GB0424734D0 - Vacuum pumping system - Google Patents
Vacuum pumping systemInfo
- Publication number
- GB0424734D0 GB0424734D0 GB0424734A GB0424734A GB0424734D0 GB 0424734 D0 GB0424734 D0 GB 0424734D0 GB 0424734 A GB0424734 A GB 0424734A GB 0424734 A GB0424734 A GB 0424734A GB 0424734 D0 GB0424734 D0 GB 0424734D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- pumps
- pump
- control system
- speed
- pumping system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005086 pumping Methods 0.000 title 1
- 239000012530 fluid Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0261—Surge control by varying driving speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/86—Detection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A system for evacuating an enclosure comprises a plurality of vacuum pumps connected in parallel such that fluid is conveyed from an outlet of an enclosure to a respective inlet of each pump, and from the outlets of the pumps to a common exhaust. A respective variable speed motor drives each pump. A control system is provided for controlling the speeds of rotation of the pumps. In one embodiment, the control system sets a target speed for the pumps as a function of the speed of the slowest pump, and in another embodiment the control system sets the target speed as a function of the average speed of the pumps.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0424734A GB0424734D0 (en) | 2004-11-09 | 2004-11-09 | Vacuum pumping system |
PCT/GB2005/004128 WO2006051260A1 (en) | 2004-11-09 | 2005-10-25 | Vacuum pumping system |
TW094138682A TW200630544A (en) | 2004-11-09 | 2005-11-04 | Vacuum pumping system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0424734A GB0424734D0 (en) | 2004-11-09 | 2004-11-09 | Vacuum pumping system |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0424734D0 true GB0424734D0 (en) | 2004-12-08 |
Family
ID=33523420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0424734A Ceased GB0424734D0 (en) | 2004-11-09 | 2004-11-09 | Vacuum pumping system |
Country Status (3)
Country | Link |
---|---|
GB (1) | GB0424734D0 (en) |
TW (1) | TW200630544A (en) |
WO (1) | WO2006051260A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2360405C2 (en) | 2004-07-13 | 2009-07-10 | Делавал Холдинг Аб | Regulated vacuum source |
SE531046C2 (en) * | 2007-04-03 | 2008-12-02 | Delaval Holding Ab | A method in a milking system to create the required vacuum level and computer program products |
JP2018178846A (en) * | 2017-04-12 | 2018-11-15 | 株式会社荏原製作所 | Device and method for controlling operation of vacuum pump device |
FR3067069B1 (en) * | 2017-06-06 | 2019-08-02 | Pfeiffer Vacuum | METHOD FOR MONITORING AN OPERATING STATE OF A PUMPING DEVICE |
CN107942918B (en) * | 2017-12-22 | 2023-04-18 | 大连华锐重工集团股份有限公司 | Self-adaptive dry type vacuum mechanical pump electric control system and control method |
BE1028087B1 (en) * | 2020-02-24 | 2021-09-21 | Atlas Copco Airpower Nv | Method for controlling a vacuum system and vacuum system |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6302654B1 (en) * | 2000-02-29 | 2001-10-16 | Copeland Corporation | Compressor with control and protection system |
US20030175112A1 (en) * | 2002-03-13 | 2003-09-18 | Hirotaka Namiki | Vacuum pump system and vacuum pump RPM control method |
-
2004
- 2004-11-09 GB GB0424734A patent/GB0424734D0/en not_active Ceased
-
2005
- 2005-10-25 WO PCT/GB2005/004128 patent/WO2006051260A1/en active Application Filing
- 2005-11-04 TW TW094138682A patent/TW200630544A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW200630544A (en) | 2006-09-01 |
WO2006051260A1 (en) | 2006-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |