JP2018181887A - 半導体光素子を作製する方法、面発光レーザ - Google Patents
半導体光素子を作製する方法、面発光レーザ Download PDFInfo
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- H01S5/3432—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs the whole junction comprising only (AI)GaAs
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Abstract
Description
第1半導体積層15:GaAs/AlGaAs超格子。
第1半導体層15a:GaAs。
第2半導体層15b:AlGaAs。
半導体領域17。
量子井戸構造MQW:AlGaAs/GaAs。
第2半導体積層19:GaAs/AlGaAs超格子。
第3半導体層19a:GaAs。
第4半導体層19b:AlGaAs。
上部コンタクト層24:GaAs。
エッチャント:BCl3及び/又はCl2の混合ガス。
プロセスガスの流量比:BCl3/Cl2/Ar=30/40/30sccm。
塩素(Cl2)の流量は三塩化ボロン(BCl3)より多い。
エッチングレート:5〜6マイクロメートル/分。
深溝の終点検出:エッチング時間で調整する。
パワー条件。
第1高周波電源56からのBIASパワー:50〜500W。
第2高周波電源57からのICPパワー:1000W以上。
基板温度:望ましくは、摂氏25度以下。
このエッチング条件により、ストリート領域に深さ200マイクロメートル程度の掘り込みを形成する。
薄マスク76を用いるエッチングのエッチング条件。
パワー(ICP/BIAS):50ワット以上1000ワット未満/50ワット以上500ワット以下。
流量比:BCl3/Cl2/Ar=20/10/70sccm。
塩化ボロンの流量は、塩素の流量より多い。
プロセス圧力:1Pa。
厚マスク75を用いるエッチングのエッチング条件。
パワー(ICP/BIAS):1000W以上/50〜500W。
流量比:BCl3/Cl2/Ar=30/40/30sccm。
塩素の流量は、塩化ボロンの流量より多い。
プロセス圧力:5Pa。
メサ構造MSの側面の表面粗さRaは例えば100ナノメートル以下であることができる。
例えば、ラバーコレットの使用におけるばらつき。
角度ズレ:−10度〜+20度。
XY位置ずれ:−100マイクロメートル〜+100マイクロメートル。
超硬タイプコレットの使用におけるばらつき。
角度ズレ:プラスマイナス5度。
XY位置ずれ:−50マイクロメートル〜+50マイクロメートル。
Claims (9)
- 半導体光素子を作製する方法であって、
アレイ状の素子区画と前記素子区画間に延在するストリート領域とを含む第1側と、前記第1側の反対側の第2側とを有する基板生産物上に、前記素子区画をそれぞれ覆うデバイス被覆部分と、前記ストリート領域に設けられ前記デバイス被覆部分を規定する第1開口とを有するマスクを形成する工程と、
前記マスクを用いて前記基板生産物をエッチングして、前記素子区画を規定する単連結の溝を前記ストリート領域に形成する工程と、
前記基板生産物のエッチングを行った後に、前記マスクを除去する工程と、
前記マスクを除去した後に、前記基板生産物の前記第1側を第1支持体に固定する工程と、
前記第1支持体に固定した後に、前記第1側の前記溝に到達するように前記基板生産物を薄くすることによって前記素子区画を互いに分離して、前記第1支持体上に半導体片の配列を形成する工程と、
を備え、
前記素子区画の各々は、前記半導体光素子のための半導体構造物及び電極を有する、半導体光素子を作製する方法。 - 前記半導体光素子は、垂直共振器面発光レーザを含む、請求項1に記載された半導体光素子を作製する方法。
- 前記半導体片の配列を前記第1支持体から第2支持体に移す工程を更に備える、請求項1又は請求項2に記載された半導体光素子を作製する方法。
- 前記第2支持体上の前記半導体片の配列のうちの半導体片を前記第2支持体から離す工程を更に備える、請求項3に記載された半導体光素子を作製する方法。
- 前記マスクは、厚さ100マイクロメートル以上のレジストを含む、請求項1〜請求項4のいずれか一項に記載された半導体光素子を作製する方法。
- 前記マスクは、ドライフィルムレジストを含む、請求項1〜請求項5のいずれか一項に記載された半導体光素子を作製する方法。
- 前記マスクより薄い別マスクを前記基板生産物上に形成する工程と、
前記別マスクを用いて前記基板生産物のエッチングを行って、傾斜側面を有するメサ構造を形成する工程と、
を更に備え、
前記傾斜側面は、前記素子区画と前記ストリート領域との境界から延在し、
前記電極は、前記メサ構造上に設けられる、請求項1〜請求項6のいずれか一項に記載された半導体光素子を作製する方法。 - 面発光レーザであって、
第1側と、前記第1側の反対側の第2側と、前記第2側から前記第1側に延在する半導体側面とを含む半導体構造物と、
前記半導体構造物の前記第1側に設けられた第1電極と、
前記半導体構造物の前記第1側に設けられた第2電極と、
を備え、
前記半導体構造物は、第1分布ブラッグ反射器のための第1半導体積層、活性層、第2分布ブラッグ反射器のための第2半導体積層、及び半導体基板を備え、
前記半導体側面は、前記第2側から前記第1側に到達し、前記半導体側面の上辺はチッピングを有しない、面発光レーザ。 - 前記半導体側面は、当該面発光レーザの外観に現れており、
前記半導体側面は、前記第2側から前記第1側への第1方向に前記半導体基板の裏面から延在する第1面と、前記第1面及び前記第1方向に対して傾斜した第2方向に延在する第2面とを含む、請求項8に記載された面発光レーザ。
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Citations (11)
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