03-27 2016-03-16 センサデバイス及び方法 Pending JP2018512563A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CN2015075276 2015-03-27
CNPCT/CN2015/075276 2015-03-27
EP15166494 2015-05-06
EP15166494.3 2015-05-06
PCT/EP2016/055615 WO2016156035A1 (en) 2015-03-27 2016-03-16 Protecting an optical particle sensor from particulate deposits by thermophoresis

Publications (2)

Publication Number Publication Date
JP2018512563A true JP2018512563A (ja) 2018-05-17
JP2018512563A5 JP2018512563A5 (enExample) 2019-11-14

Family

ID=55650387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017538640A Pending JP2018512563A (ja) 2015-03-27 2016-03-16 センサデバイス及び方法

Country Status (5)

Country Link
US (1) US10363514B2 (enExample)
EP (1) EP3274071B1 (enExample)
JP (1) JP2018512563A (enExample)
CN (1) CN107532996B (enExample)
WO (1) WO2016156035A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478576B (zh) * 2016-06-07 2024-02-20 宁波方太厨具有限公司 一种油烟传感器的防护结构
US10215699B2 (en) * 2017-01-03 2019-02-26 Honeywell International Inc. Utilizing updraft flow in a fan-less dust sensor
EP3444587A1 (en) * 2017-08-14 2019-02-20 Koninklijke Philips N.V. Particle sensor and particle sensing method
US10816445B2 (en) 2017-06-21 2020-10-27 Koninklijke Philips N.V. Particle sensor and particle sensing method
GB201715014D0 (en) * 2017-09-18 2017-11-01 Cambridge Entpr Ltd Particulate matter detection
US11047777B2 (en) * 2017-11-14 2021-06-29 Aerodyne Microsystems Inc. Thermophoretic particle concentrator
DE102018219891A1 (de) * 2018-11-20 2020-05-20 Robert Bosch Gmbh Verfahren zum Betreiben eines Partikelsensors
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57131036A (en) * 1981-02-06 1982-08-13 Rion Co Ltd Light scattering type floating particle counting
JPH01305341A (ja) * 1988-04-11 1989-12-08 Westinghouse Electric Corp <We> 不透明度モニターの読みを定期的に得る方法及び装置
JPH0527654U (ja) * 1991-09-19 1993-04-09 神栄株式会社 空気汚れ検出装置
JPH0676333A (ja) * 1992-08-25 1994-03-18 Mitsubishi Electric Corp 光デイスクの対物レンズ防塵装置
JPH06120149A (ja) * 1990-05-11 1994-04-28 Applied Materials Inc 粒子監視システム及び方法
JPH06241974A (ja) * 1993-02-22 1994-09-02 Shimadzu Corp 粒度分布測定装置
JPH0755687A (ja) * 1993-07-08 1995-03-03 Applied Materials Inc 微粒子モニタセンサ
GB2319191A (en) * 1996-11-15 1998-05-20 Boris Gorbunov A particulate matter concentrator
US20060066834A1 (en) * 2004-09-28 2006-03-30 Phillips Alton H EUV reticle handling system and method
JP2008175590A (ja) * 2007-01-16 2008-07-31 Tokyo Electron Ltd パーティクルモニタシステム及び基板処理装置
US20090019918A1 (en) * 2007-03-28 2009-01-22 Robert Bosch Gmbh Procedure for operating a collecting particle sensor and device for implementing this procedure
DE102008041809A1 (de) * 2008-09-04 2010-03-11 Robert Bosch Gmbh Partikelsensor, Verfahren zu dessen Betrieb und Herstellung
JP2011256796A (ja) * 2010-06-09 2011-12-22 Toyota Motor Corp Ｐｍ量検出システム
JP2012154620A (ja) * 2004-08-11 2012-08-16 Koninkl Philips Electronics Nv 空気汚染センサシステム
JP2012220263A (ja) * 2011-04-05 2012-11-12 Shimadzu Corp 粒子径測定装置
US20130133441A1 (en) * 2011-05-24 2013-05-30 Rj Lee Group Thermophoretic sampler

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4675031A (en) * 1985-08-19 1987-06-23 Sinnar Abbas M Phoretic enhanced-gravity particulate removal system
GB8818463D0 (en) * 1988-08-03 1988-09-07 Loughborough Consult Ltd Apparatus & method for removing particulate matter from exhaust gases of i c engine
GB2339398B (en) * 1998-07-10 2002-05-01 Notetry Ltd Apparatus and method for concentrating gasborne particles in a portion of a gas stream
US20020159215A1 (en) 1999-12-06 2002-10-31 Siess Harold Edward Protecting transmissive surfaces
US8177142B2 (en) 2005-08-26 2012-05-15 Ricciardi Jonathan J Method and apparatus for an improved aerosol generator and associated uses and equipment
EP2255178A1 (en) * 2008-02-27 2010-12-01 Volvo Technology Corporation Method and arrangement for detecting particles
DE102009000820A1 (de) 2009-02-12 2010-08-19 Robert Bosch Gmbh Sensorelement eines Gassensors und Verfahren zum Betrieb desselben
US8966956B2 (en) * 2010-04-30 2015-03-03 Toyota Jidosha Kabushiki Kaisha Particulate matter amount detecting apparatus
US8806915B2 (en) * 2011-08-08 2014-08-19 University Of California Microfabricated particulate matter monitor
US20130235357A1 (en) 2012-03-12 2013-09-12 Kla-Tencor Corporation System and Method for Particle Control Near A Reticle
CN102692368A (zh) * 2012-05-23 2012-09-26 华北电力大学 一种可视化窄矩形通道气溶胶运动沉积系统
KR20130134243A (ko) 2012-05-30 2013-12-10 연세대학교 산학협력단 미세오염물질 샘플링 셀 및 이를 포함하는 광 계측장치
US9389180B2 (en) 2013-02-15 2016-07-12 Kla-Tencor Corporation Methods and apparatus for use with extreme ultraviolet light having contamination protection
CN103349879B (zh) 2013-07-04 2015-05-20 清华大学 一种热泳空气净化装置及方法
GB201715014D0 (en) * 2017-09-18 2017-11-01 Cambridge Entpr Ltd Particulate matter detection

