JP2018108892A - 浮上搬送装置および基板処理装置 - Google Patents

浮上搬送装置および基板処理装置 Download PDF

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Publication number
JP2018108892A
JP2018108892A JP2017227757A JP2017227757A JP2018108892A JP 2018108892 A JP2018108892 A JP 2018108892A JP 2017227757 A JP2017227757 A JP 2017227757A JP 2017227757 A JP2017227757 A JP 2017227757A JP 2018108892 A JP2018108892 A JP 2018108892A
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JP
Japan
Prior art keywords
levitation
substrate
floating
blocks
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017227757A
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English (en)
Japanese (ja)
Other versions
JP2018108892A5 (enExample
Inventor
裕一 今岡
Yuichi Imaoka
裕一 今岡
磯　明典
Akinori Iso
明典 磯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to TW106143470A priority Critical patent/TWI668173B/zh
Priority to KR1020170178373A priority patent/KR101990219B1/ko
Priority to CN201711444785.1A priority patent/CN108249159B/zh
Priority to US15/856,665 priority patent/US10421622B2/en
Publication of JP2018108892A publication Critical patent/JP2018108892A/ja
Publication of JP2018108892A5 publication Critical patent/JP2018108892A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
JP2017227757A 2016-12-28 2017-11-28 浮上搬送装置および基板処理装置 Pending JP2018108892A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW106143470A TWI668173B (zh) 2016-12-28 2017-12-12 浮上搬送裝置及基板處理裝置
KR1020170178373A KR101990219B1 (ko) 2016-12-28 2017-12-22 부상 반송 장치 및 기판 처리 장치
CN201711444785.1A CN108249159B (zh) 2016-12-28 2017-12-27 浮起搬运装置以及基板处理装置
US15/856,665 US10421622B2 (en) 2016-12-28 2017-12-28 Floating conveyor and substrate processing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016254564 2016-12-28
JP2016254564 2016-12-28

Publications (2)

Publication Number Publication Date
JP2018108892A true JP2018108892A (ja) 2018-07-12
JP2018108892A5 JP2018108892A5 (enExample) 2019-10-10

Family

ID=62845087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017227757A Pending JP2018108892A (ja) 2016-12-28 2017-11-28 浮上搬送装置および基板処理装置

Country Status (3)

Country Link
JP (1) JP2018108892A (enExample)
KR (1) KR101990219B1 (enExample)
TW (1) TWI668173B (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP2015118969A (ja) * 2013-12-17 2015-06-25 芝浦メカトロニクス株式会社 基板搬送装置及び基板処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101124133A (zh) * 2004-04-14 2008-02-13 科福罗科学解决方案有限公司 用于调整距离的非接触支撑平台
KR20100123196A (ko) * 2009-05-14 2010-11-24 엘지디스플레이 주식회사 기판 표면 처리장치 및 그 처리방법
JP2011084352A (ja) 2009-10-14 2011-04-28 Myotoku Ltd ワーク浮上装置
JP2014047020A (ja) 2012-08-31 2014-03-17 Tanken Seal Seiko Co Ltd 浮上装置
JP6258892B2 (ja) * 2014-05-13 2018-01-10 芝浦メカトロニクス株式会社 基板処理装置及び基板処理方法
JP2016161007A (ja) * 2015-02-27 2016-09-05 株式会社日本製鋼所 ガス浮上ワーク支持装置および非接触ワーク支持方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP2015118969A (ja) * 2013-12-17 2015-06-25 芝浦メカトロニクス株式会社 基板搬送装置及び基板処理装置

Also Published As

Publication number Publication date
KR20180077052A (ko) 2018-07-06
KR101990219B1 (ko) 2019-06-17
TWI668173B (zh) 2019-08-11
TW201840458A (zh) 2018-11-16

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