JP2018182194A - 圧電アクチュエータ - Google Patents
圧電アクチュエータ Download PDFInfo
- Publication number
- JP2018182194A JP2018182194A JP2017083030A JP2017083030A JP2018182194A JP 2018182194 A JP2018182194 A JP 2018182194A JP 2017083030 A JP2017083030 A JP 2017083030A JP 2017083030 A JP2017083030 A JP 2017083030A JP 2018182194 A JP2018182194 A JP 2018182194A
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- Prior art keywords
- electrode
- internal
- disposed
- internal electrodes
- piezoelectric
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- 238000010030 laminating Methods 0.000 claims description 4
- 230000005012 migration Effects 0.000 abstract description 8
- 238000013508 migration Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 3
- 238000003475 lamination Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000000452 restraining effect Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims (4)
- 印加される電圧によって縦振動モードと屈曲振動モードとが合成された振動モードを発生させる圧電アクチュエータであって、
矩形状を呈する複数の圧電体層を積層することによって形成されると共に、複数の前記圧電体層の積層方向において対向する一対の主面を有する素体と、
前記素体内に配置された複数の内部電極と、
前記素体の外表面に配置され、対応する前記内部電極と電気的に接続された複数の外部電極と、を備え、
複数の前記内部電極は、同一の前記圧電体層上に配置された4つの第1内部電極と、4つの前記第1内部電極と前記圧電体層を挟んで対向して配置され、前記第1内部電極との間に電圧が印加される第2内部電極と、を有し、
4つの前記第1内部電は、前記素体内において、一対の前記主面に最も近い位置に配置されており、
前記素体の前記主面と前記第1内部電極との間の領域が不活性領域であり、前記第1内部電極と前記第2内部電極との間の領域が活性領域であり、
前記積層方向における前記不活性領域の厚みは、前記活性領域の厚みよりも小さい、圧電アクチュエータ。 - 前記不活性領域の厚みは、前記活性領域の厚みの1/2以下である、請求項1に記載の圧電アクチュエータ。
- 前記不活性領域の厚みは、前記活性領域の厚みの1/5以上1/2以下である、請求項2に記載の圧電アクチュエータ。
- 4つの前記第1内部電極のうち、2つの前記第1内部電極が第1の対角に位置し、他の2つの前記第1内部電極が前記第1の対角に交差する第2の対角に位置しており、
前記第1の対角又は前記第2の対角に位置する2つの前記第1内部電極が接続部材によって電気的に接続されている、請求項1〜3のいずれか一項に記載の圧電アクチュエータ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017083030A JP6880975B2 (ja) | 2017-04-19 | 2017-04-19 | 圧電アクチュエータ |
PCT/JP2018/014562 WO2018193863A1 (ja) | 2017-04-19 | 2018-04-05 | 圧電アクチュエータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017083030A JP6880975B2 (ja) | 2017-04-19 | 2017-04-19 | 圧電アクチュエータ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020216318A Division JP7092182B2 (ja) | 2020-12-25 | 2020-12-25 | 圧電アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018182194A true JP2018182194A (ja) | 2018-11-15 |
JP6880975B2 JP6880975B2 (ja) | 2021-06-02 |
Family
ID=63856592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017083030A Active JP6880975B2 (ja) | 2017-04-19 | 2017-04-19 | 圧電アクチュエータ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6880975B2 (ja) |
WO (1) | WO2018193863A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020152905A1 (ja) * | 2019-01-21 | 2020-07-30 | 株式会社フコク | 積層型圧電素子及び圧電アクチュエーター |
JP2022101999A (ja) * | 2020-12-25 | 2022-07-07 | Tdk株式会社 | 圧電素子 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007091443A1 (ja) * | 2006-02-07 | 2007-08-16 | Matsushita Electric Industrial Co., Ltd. | 圧電素子及び超音波アクチュエータ |
JP2008061344A (ja) * | 2006-08-30 | 2008-03-13 | Taiheiyo Cement Corp | 超音波モータ素子 |
DE102013110356A1 (de) * | 2013-09-19 | 2015-04-02 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallaktor |
JP2016036010A (ja) * | 2014-08-04 | 2016-03-17 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 圧電素子及びこれを含む圧電振動モジュール |
JP2016051894A (ja) * | 2014-09-01 | 2016-04-11 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 圧電素子及びこれを含む圧電振動モジュール |
-
2017
- 2017-04-19 JP JP2017083030A patent/JP6880975B2/ja active Active
-
2018
- 2018-04-05 WO PCT/JP2018/014562 patent/WO2018193863A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007091443A1 (ja) * | 2006-02-07 | 2007-08-16 | Matsushita Electric Industrial Co., Ltd. | 圧電素子及び超音波アクチュエータ |
JP2008061344A (ja) * | 2006-08-30 | 2008-03-13 | Taiheiyo Cement Corp | 超音波モータ素子 |
DE102013110356A1 (de) * | 2013-09-19 | 2015-04-02 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallaktor |
JP2016036010A (ja) * | 2014-08-04 | 2016-03-17 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 圧電素子及びこれを含む圧電振動モジュール |
JP2016051894A (ja) * | 2014-09-01 | 2016-04-11 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 圧電素子及びこれを含む圧電振動モジュール |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020152905A1 (ja) * | 2019-01-21 | 2020-07-30 | 株式会社フコク | 積層型圧電素子及び圧電アクチュエーター |
JP2022101999A (ja) * | 2020-12-25 | 2022-07-07 | Tdk株式会社 | 圧電素子 |
JP7420063B2 (ja) | 2020-12-25 | 2024-01-23 | Tdk株式会社 | 圧電素子 |
Also Published As
Publication number | Publication date |
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WO2018193863A1 (ja) | 2018-10-25 |
JP6880975B2 (ja) | 2021-06-02 |
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