|
US3562009A
(en)
*
|
1967-02-14 |
1971-02-09 |
Western Electric Co |
Method of providing electrically conductive substrate through-holes
|
|
US4022928A
(en)
*
|
1975-05-22 |
1977-05-10 |
Piwcyzk Bernhard P |
Vacuum deposition methods and masking structure
|
|
US4548798A
(en)
*
|
1984-04-16 |
1985-10-22 |
Exxon Research And Engineering Co. |
Laser synthesis of refractory oxide powders
|
|
US5395180A
(en)
*
|
1993-12-14 |
1995-03-07 |
Advanced Ceramics Corporation |
Boron nitride vaporization vessel
|
|
US5472749A
(en)
|
1994-10-27 |
1995-12-05 |
Northwestern University |
Graphite encapsulated nanophase particles produced by a tungsten arc method
|
|
US5776254A
(en)
*
|
1994-12-28 |
1998-07-07 |
Mitsubishi Denki Kabushiki Kaisha |
Apparatus for forming thin film by chemical vapor deposition
|
|
JPH09184080A
(ja)
*
|
1995-12-27 |
1997-07-15 |
Vacuum Metallurgical Co Ltd |
超微粒子による薄膜形成方法、およびその薄膜形成装置
|
|
US5958348A
(en)
*
|
1997-02-28 |
1999-09-28 |
Nanogram Corporation |
Efficient production of particles by chemical reaction
|
|
US6054041A
(en)
|
1998-05-06 |
2000-04-25 |
Exxon Research And Engineering Co. |
Three stage cocurrent liquid and vapor hydroprocessing
|
|
KR100649852B1
(ko)
*
|
1999-09-09 |
2006-11-24 |
동경 엘렉트론 주식회사 |
기화기 및 이것을 이용한 반도체 제조 시스템
|
|
FR2800754B1
(fr)
*
|
1999-11-08 |
2003-05-09 |
Joint Industrial Processors For Electronics |
Dispositif evaporateur d'une installation de depot chimique en phase vapeur
|
|
JP4310880B2
(ja)
*
|
2000-02-18 |
2009-08-12 |
株式会社デンソー |
炭化珪素単結晶の製造方法及び製造装置
|
|
US7301199B2
(en)
|
2000-08-22 |
2007-11-27 |
President And Fellows Of Harvard College |
Nanoscale wires and related devices
|
|
DE10048759A1
(de)
|
2000-09-29 |
2002-04-11 |
Aixtron Gmbh |
Verfahren und Vorrichtung zum Abscheiden insbesondere organischer Schichten im Wege der OVPD
|
|
US7335908B2
(en)
|
2002-07-08 |
2008-02-26 |
Qunano Ab |
Nanostructures and methods for manufacturing the same
|
|
US7534488B2
(en)
|
2003-09-10 |
2009-05-19 |
The Regents Of The University Of California |
Graded core/shell semiconductor nanorods and nanorod barcodes
|
|
EP1638676A2
(en)
*
|
2002-12-17 |
2006-03-29 |
E.I. du Pont de Nemours and Company |
Method of producing nanoparticles using a evaporation-condensation process with a reaction chamber plasma reactor system
|
|
US7115230B2
(en)
|
2003-06-26 |
2006-10-03 |
Intel Corporation |
Hydrodynamic focusing devices
|
|
US20100244262A1
(en)
*
|
2003-06-30 |
2010-09-30 |
Fujitsu Limited |
Deposition method and a deposition apparatus of fine particles, a forming method and a forming apparatus of carbon nanotubes, and a semiconductor device and a manufacturing method of the same
|
|
JP3810394B2
(ja)
*
|
2003-07-25 |
2006-08-16 |
日機装株式会社 |
内部加熱体装備反応管装置
|
|
US7052546B1
(en)
*
|
2003-08-28 |
2006-05-30 |
Cape Simulations, Inc. |
High-purity crystal growth
|
|
EP1709213A4
(en)
|
2004-01-15 |
2012-09-05 |
Nanocomp Technologies Inc |
SYSTEMS AND METHODS FOR SYNTHESIZING LONG LENGTH NANOSTRUCTURES
|
|
FI121334B
(fi)
|
2004-03-09 |
2010-10-15 |
Canatu Oy |
Menetelmä ja laitteisto hiilinanoputkien valmistamiseksi
|
|
WO2006033367A1
(ja)
*
|
2004-09-24 |
2006-03-30 |
Japan Science And Technology Agency |
カーボンナノ構造物の製造方法及び製造装置
|
|
US7638002B2
