JP2018107321A5 - - Google Patents
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- Publication number
- JP2018107321A5 JP2018107321A5 JP2016253502A JP2016253502A JP2018107321A5 JP 2018107321 A5 JP2018107321 A5 JP 2018107321A5 JP 2016253502 A JP2016253502 A JP 2016253502A JP 2016253502 A JP2016253502 A JP 2016253502A JP 2018107321 A5 JP2018107321 A5 JP 2018107321A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- semiconductor
- emitting device
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 21
- 239000002184 metal Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005253 cladding Methods 0.000 claims 1
- 239000012788 optical film Substances 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016253502A JP6902865B2 (ja) | 2016-12-27 | 2016-12-27 | 半導体発光装置および半導体発光装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016253502A JP6902865B2 (ja) | 2016-12-27 | 2016-12-27 | 半導体発光装置および半導体発光装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018107321A JP2018107321A (ja) | 2018-07-05 |
| JP2018107321A5 true JP2018107321A5 (enExample) | 2019-10-10 |
| JP6902865B2 JP6902865B2 (ja) | 2021-07-14 |
Family
ID=62784720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016253502A Expired - Fee Related JP6902865B2 (ja) | 2016-12-27 | 2016-12-27 | 半導体発光装置および半導体発光装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6902865B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020031954A1 (ja) * | 2018-08-07 | 2020-02-13 | 昭和電工株式会社 | 半導体発光素子、光伝達装置 |
| JP7364376B2 (ja) * | 2018-10-12 | 2023-10-18 | ローム株式会社 | 半導体発光装置および半導体発光装置の製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5077068B2 (ja) * | 2007-05-30 | 2012-11-21 | 日亜化学工業株式会社 | 窒化物半導体素子及びその製造方法 |
| JP2011086899A (ja) * | 2009-09-15 | 2011-04-28 | Toyoda Gosei Co Ltd | Ｉｉｉ族窒化物半導体発光素子 |
| JP2012119585A (ja) * | 2010-12-02 | 2012-06-21 | Showa Denko Kk | 発光ダイオード、発光ダイオードランプ及び照明装置 |
| WO2012176369A1 (ja) * | 2011-06-24 | 2012-12-27 | パナソニック株式会社 | 窒化ガリウム系半導体発光素子、光源および凹凸構造形成方法 |
| JP2014120695A (ja) * | 2012-12-19 | 2014-06-30 | Rohm Co Ltd | 半導体発光素子 |
-
2016
- 2016-12-27 JP JP2016253502A patent/JP6902865B2/ja not_active Expired - Fee Related
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