JP6849047B2 - Cushioning material - Google Patents

Description

The present invention relates to a cushioning material.

When transporting semiconductor wafers, a plurality of semiconductor wafers are stored in a storage container, packed in a packing case, and then the packing case is transported by a transport device.
During transportation, an external force such as an impact force may act on the storage container, such as when the packing case falls from the transport device. Therefore, a structure is required in which the semiconductor wafer is not deformed or damaged by an external force. As such a structure, there is a structure in which a cushioning material is provided between the storage container and the packing case.

Patent Document 1 describes a storage box for storing a package, an individual pallet on which the package is mounted, and a package provided with a foam material as a cushioning material that contacts at least one of the package and the individual pallet. ing.
Patent Document 1 also describes that an individual pallet is made of a foam material having excellent cushioning ability such as polyolefin, polystyrene, and polyurethane to serve as a cushioning material.

Patent Document 2 describes a structure in which a substrate storage container for storing a semiconductor wafer is mounted on a pallet, in which an elastic buffer is provided on a mounting surface of the pallet.
Patent Document 2 states that an elastic buffer having a shore 00 hardness of 20 ° to 120 ° is preferable. Specific examples include elastomers and rubbers.

In Patent Document 3, a plurality of inner foam cushioning materials that adhere to and protect the omnidirectional surfaces of the semiconductor storage container, a cardboard box that stores the semiconductor storage container, and between the inner foam cushioning material and the inner surface of the cardboard box are provided. A package having a plurality of viscoelastic solid cushioning materials is described.

Patent Document 4 describes a structure in which a bottom plate is provided between a semiconductor wafer case and a pallet. The bottom plate is a cushioning material in which a columnar elastic body is sandwiched between two synthetic resin cardboard boxes.
Patent Document 4 describes that a cushioning material made of Styrofoam may be used instead of the bottom plate. A structure in which a lid is provided on the upper surface of the semiconductor wafer case and sponge-like polyurethane is provided on the back surface of the lid to absorb impact is also described.

Patent Document 5 describes a package in which an upper buffer and a lower buffer are provided so as to sandwich the upper and lower sides of the wafer storage container.
The upper shock absorber is provided with an upper recess for accommodating the upper portion of the wafer storage container and a pressing rib provided on the outer periphery of the upper recess and in contact with the upper end surface of the wafer storage container.
A shock absorbing protrusion is provided on the bottom surface of the lower buffer. When the container containing the wafer storage container falls and collides with the floor, the impact absorbing protrusion is crushed by the impact of the collision, so that the impact energy is absorbed and the impact is not transmitted to the semiconductor wafer.

Japanese Unexamined Patent Publication No. 2014-5078 Japanese Unexamined Patent Publication No. 2013-249126 JP-A-2010-132331 Japanese Unexamined Patent Publication No. 2011-016549 Japanese Unexamined Patent Publication No. 2014-151963

The storage container is provided with a holding portion such as a groove or a protrusion inside in order to hold the semiconductor wafers so that they do not come into contact with each other and do not move in the container.
The outer shape of the storage container is not limited to a simple box shape. There is a structure provided with an arc-shaped portion along the shape of the semiconductor wafer to be stored and a leg portion for preventing one-sided contact of the bottom surface when the storage container is placed.
Therefore, the location of the storage container that is likely to deform or damage the semiconductor wafer when an impact is applied depends on the internal structure and outer shape.
Further, if the cushioning material is provided, the weight and volume of the package increase and the workability deteriorates, so it is necessary to pay attention to the position and dimensions.

However, in the structures described in Patent Documents 1 to 5, a cushioning material is provided without distinguishing between a portion having a high possibility of deforming / damaging the semiconductor wafer and a portion having a low possibility of deforming / damaging the semiconductor wafer, as described below. Therefore, there is a problem that the semiconductor wafer cannot be protected against an external force or the workability may be deteriorated.

In the structures described in Patent Documents 1 and 4, the position where the storage box and the cushioning material come into contact is the entire top surface or bottom surface, and there is no distinction between a portion having a high possibility of deforming / damaging the semiconductor wafer and a portion having a low possibility of deforming / damaging the semiconductor wafer.

The structure described in Patent Document 2 is a structure in which flat rectangular elastic buffers are provided on the pallet at regular intervals, and does not distinguish between a portion having a high possibility of deforming / damaging the semiconductor wafer and a portion having a low possibility of deforming / damaging the semiconductor wafer.

The structure described in Patent Document 3 is a structure in which a cushioning material is brought into close contact with the omnidirectional surface of the storage box, and does not distinguish between a portion having a high possibility of deforming / damaging the semiconductor wafer and a portion having a low possibility of deforming / damaging the semiconductor wafer. With such a structure, the weight and volume of the storage box increase, and workability deteriorates.

In the structure described in Patent Document 5, the positional relationship between the upper surface rib and the storage box is specified, but this is a structure that prevents the lid from coming into contact with the rib to prevent the lid from vibrating, and deforms the semiconductor wafer. -It is not a structure that protects parts that are likely to be damaged.
In the structure described in Patent Document 5, although the position and shape of the shock absorbing protrusions are specified, they are provided on the outside so as not to come into contact with the storage box, and protect the parts that are likely to deform or damage the semiconductor wafer. It is not a structure to do.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a cushioning material having a structure capable of protecting a portion having a high possibility of deforming or damaging a semiconductor wafer and having an excellent work efficiency.