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57131036A (en) * 1981-02-06 1982-08-13 Rion Co Ltd Light scattering type floating particle counting
JPH01305341A (ja) * 1988-04-11 1989-12-08 Westinghouse Electric Corp <We> 不透明度モニターの読みを定期的に得る方法及び装置
JPH06120149A (ja) * 1990-05-11 1994-04-28 Applied Materials Inc 粒子監視システム及び方法
JPH0527654U (ja) * 1991-09-19 1993-04-09 神栄株式会社 空気汚れ検出装置
JPH0676333A (ja) * 1992-08-25 1994-03-18 Mitsubishi Electric Corp 光デイスクの対物レンズ防塵装置
JPH06241974A (ja) * 1993-02-22 1994-09-02 Shimadzu Corp 粒度分布測定装置
JPH0755687A (ja) * 1993-07-08 1995-03-03 Applied Materials Inc 微粒子モニタセンサ
GB2319191A (en) * 1996-11-15 1998-05-20 Boris Gorbunov A particulate matter concentrator
JP2012154620A (ja) * 2004-08-11 2012-08-16 Koninkl Philips Electronics Nv 空気汚染センサシステム
US20060066834A1 (en) * 2004-09-28 2006-03-30 Phillips Alton H EUV reticle handling system and method
JP2008175590A (ja) * 2007-01-16 2008-07-31 Tokyo Electron Ltd パーティクルモニタシステム及び基板処理装置
US20090019918A1 (en) * 2007-03-28 2009-01-22 Robert Bosch Gmbh Procedure for operating a collecting particle sensor and device for implementing this procedure
DE102008041809A1 (de) * 2008-09-04 2010-03-11 Robert Bosch Gmbh Partikelsensor, Verfahren zu dessen Betrieb und Herstellung
JP2011256796A (ja) * 2010-06-09 2011-12-22 Toyota Motor Corp Ｐｍ量検出システム
JP2012220263A (ja) * 2011-04-05 2012-11-12 Shimadzu Corp 粒子径測定装置
US20130133441A1 (en) * 2011-05-24 2013-05-30 Rj Lee Group Thermophoretic sampler

Also Published As

Publication number Publication date
EP3274071B1 (en) 2023-05-24
CN107532996A (zh) 2018-01-02
US10363514B2 (en) 2019-07-30
US20180056228A1 (en) 2018-03-01
CN107532996B (zh) 2020-09-01
WO2016156035A1 (en) 2016-10-06
EP3274071A1 (en) 2018-01-31

Similar Documents

Publication Publication Date Title
JP2018512563A (ja) センサデバイス及び方法
CN110785645B (zh) 颗粒传感器和颗粒感测方法
EP2279402B1 (en) A condensation apparatus
JP2018512563A5 (enExample)
KR20190100248A (ko) 공기 입자 물질의 모니터링 시스템 및 방법
US10520413B2 (en) Particle sensor and particle sensing method having a series of sensor elements
JP2008020456A (ja) エアロゾルの測定システム及びその方法
US8272279B2 (en) Systems and methods for chemical sampling in particulate laden gaseous environments
CN106461527A (zh) 浮质传感器和感测方法
Dong et al. Integrated virtual impactor enabled PM 2.5 sensor
CN206114479U (zh) 粉尘检测装置
EP3444587A1 (en) Particle sensor and particle sensing method
CN115308089A (zh) 用于检测气溶胶中的液体内容物的设备及其使用方法
CN107036946A (zh) 一种高湿度环境下固体颗粒物浓度检测装置
CN106770447A (zh) 一种沥青混合料不同温度下导热系数的测量装置及方法
JP7127247B2 (ja) 粒子センサ、および粒子濃度を測定する方法
KR102377017B1 (ko) 미세먼지 측정 조립체 및 이를 갖는 미세먼지 측정 장치, 그리고 미세먼지 측정 장치를 갖는 미세먼지 측정 시스템
CN103502796B (zh) 具有可更换盒体和阅读器的传感器系统
CN106442249A (zh) 粉尘检测装置
Leung et al. Gold nano-particle-based thermal sensors fabricated using microspotting and DEP techniques
Sun et al. A miniature system for particulate matter (PM) measurement
Kim et al. The spatial resolution of dual-tracer fluorescence thermometry in volumetrically illuminated channels
Surib et al. Shinyei based sensor with added roof enhanced detection of indoor particulate matter
CN206627167U (zh) 传感器
Kim et al. Vapor mapping in a microscopic space with a scanning nanoprobe interferometer

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190110

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190110

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20190308

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191001

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20191001

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190930

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20191010

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20191018

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191219

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200303

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20201006