JP2018178846A - 真空ポンプ装置の運転制御装置、及び運転制御方法 - Google Patents

真空ポンプ装置の運転制御装置、及び運転制御方法 Download PDF

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Publication number
JP2018178846A
JP2018178846A JP2017078915A JP2017078915A JP2018178846A JP 2018178846 A JP2018178846 A JP 2018178846A JP 2017078915 A JP2017078915 A JP 2017078915A JP 2017078915 A JP2017078915 A JP 2017078915A JP 2018178846 A JP2018178846 A JP 2018178846A
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JP
Japan
Prior art keywords
pump
booster pump
main pump
main
booster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017078915A
Other languages
English (en)
Japanese (ja)
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JP2018178846A5 (enExample
Inventor
介元 林
Jie-Yuan Lin
介元 林
弘一 岩崎
Koichi Iwasaki
弘一 岩崎
透 大須賀
Toru Osuga
透 大須賀
勇次 石井
Yuji Ishii
勇次 石井
浩康 河嶌
Hiroyasu Kawashima
浩康 河嶌
聖二 島田
Seiji Shimada
聖二 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2017078915A priority Critical patent/JP2018178846A/ja
Priority to TW107112242A priority patent/TWI775832B/zh
Priority to KR1020180042234A priority patent/KR102564312B1/ko
Priority to EP18166827.8A priority patent/EP3388676B1/en
Priority to CN201810321818.1A priority patent/CN108691769B/zh
Publication of JP2018178846A publication Critical patent/JP2018178846A/ja
Publication of JP2018178846A5 publication Critical patent/JP2018178846A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2017078915A 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法 Pending JP2018178846A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2017078915A JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法
TW107112242A TWI775832B (zh) 2017-04-12 2018-04-10 真空幫浦裝置的運轉控制裝置、及運轉控制方法
KR1020180042234A KR102564312B1 (ko) 2017-04-12 2018-04-11 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법
EP18166827.8A EP3388676B1 (en) 2017-04-12 2018-04-11 Operation control device and operation control method for vacuum pump assembly
CN201810321818.1A CN108691769B (zh) 2017-04-12 2018-04-11 真空泵装置及用于真空泵装置的运转控制方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017078915A JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法

Publications (2)

Publication Number Publication Date
JP2018178846A true JP2018178846A (ja) 2018-11-15
JP2018178846A5 JP2018178846A5 (enExample) 2020-05-21

Family

ID=62528208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017078915A Pending JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法

Country Status (5)

Country Link
EP (1) EP3388676B1 (enExample)
JP (1) JP2018178846A (enExample)
KR (1) KR102564312B1 (enExample)
CN (1) CN108691769B (enExample)
TW (1) TWI775832B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12305650B2 (en) 2020-07-24 2025-05-20 Eaton Intelligent Power Limited Control system for a fluid management system
CN114812964B (zh) * 2021-09-30 2025-02-18 国家电网有限公司 一种内置式传感器密封性检测装置及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP2008175145A (ja) * 2007-01-18 2008-07-31 Ebara Corp 真空ポンプユニット
JP2008529472A (ja) * 2005-02-02 2008-07-31 エドワーズ リミテッド ポンプシステムの作動方法
JP2014043800A (ja) * 2012-08-27 2014-03-13 Ebara Corp ポンプ制御装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2383335A1 (fr) * 1977-03-08 1978-10-06 Leybold Heraeus Sogev Pompe mecanique a joint d'huile
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
JP4218756B2 (ja) 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
GB0424734D0 (en) * 2004-11-09 2004-12-08 Boc Group Plc Vacuum pumping system
CN101111680B (zh) * 2005-04-08 2010-12-01 株式会社荏原制作所 真空泵自诊断方法、真空泵自诊断系统以及真空泵中央监控系统
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
JP6050081B2 (ja) * 2012-10-05 2016-12-21 株式会社荏原製作所 ドライ真空ポンプ装置
DK3123030T3 (da) * 2014-03-24 2019-10-14 Ateliers Busch S A Fremgangsmåde til pumpning i et system af vakuumpumper samt system af vakuumpumper
CN104989621A (zh) * 2015-07-15 2015-10-21 陆铭 智能真空排气台
CN106014999B (zh) * 2016-06-09 2017-08-04 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP2008529472A (ja) * 2005-02-02 2008-07-31 エドワーズ リミテッド ポンプシステムの作動方法
JP2008175145A (ja) * 2007-01-18 2008-07-31 Ebara Corp 真空ポンプユニット
JP2014043800A (ja) * 2012-08-27 2014-03-13 Ebara Corp ポンプ制御装置

Also Published As

Publication number Publication date
TW201842272A (zh) 2018-12-01
CN108691769B (zh) 2021-11-02
TWI775832B (zh) 2022-09-01
KR20180115229A (ko) 2018-10-22
EP3388676A1 (en) 2018-10-17
EP3388676B1 (en) 2020-11-04
KR102564312B1 (ko) 2023-08-07
CN108691769A (zh) 2018-10-23

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