JP2018152435A - 保護装置 - Google Patents
保護装置 Download PDFInfo
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- JP2018152435A JP2018152435A JP2017046607A JP2017046607A JP2018152435A JP 2018152435 A JP2018152435 A JP 2018152435A JP 2017046607 A JP2017046607 A JP 2017046607A JP 2017046607 A JP2017046607 A JP 2017046607A JP 2018152435 A JP2018152435 A JP 2018152435A
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- Prior art keywords
- conductive layer
- coil
- protection
- terminal
- potential side
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- 230000001681 protective effect Effects 0.000 title claims description 32
- 239000004020 conductor Substances 0.000 claims abstract description 74
- 239000004065 semiconductor Substances 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 230000003071 parasitic effect Effects 0.000 claims description 44
- 239000010410 layer Substances 0.000 claims 12
- 239000002344 surface layer Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 abstract description 33
- 238000009413 insulation Methods 0.000 abstract 4
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000012447 hatching Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0292—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using a specific configuration of the conducting means connecting the protective devices, e.g. ESD buses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/62—Protection against overvoltage, e.g. fuses, shunts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/642—Capacitive arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/645—Inductive arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0288—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using passive elements as protective elements, e.g. resistors, capacitors, inductors, spark-gaps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0802—Resistors only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0814—Diodes only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0817—Thyristors only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/10—Inductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H9/00—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection
- H02H9/04—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection responsive to excess voltage
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/866—Zener diodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
Description
3:入力端子
4:出力端子
5:グランド端子
6:コイル(第1コイル)
7:導電層
8:抵抗
9:第2コイル
10:保護素子
11:高電位側端子
12:低電位側端子
13:p+型コンタクト領域
14:n+型カソード領域
15:p型ウェル領域
16:n型ウェル領域
17:n型ツェナーカソード領域
18:n+型コンタクト領域
19:p+型アノード領域
20:半導体基板
29、30:絶縁層
41−43:結線
50:サイリスタ
51:ツェナーダイオード
52、53:トランジスタ
54、55:抵抗
56、59:コンデンサ
57、58:コイル
76、78、79:細長導体
91:電源
92:負荷回路
Claims (6)
- 過電力が加わると点弧する保護素子が形成されている半導体基板と、
前記半導体基板の表面を覆っている絶縁層と、
前記絶縁層に設けられており、前記半導体基板の表面と平行な面内に拡がっている導電層と、
コイルと抵抗のいずれか一方の受動素子であって、細長導体で作られおり、前記導電層の上方で、前記導電層と平行な面内で渦巻き状あるいはジグザグに湾曲している受動素子と、
前記絶縁層の表層に露出している入力端子と出力端子とグランド端子と、
を備えており、
前記入力端子に前記受動素子の一端が電気的に接続されており、
前記受動素子の他端と前記保護素子の高電位側端子が前記出力端子に電気的に接続されており、
前記保護素子の低電位側端子と前記導電層が前記グランド端子に電気的に接続されている、保護装置。 - コイルと抵抗のいずれか一方の別の受動素子であって、別の細長導体で作られており、前記導電層と前記半導体基板の間で、前記導電層と平行な面内で渦巻き状あるいはジグザグに湾曲しており、前記受動素子の他端と前記高電位側端子の接続点と、前記出力端子との間に電気的に接続されている別の受動素子をさらに備えていることを特徴とする請求項1に記載の保護装置。
- 前記細長導体と前記導電層の間の寄生容量が、前記保護素子と前記導電層の間の寄生容量よりも大きいことを特徴とする請求項1に記載の保護装置。
- 前記別の細長導体と前記導電層の間の寄生容量が、前記保護素子と前記別の細長導体の間の寄生容量よりも大きいことを特徴とする請求項2に記載の保護装置。
- 前記保護素子は、ツェナーダイオードを含むことを特徴とする請求項1から4のいずれか1項に記載の保護装置。
- 前記保護素子は、サイリスタを含むことを特徴とする請求項5に記載の保護装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017046607A JP6800783B2 (ja) | 2017-03-10 | 2017-03-10 | 保護装置 |
CN201810063214.1A CN108573970A (zh) | 2017-03-10 | 2018-01-23 | 保护装置 |
US15/915,522 US10593662B2 (en) | 2017-03-10 | 2018-03-08 | Protection device |
EP18160880.3A EP3373333A1 (en) | 2017-03-10 | 2018-03-09 | Protection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017046607A JP6800783B2 (ja) | 2017-03-10 | 2017-03-10 | 保護装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018152435A true JP2018152435A (ja) | 2018-09-27 |
