JP2018107216A - Buffer material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a buffer material of which the structure is capable of protecting a portion with a high possibility that a semiconductor wafer is deformed/damaged, and improves work efficiency.SOLUTION: The present invention relates to a buffer material 100 which is disposed between a housing container 7 in which a semiconductor wafer is accommodated, and a package case when packaging the housing container 7 in the package case. The housing container 7 comprises: a box-shaped main body 81 of which the upper surface is opened; a lid 83 which closes the upper surface; and a holding part 91 which is provided on a rear side of the lid 83 and abutted with an upper edge of a semiconductor wafer 200 that is accommodated within the main body 81, and regulates movements. The buffer material 100 comprises an upper buffer material 1 including an upper housing part 13A in contact with an upper surface of the lid 83. The upper housing part 13A includes: an upper opposite surface 14 that is separately opposite to the upper surface of the lid 83; and an upper-side rib 17 which protrudes from the upper opposite surface 14 and is brought into contact with the upper surface of the lid 83. The upper-side rib 17 is provided at a position, in contact with an upper surface region of the lid 83, located just above a region where at least the holding part 91 is provided in a contact state.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a cushioning material.

When transporting semiconductor wafers, a plurality of semiconductor wafers are stored in a storage container, packed in a packing case, and then transported by a transport device.
During transportation, an external force such as an impact force may act on the storage container because the packaging case falls from the transport device. For this reason, a structure in which the semiconductor wafer is not deformed or damaged by an external force is required. As such a structure, there is a structure in which a cushioning material is provided between the storage container and the packing case.

Patent Document 1 describes a packaging body provided with a storage box for housing a packaging body, an individual pallet on which the packaging body is mounted, and a foam material as a cushioning material that contacts at least one of the packaging body and the individual pallet. ing.
Patent Document 1 also describes that the individual pallet is made of a foamed material having excellent buffering capacity such as polyolefin, polystyrene, polyurethane, etc., and used as a buffer material.

Patent Document 2 describes a structure in which a substrate storage container for storing a semiconductor wafer is mounted on a pallet, and an elastic buffer is provided on the mounting surface of the pallet.
In Patent Document 2, an elastic buffer having a Shore 00 hardness of 20 ° to 120 ° is preferred. Specific examples include elastomers and rubbers.

  Patent Document 3 provides a plurality of inner foam cushioning materials that are in close contact with and protect the omnidirectional surface of the semiconductor storage container, a cardboard box that houses the semiconductor storage container, and an inner foam cushioning material and an inner surface of the cardboard box. A package comprising a plurality of viscoelastic solid buffer materials is described.

Patent Document 4 describes a structure in which a bottom plate is provided between a semiconductor wafer case and a pallet. The bottom plate is a cushioning material in which a cylindrical elastic body is sandwiched between two synthetic resin cardboards.
Patent Document 4 describes that a cushioning material made of styrene foam may be used instead of the bottom plate. There is also described a structure in which a lid is provided on the upper surface of the semiconductor wafer case and sponge-like polyurethane is provided on the back surface of the lid to absorb impact.

Patent Document 5 describes a packaging body provided with an upper buffer body and a lower buffer body so as to sandwich the upper and lower sides of a wafer storage container.
The upper buffer body includes an upper concave portion that accommodates the upper portion of the wafer storage container, and a pressing rib that is provided on the outer periphery of the upper concave portion and contacts the upper end surface of the wafer storage container.
An impact absorbing projection is provided on the bottom surface of the lower shock absorber. The impact absorbing protrusion absorbs impact energy and prevents the impact from being transmitted to the semiconductor wafer by collapsing due to impact when the container storing the wafer storage container falls and collides with the floor.

JP 2014-5078 A JP 2013-249126 A JP 2010-132331 A JP 2011-016549 A JP 2014-151963 A

The storage container includes a holding portion such as a groove and a protrusion in order to hold the semiconductor wafers so as not to contact each other and to move within the container.
The outer shape of the storage container is not limited to a simple box shape. There are arcuate portions along the shape of the semiconductor wafer to be stored, and a structure provided with leg portions for preventing the bottom surface from touching when a storage container is placed.
Therefore, in the storage container, where a semiconductor wafer is likely to be deformed / damaged when an impact is applied, the location depends on the internal structure and outer shape.
In addition, if the cushioning material is provided, the weight and volume of the package increase and workability deteriorates, so it is necessary to pay attention to the position and dimensions.

  However, the structures described in Patent Document 1 to Patent Document 5 are provided with a cushioning material without distinguishing between a portion that is likely to deform and damage a semiconductor wafer and a portion that is low as described below. For this reason, there is a problem that the semiconductor wafer cannot be protected against external force or workability may be deteriorated.

