TWI668173B - 浮上搬送裝置及基板處理裝置 - Google Patents

浮上搬送裝置及基板處理裝置 Download PDF

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Publication number
TWI668173B
TWI668173B TW106143470A TW106143470A TWI668173B TW I668173 B TWI668173 B TW I668173B TW 106143470 A TW106143470 A TW 106143470A TW 106143470 A TW106143470 A TW 106143470A TW I668173 B TWI668173 B TW I668173B
Authority
TW
Taiwan
Prior art keywords
floating
substrate
blocks
floating device
gap
Prior art date
Application number
TW106143470A
Other languages
English (en)
Chinese (zh)
Other versions
TW201840458A (zh
Inventor
今岡裕一
磯明典
Original Assignee
日商芝浦機械電子裝置股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商芝浦機械電子裝置股份有限公司 filed Critical 日商芝浦機械電子裝置股份有限公司
Publication of TW201840458A publication Critical patent/TW201840458A/zh
Application granted granted Critical
Publication of TWI668173B publication Critical patent/TWI668173B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
TW106143470A 2016-12-28 2017-12-12 浮上搬送裝置及基板處理裝置 TWI668173B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016-254564 2016-12-28
JP2016254564 2016-12-28
JP2017-227757 2017-11-28
JP2017227757A JP2018108892A (ja) 2016-12-28 2017-11-28 浮上搬送装置および基板処理装置

Publications (2)

Publication Number Publication Date
TW201840458A TW201840458A (zh) 2018-11-16
TWI668173B true TWI668173B (zh) 2019-08-11

Family

ID=62845087

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106143470A TWI668173B (zh) 2016-12-28 2017-12-12 浮上搬送裝置及基板處理裝置

Country Status (3)

Country Link
JP (1) JP2018108892A (enExample)
KR (1) KR101990219B1 (enExample)
TW (1) TWI668173B (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070195653A1 (en) * 2004-04-14 2007-08-23 Yuval Yassour Non-contact support platforms for distance adjustment
TW201601850A (zh) * 2014-05-13 2016-01-16 Shibaura Mechatronics Corp 基板處理裝置、基板處理方法、基板製造裝置及基板製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100123196A (ko) * 2009-05-14 2010-11-24 엘지디스플레이 주식회사 기판 표면 처리장치 및 그 처리방법
JP2011084352A (ja) 2009-10-14 2011-04-28 Myotoku Ltd ワーク浮上装置
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP2014047020A (ja) 2012-08-31 2014-03-17 Tanken Seal Seiko Co Ltd 浮上装置
JP6315547B2 (ja) * 2013-12-17 2018-04-25 芝浦メカトロニクス株式会社 基板処理装置
JP2016161007A (ja) * 2015-02-27 2016-09-05 株式会社日本製鋼所 ガス浮上ワーク支持装置および非接触ワーク支持方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070195653A1 (en) * 2004-04-14 2007-08-23 Yuval Yassour Non-contact support platforms for distance adjustment
TW201601850A (zh) * 2014-05-13 2016-01-16 Shibaura Mechatronics Corp 基板處理裝置、基板處理方法、基板製造裝置及基板製造方法

Also Published As

Publication number Publication date
KR20180077052A (ko) 2018-07-06
KR101990219B1 (ko) 2019-06-17
JP2018108892A (ja) 2018-07-12
TW201840458A (zh) 2018-11-16

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