(en)
*
|
2004-11-29 |
2009-12-29 |
Tokyo Electron Limited |
Multi-tray film precursor evaporation system and thin film deposition system incorporating same
|
|
US20060233968A1
(en)
*
|
2005-04-19 |
2006-10-19 |
Tihiro Ohkawa |
System and method for vaporizing a metal
|
|
US7901654B2
(en)
*
|
2005-05-05 |
2011-03-08 |
Honda Motor Co., Ltd. |
Synthesis of small diameter single-walled carbon nanotubes
|
|
JP4682202B2
(ja)
|
2005-07-15 |
2011-05-11 |
パナソニック株式会社 |
高圧放電ランプの点灯方法、点灯装置、光源装置及び投射型画像表示装置
|
|
JP4689404B2
(ja)
|
2005-08-15 |
2011-05-25 |
キヤノン株式会社 |
基板処理装置及びこれを用いた基板の処理方法、電子源基板の処理装置及びこれを用いた電子源基板の処理方法
|
|
JP5273495B2
(ja)
*
|
2005-12-13 |
2013-08-28 |
独立行政法人産業技術総合研究所 |
クラスター成膜装置及び成膜方法、並びにクラスター生成装置及び生成方法
|
|
EP2001796A2
(en)
|
2006-03-03 |
2008-12-17 |
Battelle Memorial Institute |
Method and apparatus for high mass concentration nano particle generation
|
|
US20070218200A1
(en)
*
|
2006-03-16 |
2007-09-20 |
Kenji Suzuki |
Method and apparatus for reducing particle formation in a vapor distribution system
|
|
GB2436398B
(en)
*
|
2006-03-23 |
2011-08-24 |
Univ Bath |
Growth method using nanostructure compliant layers and HVPE for producing high quality compound semiconductor materials
|
|
US8268281B2
(en)
|
2006-05-12 |
2012-09-18 |
Honda Motor Co., Ltd. |
Dry powder injector for industrial production of carbon single walled nanotubes (SWNTs)
|
|
US7967891B2
(en)
|
2006-06-01 |
2011-06-28 |
Inco Limited |
Method producing metal nanopowders by decompositon of metal carbonyl using an induction plasma torch
|
|
US20080000497A1
(en)
*
|
2006-06-30 |
2008-01-03 |
Applied Materials, Inc. |
Removal of organic-containing layers from large surface areas
|
|
EP2083944A4
(en)
*
|
2006-10-24 |
2013-07-24 |
Beneq Oy |
DEVICE FOR PRODUCING NANOPARTICLES
|
|
KR100856873B1
(ko)
|
2007-01-05 |
2008-09-04 |
연세대학교 산학협력단 |
무전해도금용 촉매활성 방법
|
|
KR100860590B1
(ko)
|
2007-01-15 |
2008-09-26 |
연세대학교 산학협력단 |
금속 에어로졸 나노입자를 생성하여 고정하는 방법
|
|
US8246933B2
(en)
|
2007-11-30 |
2012-08-21 |
Stc.Unm |
Aerosol method for nano silver-silica composite anti-microbial agent
|
|
GB0808385D0
(en)
*
|
2008-05-08 |
2008-06-18 |
Naneum Ltd |
A condensation apparatus
|
|
TWI376269B
(en)
|
2009-06-30 |
2012-11-11 |
Yao Chuan Lee |
Nano-aerosol generator with controllable size
|
|
KR101914651B1
(ko)
|
2009-12-22 |
2018-11-05 |
큐나노에이비 |
나노와이어 구조체를 제조하는 방법
|
|
WO2011137446A2
(en)
|
2010-04-30 |
2011-11-03 |
University Of Southern California |
Fabrication of silicon nanowires
|
|
CN107090593A
(zh)
*
|
2010-05-11 |
2017-08-25 |
昆南诺股份有限公司 |
线的气相合成
|
|
WO2013114218A2
(en)
*
|
2012-02-03 |
2013-08-08 |
Qunano Ab |
High-throughput continuous gas-phase synthesis of nanowires with tunable properties
|
|
EP2837035A2
(en)
|
2012-04-12 |
2015-02-18 |
Sol Voltaics AB |
Methods of nanowire functionalization, dispersion and attachment
|
|
CN104508190B
(zh)
|
2012-05-25 |
2017-12-15 |
索尔伏打电流公司 |
同心流反应器
|
|
EP2855003A1
(en)
*
|
2012-06-05 |
2015-04-08 |
Dow Corning Corporation |
Fluid capture of nanoparticles
|
|
US8940562B1
(en)
*
|
2014-06-02 |
2015-01-27 |
Atom Nanoelectronics, Inc |
Fully-printed carbon nanotube thin film transistor backplanes for active matrix organic light emitting devices and liquid crystal displays
|