  In the structures described in Patent Documents 1 and 4, the position where the storage box and the cushioning material are in contact with each other is the entire upper surface or the bottom surface, and does not distinguish between a portion that is likely to deform and damage the semiconductor wafer and a portion that is low.

  The structure described in Patent Document 2 is a structure in which a flat rectangular elastic buffer is provided on a pallet at regular intervals, and does not distinguish between a part that is likely to deform and damage a semiconductor wafer and a part that is low.

  The structure described in Patent Document 3 is a structure in which a cushioning material is brought into close contact with the omnidirectional surface of the storage box, and does not distinguish between a portion that is likely to deform and damage a semiconductor wafer and a portion that is low. In such a structure, the weight and volume of the storage box increase and workability deteriorates.

In the structure described in Patent Document 5, the positional relationship between the upper surface rib and the storage box is specified, but this is a structure that prevents the lid and the rib from coming into contact with each other to prevent vibration of the lid, and deforms the semiconductor wafer. -It is not a structure that protects the parts that are likely to be damaged.
In the structure described in Patent Document 5, the position and shape of the shock absorbing protrusion are specified, but the protrusion is provided on the outside so as not to come into contact with the storage box, and protects a portion that is likely to deform or damage the semiconductor wafer. It is not a structure to do.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a cushioning material having a structure capable of protecting a portion that is highly likely to deform and damage a semiconductor wafer and having excellent work efficiency.

The buffer material according to the present invention is a buffer material disposed between the storage container and the packing case when packing the storage container storing the semiconductor wafer in a packing case, and the storage container includes:
A box-shaped main body with an open upper surface, a lid that closes the upper surface, and a back side of the lid, abutting on an upper peripheral edge of the semiconductor wafer housed in the main body, and restricting movement of the semiconductor wafer A holding portion, and the cushioning material has an upper cushioning material having an upper housing portion that contacts the upper surface of the lid, and the upper housing portion is spaced apart from the upper surface of the lid and is opposed to the upper portion An upper surface rib that protrudes from the upper surface and contacts the upper surface of the lid, and the upper rib is at least directly above the region where the holding portion is provided. It is provided in the position which contacts an area | region.

  According to the present invention, the upper-side rib is provided on the upper cushioning material so as to hold the holding portion. The holding portion is a portion where the semiconductor wafer and the storage container are in contact with each other, and when the impact is applied, there is a high possibility that the semiconductor wafer is deformed or damaged. Therefore, by providing the upper-side rib so as to hold the holding portion, it is possible to preferentially protect a portion that is likely to deform or damage the semiconductor wafer in the event of an impact.

In the cushioning material according to the present invention, it is preferable that the upper-side rib has a cross shape in plan view.
According to this invention, since the upper rib is located at a position where the holding portion can be pressed even if the installation angle of the cushioning material on the plane with respect to the storage container is shifted by 90 °, the position of the cushioning material can be freely set. The degree can be increased and work efficiency is excellent.

In the cushioning material according to the present invention, it is preferable that the upper side rib is provided with an upper side hole at a crossing portion.
According to this invention, even when the cushioning material is in contact with the storage container, the storage container can be visually recognized from the hole. Therefore, it can be easily confirmed whether the cushioning material is reliably held in the storage container. Moreover, since the buffer material can be easily removed from the storage container by grasping the inner periphery of the hole, the working efficiency is excellent.

  In the cushioning material according to the present invention, the storage container includes at least a pair of leg portions provided on the bottom surface so as to protrude from the bottom surface, and the cushioning material includes a lower storage portion that contacts the bottom surface. The lower storage part has a cushioning material, the lower storage part is spaced apart from the leg part and faces the bottom face of the storage container, and the lower part protrudes from the lower opposing face and contacts the bottom face of the storage container It is preferable to provide side ribs.

  According to this invention, the leg portion is separated from the lower facing surface while the lower rib is in contact with the bottom surface of the storage container. Therefore, it can prevent that a leg part contacts a lower facing surface and the bottom face of a storage container floats from a lower side rib, and can protect the bottom face of a storage container reliably.

  In the cushioning material according to the present invention, the cushioning material includes a middle cushioning material that contacts the lid and the bottom surface, and the middle cushioning material includes a plate-shaped middle cushioning material body and a bottom surface of the middle cushioning material body. A middle lid housing portion having a lid facing surface facing away from the top surface of the lid, and a lid-side rib projecting from the lid facing surface and contacting the top surface of the lid; A middle portion that is provided on the upper surface of the main body, has a bottom surface facing the bottom surface of the storage container away from the leg, and a bottom rib protruding from the bottom surface and contacting the bottom surface of the storage container It is preferable that the lid side rib is provided at a position in contact with at least the upper surface region of the lid located immediately above the region where the holding portion is provided.

