JP2018182196A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2018182196A JP2018182196A JP2017083043A JP2017083043A JP2018182196A JP 2018182196 A JP2018182196 A JP 2018182196A JP 2017083043 A JP2017083043 A JP 2017083043A JP 2017083043 A JP2017083043 A JP 2017083043A JP 2018182196 A JP2018182196 A JP 2018182196A
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- bonding pad
- convex portion
- bonding
- semiconductor device
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 53
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 35
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 230000002093 peripheral effect Effects 0.000 claims abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 17
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000007689 inspection Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/07—Structure, shape, material or disposition of the bonding areas after the connecting process
- H01L24/09—Structure, shape, material or disposition of the bonding areas after the connecting process of a plurality of bonding areas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02163—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
- H01L2224/02175—Flow barrier
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
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- H—ELECTRICITY
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
- H01L2224/488—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48817—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
- H01L2224/48824—Aluminium (Al) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49175—Parallel arrangements
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
12:半導体基板
14:主電極
15:リード線
16:第1ボンディングパッド
16a、16b、16c、16d:辺
17:第2ボンディングパッド
17a、17b、17c、17d:辺
20:銅ワイヤ
24:絶縁膜
36:第1凸部
37:第2凸部
Claims (7)
- 半導体装置であって、
半導体基板と、
前記半導体基板の上面に設けられており、アルミニウムを含有する金属によって構成されている第1ボンディングパッドと、
前記半導体基板の前記上面に設けられている第2ボンディングパッドと、
前記第1ボンディングパッドの上面から突出する第1凸部、
を有し、
前記第1凸部が、前記第1ボンディングパッドの前記上面のうちの、前記第1ボンディングパッドの前記第2ボンディングパッドに対向する外周縁に隣接する位置のみに設けられている、半導体装置。 - 前記第1凸部の高さは、前記第1ボンディングパッドの厚みの1/2以上である、請求項1に記載の半導体装置。
- 前記第1凸部は、前記第1ボンディングパッドよりも高いビッカース硬度を有する金属により構成されている、請求項1または2に記載の半導体装置。
- 前記第2ボンディングパッドの上面から突出する第2凸部、をさらに有し、
前記第2ボンディングパッドが、アルミニウムを含有する金属によって構成されており、
前記第2凸部が、前記第2ボンディングパッドの前記上面のうちの、前記第2ボンディングパッドの前記第1ボンディングパッドに対向する外周縁に隣接する位置のみに設けられている、請求項1〜3のいずれかに記載の半導体装置。 - 前記第2凸部の高さは、前記第2ボンディングパッドの厚みの1/2以上である、請求項4に記載の半導体装置。
- 前記第2凸部は、前記第2ボンディングパッドよりも高いビッカース硬度を有する金属により構成されている、請求項4または5に記載の半導体装置。
- 前記第1ボンディングパッドに接続されており、銅を含有する金属によって構成されている第1ワイヤと、
前記第2ボンディングパッドに接続されており、銅を含有する金属によって構成されている第2ワイヤ、
をさらに有する、請求項1〜6のいずれか一項の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017083043A JP6891612B2 (ja) | 2017-04-19 | 2017-04-19 | 半導体装置 |
US15/947,933 US10332852B2 (en) | 2017-04-19 | 2018-04-09 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2017083043A JP6891612B2 (ja) | 2017-04-19 | 2017-04-19 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2018182196A true JP2018182196A (ja) | 2018-11-15 |
JP6891612B2 JP6891612B2 (ja) | 2021-06-18 |
Family
ID=63854123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017083043A Active JP6891612B2 (ja) | 2017-04-19 | 2017-04-19 | 半導体装置 |
Country Status (2)
Country | Link |
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US (1) | US10332852B2 (ja) |
JP (1) | JP6891612B2 (ja) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008205238A (ja) * | 2007-02-21 | 2008-09-04 | Fujitsu Ltd | 半導体装置、半導体ウエハ構造、及び半導体装置の製造方法 |
JP2009038137A (ja) * | 2007-07-31 | 2009-02-19 | Panasonic Corp | 半導体装置およびその製造方法 |
JP2009176833A (ja) * | 2008-01-22 | 2009-08-06 | Panasonic Corp | 半導体装置とその製造方法 |
JP2012009758A (ja) * | 2010-06-28 | 2012-01-12 | Shindengen Electric Mfg Co Ltd | 半導体素子 |
JP2012109419A (ja) * | 2010-11-18 | 2012-06-07 | Panasonic Corp | 半導体装置 |
JP2012195328A (ja) * | 2011-03-15 | 2012-10-11 | Panasonic Corp | 半導体装置およびその製造方法 |
JP2013187373A (ja) * | 2012-03-08 | 2013-09-19 | Renesas Electronics Corp | 半導体装置 |
US8916463B2 (en) * | 2012-09-06 | 2014-12-23 | International Business Machines Corporation | Wire bond splash containment |
US9111755B1 (en) * | 2014-04-25 | 2015-08-18 | Freescale Semiconductor, Inc. | Bond pad and passivation layer having a gap and method for forming |
JP2015149446A (ja) * | 2014-02-07 | 2015-08-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012129376A (ja) | 2010-12-16 | 2012-07-05 | Renesas Electronics Corp | 半導体装置 |
JP6252378B2 (ja) | 2014-06-27 | 2017-12-27 | マツダ株式会社 | エンジンの動弁制御装置 |
-
2017
- 2017-04-19 JP JP2017083043A patent/JP6891612B2/ja active Active
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2018
- 2018-04-09 US US15/947,933 patent/US10332852B2/en not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008205238A (ja) * | 2007-02-21 | 2008-09-04 | Fujitsu Ltd | 半導体装置、半導体ウエハ構造、及び半導体装置の製造方法 |
JP2009038137A (ja) * | 2007-07-31 | 2009-02-19 | Panasonic Corp | 半導体装置およびその製造方法 |
JP2009176833A (ja) * | 2008-01-22 | 2009-08-06 | Panasonic Corp | 半導体装置とその製造方法 |
JP2012009758A (ja) * | 2010-06-28 | 2012-01-12 | Shindengen Electric Mfg Co Ltd | 半導体素子 |
JP2012109419A (ja) * | 2010-11-18 | 2012-06-07 | Panasonic Corp | 半導体装置 |
JP2012195328A (ja) * | 2011-03-15 | 2012-10-11 | Panasonic Corp | 半導体装置およびその製造方法 |
JP2013187373A (ja) * | 2012-03-08 | 2013-09-19 | Renesas Electronics Corp | 半導体装置 |
US8916463B2 (en) * | 2012-09-06 | 2014-12-23 | International Business Machines Corporation | Wire bond splash containment |
JP2015149446A (ja) * | 2014-02-07 | 2015-08-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US9111755B1 (en) * | 2014-04-25 | 2015-08-18 | Freescale Semiconductor, Inc. | Bond pad and passivation layer having a gap and method for forming |
Also Published As
Publication number | Publication date |
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JP6891612B2 (ja) | 2021-06-18 |
US10332852B2 (en) | 2019-06-25 |
US20180308814A1 (en) | 2018-10-25 |
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