GB0424734D0 - Vacuum pumping system - Google Patents

Vacuum pumping system

Info

Publication number
GB0424734D0
GB0424734D0 GB0424734A GB0424734A GB0424734D0 GB 0424734 D0 GB0424734 D0 GB 0424734D0 GB 0424734 A GB0424734 A GB 0424734A GB 0424734 A GB0424734 A GB 0424734A GB 0424734 D0 GB0424734 D0 GB 0424734D0
Authority
GB
United Kingdom
Prior art keywords
pumps
pump
control system
speed
pumping system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0424734A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0424734A priority Critical patent/GB0424734D0/en
Publication of GB0424734D0 publication Critical patent/GB0424734D0/en
Priority to PCT/GB2005/004128 priority patent/WO2006051260A1/en
Priority to TW094138682A priority patent/TW200630544A/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A system for evacuating an enclosure comprises a plurality of vacuum pumps connected in parallel such that fluid is conveyed from an outlet of an enclosure to a respective inlet of each pump, and from the outlets of the pumps to a common exhaust. A respective variable speed motor drives each pump. A control system is provided for controlling the speeds of rotation of the pumps. In one embodiment, the control system sets a target speed for the pumps as a function of the speed of the slowest pump, and in another embodiment the control system sets the target speed as a function of the average speed of the pumps.
GB0424734A 2004-11-09 2004-11-09 Vacuum pumping system Ceased GB0424734D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0424734A GB0424734D0 (en) 2004-11-09 2004-11-09 Vacuum pumping system
PCT/GB2005/004128 WO2006051260A1 (en) 2004-11-09 2005-10-25 Vacuum pumping system
TW094138682A TW200630544A (en) 2004-11-09 2005-11-04 Vacuum pumping system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0424734A GB0424734D0 (en) 2004-11-09 2004-11-09 Vacuum pumping system

Publications (1)

Publication Number Publication Date
GB0424734D0 true GB0424734D0 (en) 2004-12-08

Family

ID=33523420

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0424734A Ceased GB0424734D0 (en) 2004-11-09 2004-11-09 Vacuum pumping system

Country Status (3)

Country Link
GB (1) GB0424734D0 (en)
TW (1) TW200630544A (en)
WO (1) WO2006051260A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2360405C2 (en) 2004-07-13 2009-07-10 Делавал Холдинг Аб Regulated vacuum source
SE531046C2 (en) * 2007-04-03 2008-12-02 Delaval Holding Ab A method in a milking system to create the required vacuum level and computer program products
JP2018178846A (en) * 2017-04-12 2018-11-15 株式会社荏原製作所 Device and method for controlling operation of vacuum pump device
FR3067069B1 (en) * 2017-06-06 2019-08-02 Pfeiffer Vacuum METHOD FOR MONITORING AN OPERATING STATE OF A PUMPING DEVICE
CN107942918B (en) * 2017-12-22 2023-04-18 大连华锐重工集团股份有限公司 Self-adaptive dry type vacuum mechanical pump electric control system and control method
BE1028087B1 (en) * 2020-02-24 2021-09-21 Atlas Copco Airpower Nv Method for controlling a vacuum system and vacuum system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6302654B1 (en) * 2000-02-29 2001-10-16 Copeland Corporation Compressor with control and protection system
US20030175112A1 (en) * 2002-03-13 2003-09-18 Hirotaka Namiki Vacuum pump system and vacuum pump RPM control method

Also Published As

Publication number Publication date
TW200630544A (en) 2006-09-01
WO2006051260A1 (en) 2006-05-18

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)