According to this invention, the lid-side rib is provided on the middle cushioning material so as to hold the holding portion. The holding portion is a portion where the semiconductor wafer and the storage container are in contact with each other, and when the impact is applied, there is a high possibility that the semiconductor wafer is deformed or damaged. Therefore, by providing the lid-side rib so as to hold the holding portion, it is possible to preferentially protect a portion that is likely to deform or damage the semiconductor wafer in the event of an impact.
Moreover, according to this invention, a leg part spaces apart from a bottom face opposing surface in the state which the bottom face side rib contacted the bottom face of the storage container. Therefore, it can prevent that a leg part contacts a bottom face and the bottom face of a storage container floats from a bottom face side rib, and can protect the bottom face of a storage container reliably.

  Furthermore, according to the present invention, since the middle cushioning material can be provided on the upper surface and the bottom surface of the storage container, it can also be used as an upper cushioning material or a lower cushioning material. Further, the storage containers can be stored in multiple stages in the height direction.

In the cushioning material according to the present invention, it is preferable that a plurality of sets of the upper storage unit, the lower storage unit, the middle lid storage unit, and the middle bottom storage unit are arranged.
According to this invention, four or more storage containers can be protected by one set of upper cushioning material, middle cushioning material, and lower cushioning material, so that the work efficiency during transportation and packaging is excellent.

The cushioning material according to the present invention is preferably composed of a foam having an expansion ratio of 20 times or more and 40 times or less.
According to this invention, since the cushioning material is formed of a foam having an expansion ratio of 20 times or more and 40 times or less, it is possible to achieve both hardness that can withstand external impact and softness that absorbs the impact.

The cushioning material according to the present invention is preferably composed of any of polyurethane foam, polyethylene foam, polypropylene foam, or polystyrene foam.
According to this invention, the cushioning material can be easily made into a foam having an expansion ratio of 20 times or more and 40 times or less.

  The cushioning material according to the present invention is a cushioning material disposed between the storage container and the packing case when the storage container for storing the semiconductor wafer is packed in a packing case, and the storage container has an upper surface. An open box-shaped main body, a lid that closes the upper surface, and a holder that is provided on the back side of the lid and contacts the upper peripheral edge of the semiconductor wafer housed in the main body and regulates the movement of the semiconductor wafer And at least a pair of leg portions provided at end portions of the bottom surface so as to protrude from the bottom surface, the buffer material being in contact with the top surface of the lid and the bottom surface of the storage container The middle cushioning material is provided on the bottom surface of the plate-shaped middle cushioning material main body, on the bottom surface of the middle cushioning material main body, facing away from the top surface of the lid, and from the lid facing surface A lid that protrudes and contacts the top surface of the lid A middle lid housing portion having ribs, a bottom surface facing the bottom surface of the housing container and spaced from the leg portion, provided on the top surface of the middle cushioning material body, and protruding from the bottom surface, An intermediate bottom storage portion having a bottom side rib that contacts the bottom surface of the storage container, and the lid side rib contacts at least an upper surface region of the lid positioned immediately above the region where the holding portion is provided. It is provided in the position.

  According to this invention, the lid-side rib is provided on the middle cushioning material so as to hold the holding portion. The holding portion is a portion where the semiconductor wafer and the storage container are in contact with each other, and is highly likely to be deformed or damaged when an impact is applied. Therefore, it is possible to preferentially protect a portion that is highly likely to deform or damage the semiconductor wafer in the event of an impact.

  Moreover, according to this invention, a leg part spaces apart from a bottom face opposing surface in the state which the bottom face side rib contacted the bottom face of the storage container. Therefore, it can prevent that a leg part contacts a bottom face and the bottom face of a storage container floats from a bottom face side rib, and can protect the bottom face of a storage container reliably.

  Furthermore, according to the present invention, since the middle cushioning material can be provided on the upper surface and the bottom surface of the storage container, it can also be used as an upper cushioning material or a lower cushioning material. Further, the storage containers can be stored in multiple stages in the height direction.

The perspective view which shows the state which provided the buffer body in the storage container. A1-A1 sectional drawing of FIG. 1. It is a part of A2-A2 sectional drawing of FIG. 1, Comprising: A storage container is shown with a side view. The perspective view of a storage container. (A) is a top view of a storage container, (B) is a back view of a lid | cover. It is a figure which shows an upper buffer, Comprising: (A) is the perspective view seen from the bottom face side, (B) is a bottom view, (C) is A3-A3 sectional drawing of (B). It is a figure which shows a lower buffer, Comprising: (A) is a perspective view, (B) is a top view, (C) is A4-A4 sectional drawing of (B). It is a figure which shows a middle buffer, Comprising: (A) is a perspective view, (B) is a bottom view. It is a figure which shows a middle buffer, Comprising: (A) is a top view, (B) is A5-A5 sectional drawing of (A).

DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
First, with reference to FIGS. 1-3, the schematic structure of the shock absorbing material which concerns on this embodiment is demonstrated easily.

