KR102564312B1 - 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법 - Google Patents

진공 펌프 장치의 운전 제어장치, 및 운전 제어방법 Download PDF

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Publication number
KR102564312B1
KR102564312B1 KR1020180042234A KR20180042234A KR102564312B1 KR 102564312 B1 KR102564312 B1 KR 102564312B1 KR 1020180042234 A KR1020180042234 A KR 1020180042234A KR 20180042234 A KR20180042234 A KR 20180042234A KR 102564312 B1 KR102564312 B1 KR 102564312B1
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KR
South Korea
Prior art keywords
pump
booster pump
booster
main
main pump
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Application number
KR1020180042234A
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English (en)
Korean (ko)
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KR20180115229A (ko
Inventor
지에 유안 린
고이치 이와사키
도루 오스가
유지 이시이
히로야스 가와시마
세이지 시마다
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
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Publication of KR20180115229A publication Critical patent/KR20180115229A/ko
Application granted granted Critical
Publication of KR102564312B1 publication Critical patent/KR102564312B1/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020180042234A 2017-04-12 2018-04-11 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법 Active KR102564312B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017078915A JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法
JPJP-P-2017-078915 2017-04-12

Publications (2)

Publication Number Publication Date
KR20180115229A KR20180115229A (ko) 2018-10-22
KR102564312B1 true KR102564312B1 (ko) 2023-08-07

Family

ID=62528208

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180042234A Active KR102564312B1 (ko) 2017-04-12 2018-04-11 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법

Country Status (5)

Country Link
EP (1) EP3388676B1 (enExample)
JP (1) JP2018178846A (enExample)
KR (1) KR102564312B1 (enExample)
CN (1) CN108691769B (enExample)
TW (1) TWI775832B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12305650B2 (en) 2020-07-24 2025-05-20 Eaton Intelligent Power Limited Control system for a fluid management system
CN114812964B (zh) * 2021-09-30 2025-02-18 国家电网有限公司 一种内置式传感器密封性检测装置及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP2008175145A (ja) * 2007-01-18 2008-07-31 Ebara Corp 真空ポンプユニット
JP2014043800A (ja) * 2012-08-27 2014-03-13 Ebara Corp ポンプ制御装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2383335A1 (fr) * 1977-03-08 1978-10-06 Leybold Heraeus Sogev Pompe mecanique a joint d'huile
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
JP4218756B2 (ja) 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
GB0424734D0 (en) * 2004-11-09 2004-12-08 Boc Group Plc Vacuum pumping system
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
US8721295B2 (en) * 2005-04-08 2014-05-13 Ebara Corporation Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
JP6050081B2 (ja) * 2012-10-05 2016-12-21 株式会社荏原製作所 ドライ真空ポンプ装置
PL3123030T3 (pl) * 2014-03-24 2020-03-31 Ateliers Busch S.A. Sposób pompowania w układzie pomp próżniowych i układ pomp próżniowych
CN104989621A (zh) * 2015-07-15 2015-10-21 陆铭 智能真空排气台
CN106014999B (zh) * 2016-06-09 2017-08-04 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP2008175145A (ja) * 2007-01-18 2008-07-31 Ebara Corp 真空ポンプユニット
JP2014043800A (ja) * 2012-08-27 2014-03-13 Ebara Corp ポンプ制御装置

Also Published As

Publication number Publication date
KR20180115229A (ko) 2018-10-22
EP3388676B1 (en) 2020-11-04
TWI775832B (zh) 2022-09-01
EP3388676A1 (en) 2018-10-17
JP2018178846A (ja) 2018-11-15
TW201842272A (zh) 2018-12-01
CN108691769A (zh) 2018-10-23
CN108691769B (zh) 2021-11-02

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