JP6800783B2 JP6800783B2 (ja) | 2020-12-16 |
Family
ID=61616903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017046607A Active JP6800783B2 (ja) | 2017-03-10 | 2017-03-10 | 保護装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10593662B2 (ja) |
EP (1) | EP3373333A1 (ja) |
JP (1) | JP6800783B2 (ja) |
CN (1) | CN108573970A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6536768B1 (ja) * | 2018-04-16 | 2019-07-03 | 株式会社村田製作所 | Esd保護素子 |
US11152454B2 (en) * | 2019-02-19 | 2021-10-19 | Semiconductor Components Industries, Llc | Method of forming a semiconductor device having a resistor and structure therefor |
US11912564B2 (en) * | 2020-07-31 | 2024-02-27 | Knowles Electronics, Llc | Sensor package including a substrate with an inductor layer |
JP2022131932A (ja) * | 2021-02-26 | 2022-09-07 | 株式会社東海理化電機製作所 | 静電保護素子 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH065783A (ja) * | 1992-06-23 | 1994-01-14 | Matsushita Electron Corp | 半導体装置 |
JPH1168040A (ja) * | 1997-08-19 | 1999-03-09 | Sony Corp | 入力保護回路およびそれを用いた半導体装置 |
JP2003051543A (ja) * | 2001-08-03 | 2003-02-21 | Matsushita Electric Ind Co Ltd | 半導体集積回路 |
JP2005217043A (ja) * | 2004-01-28 | 2005-08-11 | Toshiba Corp | 静電破壊保護回路 |
JP2010523001A (ja) * | 2007-03-29 | 2010-07-08 | インターナショナル・ビジネス・マシーンズ・コーポレーション | インダクタを組み込んだ集積回路構造体、その設計方法、及びその設計システム |
JP2012195870A (ja) * | 2011-03-17 | 2012-10-11 | Seiko Epson Corp | 無線通信デバイス、受動素子の製造方法、及び無線通信機器 |
JP2015198190A (ja) * | 2014-04-02 | 2015-11-09 | 株式会社豊田中央研究所 | ツェナーダイオードとサイリスタを利用する保護用半導体装置 |
JP2016207846A (ja) * | 2015-04-23 | 2016-12-08 | 日立オートモティブシステムズ株式会社 | オンチップノイズ保護回路を有する半導体チップ |
JP2017005179A (ja) * | 2015-06-15 | 2017-01-05 | 日立オートモティブシステムズ株式会社 | 車載用の半導体チップ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5901022A (en) | 1997-02-24 | 1999-05-04 | Industrial Technology Research Inst. | Charged device mode ESD protection circuit |
US8232625B2 (en) | 2009-03-26 | 2012-07-31 | International Business Machines Corporation | ESD network circuit with a through wafer via structure and a method of manufacture |
WO2011037101A1 (ja) | 2009-09-24 | 2011-03-31 | 株式会社村田製作所 | 電子回路デバイス |
US8999807B2 (en) * | 2010-05-27 | 2015-04-07 | Semiconductor Components Industries, Llc | Method for manufacturing a semiconductor component that includes a common mode choke and structure |
US8879223B2 (en) | 2013-01-15 | 2014-11-04 | Silergy Semiconductor Technology (Hangzhou) Ltd | Integrated EMI filter circuit with ESD protection and incorporating capacitors |
-
2017
- 2017-03-10 JP JP2017046607A patent/JP6800783B2/ja active Active
-
2018
- 2018-01-23 CN CN201810063214.1A patent/CN108573970A/zh active Pending
- 2018-03-08 US US15/915,522 patent/US10593662B2/en active Active
- 2018-03-09 EP EP18160880.3A patent/EP3373333A1/en not_active Withdrawn
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH065783A (ja) * | 1992-06-23 | 1994-01-14 | Matsushita Electron Corp | 半導体装置 |
JPH1168040A (ja) * | 1997-08-19 | 1999-03-09 | Sony Corp | 入力保護回路およびそれを用いた半導体装置 |
JP2003051543A (ja) * | 2001-08-03 | 2003-02-21 | Matsushita Electric Ind Co Ltd | 半導体集積回路 |
JP2005217043A (ja) * | 2004-01-28 | 2005-08-11 | Toshiba Corp | 静電破壊保護回路 |
JP2010523001A (ja) * | 2007-03-29 | 2010-07-08 | インターナショナル・ビジネス・マシーンズ・コーポレーション | インダクタを組み込んだ集積回路構造体、その設計方法、及びその設計システム |
JP2012195870A (ja) * | 2011-03-17 | 2012-10-11 | Seiko Epson Corp | 無線通信デバイス、受動素子の製造方法、及び無線通信機器 |
JP2015198190A (ja) * | 2014-04-02 | 2015-11-09 | 株式会社豊田中央研究所 | ツェナーダイオードとサイリスタを利用する保護用半導体装置 |
JP2016207846A (ja) * | 2015-04-23 | 2016-12-08 | 日立オートモティブシステムズ株式会社 | オンチップノイズ保護回路を有する半導体チップ |
JP2017005179A (ja) * | 2015-06-15 | 2017-01-05 | 日立オートモティブシステムズ株式会社 | 車載用の半導体チップ |
Also Published As
Publication number | Publication date |
---|---|
US20180261592A1 (en) | 2018-09-13 |
US10593662B2 (en) | 2020-03-17 |
CN108573970A (zh) | 2018-09-25 |
JP6800783B2 (ja) | 2020-12-16 |
EP3373333A1 (en) | 2018-09-12 |
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