As shown in FIGS. 1 to 3, the shock absorber 100 is a shock absorber disposed between the storage container 7 and the packing case when the storage container 7 is packed in a packing case (not shown). The lower cushioning material 3 and the middle cushioning material 5 are provided.
In FIG. 1, three upper storage containers 7 are provided between the upper cushioning material 1 and the middle cushioning material 5, and three lower storage containers 7 are provided between the middle cushioning material 5 and the lower cushioning material 3.
The cushioning material 100 further includes a vibration absorbing material 9 provided on the bottom surface of the lower cushioning material 3.
The above is description of schematic structure of the shock absorbing material 100 which concerns on this embodiment.

  Next, the detail of the structure of the storage container 7 and the shock absorbing material 100 which concerns on this embodiment is demonstrated.

First, the structure of the storage container 7 will be described with reference to FIGS. 2, 4, and 5.
The storage container 7 is a container for storing the semiconductor wafer 200 shown in FIG. 2, and is, for example, a FOSB (Front Opening Shipping Box). As shown in FIG. 4, the storage container 7 includes a box-shaped main body 81 having an open upper surface and a lid 83 that closes the upper surface.

The main body 81 includes leg portions 87.
The legs 87 are at least a pair of legs provided at the ends of the bottom surface 86 so as to protrude from the bottom surface 86 of the main body 81. Here, one is provided at each of the four corners.

As shown in FIG. 2 and FIG. 4, a comb-shaped wafer storage unit 85 is provided in the main body 81 of the storage container 7, in which storage grooves are formed for storing a plurality of semiconductor wafers 200 at intervals. It is done.
The wafer storage portion 85 includes a side storage portion 85A that contacts the outer edge side portion of the semiconductor wafer 200 and a bottom storage portion 85B that contacts the outer edge bottom portion of the semiconductor wafer 200.
Here, a pair of side storage portions 85 </ b> A are provided on the inner peripheral side surfaces of the main body 81 that face each other. Two bottom storage portions 85 </ b> B are provided immediately above the bottom surface 86. The two side storage portions 85A are arranged in parallel to each other in the groove arrangement direction.
The lid 83 is a plate-like member having a rectangular planar shape, and has a pair of lock portions 89 and a holding portion 91 as shown in FIGS. 4 and 5.

  The lock portion 89 is a member that fixes the lid 83 to the main body 81, and includes lock bars 89A and 89B and a lock lever 89C as shown in FIG.

  The lock bars 89A and 89B are members provided along the opposing sides of the lid 83, and are movable in the directions of D1 and D2 in FIG.

The lock lever 89 </ b> C is a lever protruding from the side surface of the lock portion 89.
When the lock lever 89C is pushed into the lock portion side, the lock rod 89A is moved in the direction D1, and the lock rod 89B is moved in the direction D2, and pushed out to the outside of the lid 83. The distal ends of the extruded lock rods 89A and 89B engage with the recess 81A of the main body 81, and the lid 83 is locked and fixed to the main body 81. In the locked state, the lock lever 89C is returned to its original position, whereby the lock rods 89A and 89B are pulled back to the inside of the lid 83 to release the lock.

As shown in FIG. 5, the holding portion 91 is a vertically long comb-shaped member provided on the back side of the lid 83 and is provided between the lock portions 89. The holding portion 91 inserts the upper peripheral edge of the semiconductor wafer 200 accommodated in the main body 81 between the teeth of the comb and makes it contact, thereby moving the semiconductor wafer 200 in the axial direction or rotating in the radial direction. The semiconductor wafers 200 are regulated and held so as not to contact each other.
In FIG. 5, the holding portion 91 is provided in the central portion of the lid 83 in parallel with the arrangement direction (vertical direction) of the semiconductor wafers 200 so as to be parallel to one of the sides constituting the rectangle of the lid 83. .
The above is the description of the structure of the storage container 7.

Next, the structure of the upper cushioning material 1 will be described with reference to FIGS.
The upper cushioning material 1 is a cushioning material provided on the upper surface of the upper storage container 7, and is a plate material having a rectangular planar shape. As shown in FIG. 6, the upper cushioning material 1 includes upper storage portions 13 </ b> A, 13 </ b> B, and 13 </ b> C that come into contact with the lid 83 of the storage container 7.

  The upper storage portions 13 </ b> A, 13 </ b> B, and 13 </ b> C are recessed portions that are provided on the bottom surface of the upper cushioning material 1 and fit into the upper end of the storage container 7. Here, the planar shape is a rectangular recess. The upper storage portions 13A, 13B, and 13C include an upper facing surface 14, upper side ribs 15 and 17, an upper side hole 19, and a reinforcing rib 21.

The upper facing surface 14 is a surface facing away from the lid 83 of the storage container 7 and is the bottom surface of the upper storage portions 13A, 13B, 13C.
The upper ribs 15 and 17 are vertically long ribs protruding from the upper facing surface 14, and at least one of them is in contact with the upper surface of the lid 83, and is located immediately above the region where at least the holding portion 91 is provided. The lid 83 is provided at a position in contact with the upper surface region (here, the region surrounded by the dotted line 91 shown in FIG. 5).
Here, as shown in FIG. 2, the upper rib 17 is provided at a position in contact with the upper surface region of the lid 83, which is located immediately above the region where the holding portion 91 is provided. Further, the upper rib 17 is provided at a position where the extending direction (vertical direction) coincides with the extending direction of the holding portion 91.
Since the holding part 91 is a member that holds the semiconductor wafer 200 and is highly likely to be deformed or damaged in the event of an impact, the holding part 91 is given priority by the upper side rib 17 pressing the holding part 91. Can be protected.

The upper side rib 15 and the upper side rib 17 are provided so as to be orthogonal to each other, and the upper side rib 15 and the upper side rib 17 have a cross shape in a cross shape. Due to the cross shape, even if the installation angle on the plane of the upper cushioning material 1 is shifted by 90 °, one of the upper ribs 15 and 17 is located at a position where the holding portion 91 can be pressed.
Therefore, the freedom degree of the position at the time of providing the upper shock absorbing material 1 can be made high, and it is excellent in working efficiency.

The upper side hole 19 is a through hole provided at a crossing portion of the upper side ribs 15 and 17.
The upper side hole 19 is used for visually recognizing the upper surface of the storage container 7 in a state where the upper cushioning material 1 is provided in the storage container 7. The upper side hole 19 is also used as a handle when removing the upper cushioning material 1 from the storage container 7. Specifically, the upper cushioning material 1 can be easily removed by grasping the inner periphery of the upper side hole 19.

The reinforcing rib 21 is an L-shaped rib provided so as to connect adjacent side surfaces of the upper storage portions 13A, 13B, and 13C, and reinforces the side surfaces of the upper storage portions 13A, 13B, and 13C.
The above is the description of the structure of the upper cushioning material 1.

Next, the structure of the lower cushioning material 3 will be described with reference to FIGS. 2, 3 and 7.
The lower cushioning material 3 is a cushioning material provided on the bottom surface of the lower storage container 7, and is a plate material having a rectangular planar shape. The lower cushioning material 3 includes lower storage portions 31 </ b> A, 31 </ b> B, and 31 </ b> C that come into contact with the bottom surface of the storage container 7.

The lower storage portions 31 </ b> A, 31 </ b> B, and 31 </ b> C are recessed portions that are fitted and held at the lower end of the storage container 7. Here, the planar shape is a rectangular recess. The lower storage portions 31 </ b> A, 31 </ b> B, and 31 </ b> C include a lower facing surface 33, a lower side rib 35, and a lower side hole 37.
The lower facing surface 33 is a surface that is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and is the bottom surface of the lower storage portions 31A, 31B, and 31C.

As shown in FIGS. 2 and 3, the leg 87 is provided so as to straddle the lower rib 35, and therefore the lower rib 35 does not contact the bottom surface of the leg 87.
Since the lower facing surface 33 is separated from the leg portion 87, the height H 1 of the lower side rib 35 is in contact with the bottom surface 86 of the storage container 7 as shown in FIG. 2 and FIG. The height is spaced from the facing surface 33.
Therefore, it can prevent that the leg part 87 contacts the lower opposing surface 33, and the bottom face 86 of the storage container 7 floats from the lower side rib 35, and can protect the bottom face 86 of the storage container 7 reliably.

The lower-side rib 35 is a rib protruding from the lower facing surface 33 and is provided at a position in contact with the bottom surface 86 of the storage container 7 as shown in FIGS. 2 and 3.
The lower rib 35 is preferably provided at a position (here, directly below) facing the bottom storage portion 85B. The reason is as follows.
In FIGS. 2 and 3, since the bottom storage portion 85B is provided immediately above the bottom surface 86, when an impact is applied to the bottom surface 86, the impact is transmitted to the bottom storage portion 85B, and the semiconductor wafer 200 is deformed or damaged. there is a possibility. Therefore, by providing the lower side rib 35 at a position facing the bottom storage portion 85B, the bottom storage portion 85B can be pressed through the bottom surface 86. Thereby, the bottom storage portion 85B can be protected with priority, which is preferable.

The lower side hole 37 is a through hole provided in the lower side rib 35 and is used for visually recognizing the bottom surface of the storage container 7 with the lower cushioning material 3 provided in the storage container 7. The lower side hole 37 is also used as a handle when the lower cushioning material 3 is removed from the storage container 7. Specifically, the lower cushioning material 3 can be easily removed by grasping the inner periphery of the upper side hole 19.
The above is the description of the structure of the lower cushioning material 3.

Next, the structure of the middle cushioning material 5 will be described with reference to FIGS. 2, 3, 8, and 9.
The middle cushioning material 5 is a cushioning material provided on the bottom surface of the upper storage container 7 and the upper surface of the lower storage container 7, and includes a plate-shaped middle cushioning material body 51.

The middle cushioning material main body 51 has middle lid housing portions 53A, 53B, and 53C on the bottom surface.
The middle lid storage portions 53 </ b> A, 53 </ b> B, and 53 </ b> C are recessed portions that are fitted and held at the upper end of the storage container 7. Here, the planar shape is a rectangular recess.
The middle lid storage portions 53A, 53B, and 53C include a lid facing surface 54, lid side ribs 55 and 57, a lid side hole 59, and a lid side reinforcing rib 61.

The lid facing surface 54 is a surface facing the lid 83 of the storage container 7 and is the bottom surface of the middle lid storage portions 53A, 53B, and 53C.
The lid-side ribs 55 and 57 are ribs protruding from the lid facing surface 54, and at least one of them is in contact with the upper surface of the lid 83, and in the state of contact, the lid side ribs 55 and 57 are located immediately above the region where at least the holding portion 91 is provided. 83 is provided at a position in contact with the upper surface region. Here, as shown in FIG. 2, the lid-side rib 57 is provided at a position in contact with the upper surface region of the lid 83, which is located immediately above the region where the holding portion 91 is provided. Further, the lid-side rib 57 is provided at a position where the extending direction (vertical direction) coincides with the extending direction of the holding portion 91.
Therefore, similarly to the upper side rib 17, the lid side rib 57 can hold the holding unit 91 to protect the holding unit 91 with priority.

The lid side rib 55 and the lid side rib 57 are provided so as to intersect with each other, and the planar shape of the lid side rib 55 and the lid side rib 57 is a cross shape.
Due to the cross shape, one of the lid-side ribs 55 and 57 is positioned at a position where the holding portion 91 can be pressed even if the installation angle on the plane of the middle cushioning material 5 is shifted by 90 °.

The lid-side hole 59 is a through-hole provided at the crossing portion of the lid-side ribs 55 and 57 and is also used as a handle when removing the middle cushioning material 5 from the storage container 7.
The lid-side reinforcing rib 61 is an L-shaped rib provided so as to connect adjacent side surfaces of the middle lid storage portions 53A, 53B, and 53C, and reinforces the side surfaces of the middle lid storage portions 53A, 53B, and 53C. .

The middle cushioning material body 51 has middle bottom housing parts 71A, 71B, 71C on the upper surface.
The middle bottom storage parts 71 </ b> A, 71 </ b> B, 71 </ b> C are recessed parts that are fitted and held at the lower end of the storage container 7. Here, the planar shape is a rectangular recess. The middle bottom housing parts 71A, 71B, 71C include a bottom surface 73 and a bottom side rib 75.

The bottom facing surface 73 is a surface that is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7 and is the bottom surface of the middle bottom surface storage portions 71A, 71B, 71C.
The bottom surface side rib 75 is a rib protruding from the middle bottom surface storage portions 71A, 71B, 71C, and is provided at a position in contact with the bottom surface 86 of the storage container 7, as shown in FIGS.
Since the bottom facing surface 73 is separated from the leg portion 87, the height H2 of the bottom side rib 75 is in contact with the bottom surface 86 of the storage container 7 as shown in FIGS. The height is spaced from the facing surface 73.
Therefore, it can prevent that the leg part 87 contacts the bottom face opposing surface 73, and the bottom face 86 of the storage container 7 floats from the lower side rib 35, and can protect the bottom face 86 of the storage container 7 reliably.
The above is the description of the structure of the middle cushioning material 5.

Next, materials constituting the cushioning material 100 will be described.
The cushioning material 100 needs to be hard enough to withstand an external impact without being damaged, and soft enough to absorb the impact and prevent the impact from being transmitted to the storage container 7. As a material satisfying such requirements, a foam having an expansion ratio of 20 times or more and 40 times or less is preferable.
Specific examples of the foam include foamed polyurethane, foamed polyethylene, foamed polypropylene, and foamed polystyrene.
The above is description of the material which comprises the buffer material 100. FIG.

Next, the structure of the vibration absorber 9 will be described with reference to FIGS.
The vibration absorbing material 9 is a member that absorbs vibration generated when the storage container 7 is packed with the cushioning material 100 and placed on the floor, and includes plate members 9A and 9B and an elastic body 9C.
The plate members 9A and 9B are members that are provided to face each other and are in contact with the cushioning material and the floor, respectively. The plate members 9A and 9B are made of, for example, a plastic plate.
The elastic body 9C is a member that absorbs vibration by elastic deformation with respect to vibration, and is provided so as to be sandwiched between the plate materials 9A and 9B. The elastic body 9C is made of, for example, polyurethane, synthetic rubber, or polyethylene.
The above is the description of the structure of the vibration absorbing material 9.

  The above is the detailed description of the configuration of the cushioning material 100 and the storage container 7 according to the present embodiment.

Thus, according to the present embodiment, the cushioning material 100 has the upper cushioning material 1, and the upper cushioning material 1 is in contact with the lid 83, and in the contacted state, at least the region where the holding portion 91 is provided. The upper side rib 17 provided in the position which contacts the upper surface area | region of the lid | cover 83 located immediately above is provided.
For this reason, when the upper cushioning material 1 is provided in the storage container 7, the upper rib 17 can hold the holding portion 91, and the holding portion 91 has a high possibility of being deformed or damaged in the event of an impact. Can be protected.

According to the present embodiment, since the upper ribs 15 and 17 have a cross shape in plan view, even if the installation angle on the plane of the upper cushioning material 1 is shifted by 90 ° with respect to the storage container 7, the holding portion One of the upper ribs 15 and 17 is located at a position where 91 can be pressed.
Therefore, the freedom degree of the position at the time of providing the upper shock absorbing material 1 can be made high, and it is excellent in working efficiency.

According to the present embodiment, since the upper side hole 19 is provided at the intersection of the upper side ribs 15, 17, the storage container 7 is removed from the upper side hole 19 even when the upper cushioning material 1 is in contact with the storage container 7. Visible.
Therefore, it can be easily confirmed whether the upper cushioning material 1 is securely held in the storage container 7. Moreover, when removing the upper shock absorbing material 1 from the storage container 7, the upper shock absorbing material 1 can be easily removed from the storage container 7 by grasping the inner periphery of the upper side hole 19 instead of a handle, and it is excellent in working efficiency.

According to the present embodiment, the cushioning material 100 includes the lower cushioning material 3, and the lower cushioning material 3 is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and the storage container. 7 is provided with a lower rib 35 that comes into contact with the bottom surface 86.
Therefore, it can prevent that the leg part 87 contacts the lower opposing surface 33, and the bottom face 86 of the storage container 7 floats from the lower side rib 35, and can protect the bottom face 86 of the storage container 7 reliably.

According to the present embodiment, the cushioning material 100 includes the middle cushioning material 5, and the middle cushioning material 5 is in contact with the lid 83, and is located immediately above the region where at least the holding portion 91 is provided. And a lid-side rib 57 provided at a position in contact with the upper surface region of the lid 83.
Therefore, when the middle cushioning material 5 is provided in the storage container 7, the lid-side rib 57 can hold the holding portion 91, and the holding portion 91 is highly likely to be deformed / damaged in the event of an impact. Can be protected.

Further, the middle cushioning material 5 includes a bottom facing surface 73 that is spaced apart from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and a bottom surface side rib 75 that contacts the bottom surface 86 of the storage container 7.
Therefore, it can prevent that the leg part 87 contacts the bottom face opposing surface 73, and the bottom face 86 of the storage container 7 floats from the bottom face side rib 75, and can protect the bottom face 86 of the storage container 7 reliably.

Furthermore, since the middle cushioning material 5 includes both the lid-side ribs 55 and 57 and the bottom-side rib 75, it is provided on the top surface and the bottom surface of the storage container 7.
Therefore, the middle cushioning material 5 can also be used as the upper cushioning material 1 and the lower cushioning material 3. Moreover, the storage container 7 can be stored in multiple stages in the height direction.

  According to the present embodiment, the cushioning material 100 is formed of a foam having an expansion ratio of 20 times or more and 40 times or less. Therefore, it is possible to achieve both hardness that can withstand external impact and softness that absorbs the impact.

According to the present embodiment, the cushioning material 100 is made of any of polyurethane foam, polyethylene foam, polypropylene foam, or polystyrene foam.
Therefore, the buffer material 100 can be easily made into a foam having an expansion ratio of 20 times or more and 40 times or less.

According to this embodiment, in the cushioning material 100, the upper storage portions 13A, 13B, 13C, the lower storage portions 31A, 31B, 31C, the middle lid storage portions 53A, 53B, 53C, and the middle bottom storage portions 71A, 71B, 71C are Multiple sets are arranged. Here, three sets are arranged.
Therefore, four or more (six in this case) storage containers 7 can be protected by one set of the upper cushioning material 1, the lower cushioning material 3, and the middle cushioning material 5, so that the work efficiency during transportation and packaging is excellent.

  As mentioned above, although this invention was demonstrated based on embodiment, this invention is not limited to said embodiment. It is natural for a person skilled in the art to come up with various modifications and improvements within the scope of the idea of the present invention, and these are also included in the scope of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Upper buffer material, 3 ... Lower buffer material, 5 ... Middle buffer material, 7 ... Storage container, 13A, 13B, 13C ... Upper storage part, 14 ... Upper opposing surface, 15, 17 ... Upper side rib, 19 ... Upper part Side hole, 31A, 31B, 31C ... lower storage part, 33 ... lower facing surface, 35 ... lower side rib, 51 ... middle cushion body, 53A, 53B, 53C ... middle lid storage part, 54 ... lid facing surface, 55 57 ... Lid on the lid side, 59 ... Lid on the lid side, 71A, 71B, 71C ... Middle bottom housing part, 73 ... Bottom facing surface, 75 ... Bottom rib, 81 ... Main body, 83 ... Lid, 85 ... Wafer housing part, 86 ... Bottom, 87 ... Leg, 91 ... Holding part, 100 ... Cushioning material.

Claims (9)

When packing a storage container for storing a semiconductor wafer in a packing case, a cushioning material disposed between the storage container and the packing case,
The storage container is
A box-shaped main body with an open upper surface, a lid that closes the upper surface, and a back side of the lid, abutting on an upper peripheral edge of the semiconductor wafer housed in the main body, and restricting movement of the semiconductor wafer And a holding part that
The cushioning material has an upper cushioning material having an upper storage portion that comes into contact with the upper surface of the lid,
The upper storage part is
An upper facing surface facing away from the upper surface of the lid; an upper rib projecting from the upper facing surface and contacting the upper surface of the lid;
With
The cushioning material, wherein the upper rib is provided at a position in contact with at least an upper surface region of the lid located immediately above the region where the holding portion is provided. The cushioning material according to claim 1,
The cushioning material, wherein the upper rib has a cross shape in plan view. The cushioning material according to claim 2,
The cushioning material, wherein the upper side rib is provided with an upper side hole at a crossing portion. The shock-absorbing material according to any one of claims 1 to 3,
The storage container includes at least a pair of legs provided on the bottom surface so as to protrude from the bottom surface,
The cushioning material has a lower cushioning material provided with a lower storage portion that comes into contact with the bottom surface,
The lower storage portion includes a lower facing surface that is separated from the leg portion and faces the bottom surface of the storage container, and a lower-side rib that protrudes from the lower facing surface and contacts the bottom surface of the storage container. A cushioning material. The cushioning material according to claim 4,
The cushioning material has a middle cushioning material in contact with the lid and the bottom surface,
The middle cushioning material is a plate-shaped middle cushioning material body,
A middle lid storage provided on the bottom surface of the middle cushioning material main body, having a lid facing surface facing away from the top surface of the lid, and a lid side rib protruding from the lid facing surface and contacting the top surface of the lid And
A bottom surface provided on the top surface of the middle cushioning material body, spaced apart from the leg and facing the bottom surface of the storage container, and a bottom surface side protruding from the bottom surface and contacting the bottom surface of the storage container A middle bottom receiving portion having a rib;
With
The cushioning material, wherein the lid-side rib is provided at a position in contact with at least an upper surface region of the lid located immediately above a region where the holding portion is provided. The cushioning material according to claim 5,
A cushioning material, wherein a plurality of sets of the upper storage unit, the lower storage unit, the middle lid storage unit, and the middle bottom storage unit are arranged.   It is a shock absorbing material as described in any one of Claims 1-6, Comprising: It is comprised with a foam whose expansion ratio is 20 times or more and 40 times or less, The shock absorbing material characterized by the above-mentioned.   The shock-absorbing material according to any one of claims 1 to 7, wherein the shock-absorbing material is made of any of polyurethane foam, polyethylene foam, polypropylene foam, or polystyrene foam. When packing a storage container for storing a semiconductor wafer in a packing case, a cushioning material disposed between the storage container and the packing case,
The storage container is
A box-shaped main body with an open upper surface, a lid that closes the upper surface, a back side of the lid, abuts on an upper peripheral edge of the semiconductor wafer housed in the main body, and restricts movement of the semiconductor wafer Holding part to
And at least a pair of legs provided at the end of the bottom so as to protrude from the bottom,
The cushioning material has a middle cushioning material in contact with the top surface of the lid and the bottom surface of the storage container,
The middle cushioning material is a plate-shaped middle cushioning material body,
A middle lid storage portion provided on the bottom surface of the middle cushioning material main body, having a lid facing surface that is spaced apart from the upper surface of the lid, and a lid-side rib that protrudes from the lid facing surface and contacts the upper surface of the lid When,
A bottom surface provided on the top surface of the middle cushioning material body, spaced apart from the leg and facing the bottom surface of the storage container, and a bottom surface side protruding from the bottom surface and contacting the bottom surface of the storage container A middle bottom receiving portion having a rib;
With
The cushioning material, wherein the lid-side rib is provided at a position in contact with at least an upper surface region of the lid located immediately above a region where the holding portion is provided.

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