The cushioning material according to the present invention is a plate-shaped cushioning material arranged between the plurality of storage containers and the packing case when a plurality of storage containers for storing semiconductor wafers are packed in a packing case. Each of the storage containers is provided with a box-shaped main body having an open upper surface, a lid for closing the upper surface, and an upper peripheral edge of the semiconductor wafer housed in the main body, which is provided on the back side of the lid. The cushioning material includes a holding portion for restricting the movement of the semiconductor wafer, and the cushioning material has an upper cushioning material in which a plurality of upper storage portions in contact with the upper surface of the lid are linearly arranged. The portion is provided on the bottom surface of the upper cushioning material, and has an upper facing surface that is separated from the upper surface of the lid and faces the upper surface, and an upper rib that protrudes from the upper facing surface and contacts the upper surface of the lid. The upper rib is characterized in that it has a cross-shaped plane shape and is provided at a position where it comes into contact with at least an upper surface region of the lid located immediately above the region where the holding portion is provided.

According to the present invention, an upper rib is provided on the upper cushioning material so as to hold the holding portion. The holding portion is a portion where the semiconductor wafer and the storage container come into contact with each other, and there is a high possibility that the semiconductor wafer will be deformed or damaged when an impact is applied. Therefore, by providing the upper rib so as to hold down the holding portion, it is possible to preferentially protect the portion where the semiconductor wafer is likely to be deformed or damaged in the event of an impact.

In addition, since the upper rib is cross-shaped, the upper rib is located at a position where the holding portion can be held even if the installation angle of the cushioning material on the plane is deviated by 90 ° with respect to the storage container. The degree of freedom of the position when providing the container can be increased, and the work efficiency is excellent.

In the cushioning material according to the present invention, it is preferable that the upper rib is provided with an upper hole at the intersection of the crosses.
According to the present invention, the storage container can be visually recognized from the hole even when the cushioning material is in contact with the storage container. Therefore, it can be easily confirmed whether the cushioning material is securely held in the storage container. Further, since the cushioning material can be easily removed from the storage container by grasping the inner circumference of the hole, the work efficiency is excellent.

In the cushioning material according to the present invention, the storage container includes at least a pair of legs provided on the bottom surface so as to project from the bottom surface, and the cushioning material has a linear lower storage portion in contact with the bottom surface. A plurality of lower cushioning materials are provided, and each of the lower cushioning materials is provided on an upper surface of the lower cushioning material, and is separated from the legs and faces the bottom surface of the storage container. It is preferable to provide a facing surface and a lower rib that protrudes from the lower facing surface and contacts the bottom surface of the storage container.

According to the present invention, the legs are separated from the lower facing surface in a state where the lower rib is in contact with the bottom surface of the storage container. Therefore, it is possible to prevent the bottom surface of the storage container from floating from the lower rib when the legs come into contact with the lower facing surface, and the bottom surface of the storage container can be reliably protected.
Further, since a plurality of storage containers can be protected by one set of upper cushioning material and lower cushioning material, the work efficiency at the time of transportation and packaging is excellent.

The cushioning material according to the present invention is preferably composed of a foam having a foaming ratio of 20 times or more and 40 times or less.
According to the present invention, since the cushioning material is made of a foam having a foaming ratio of 20 times or more and 40 times or less, it is possible to achieve both hardness that can withstand an external impact and softness that absorbs the impact.

The cushioning material according to the present invention is preferably composed of either polyurethane foam, polyethylene foam, polypropylene foam, or polystyrene foam.
According to the present invention, the cushioning material can be easily formed into a foam having a foaming ratio of 20 times or more and 40 times or less.

The perspective view which shows the state which provided the shock absorber in the storage container. FIG. 1A1-A1 cross-sectional view of FIG. It is a part of the cross-sectional view of A2-A2 of FIG. 1, and the storage container is shown in the side view. Perspective view of the storage container. (A) is a top view of the storage container, and (B) is a back view of the lid. It is a figure which shows the upper buffer body, (A) is a perspective view seen from the bottom surface side, (B) is a bottom view, (C) is a cross-sectional view of A3-A3 of (B). It is a figure which shows the lower buffer, (A) is a perspective view, (B) is a top view, (C) is an A4-A4 sectional view of (B). It is a figure which shows the central buffer, (A) is a perspective view, (B) is a bottom view. It is a figure which shows the central part buffer, (A) is the top view, (B) is the A5-A5 sectional view of (A).

Hereinafter, embodiments suitable for the present invention will be described in detail with reference to the drawings.
First, with reference to FIGS. 1 to 3, the schematic configuration of the cushioning material according to the present embodiment will be briefly described.

As shown in FIGS. 1 to 3, the cushioning material 100 is a cushioning material arranged between the storage container 7 and the packing case when the storage container 7 is packed in a packing case (not shown), and the upper cushioning material 1 , Lower cushioning material 3, and middle cushioning material 5.
In FIG. 1, three upper storage containers 7 are provided between the upper cushioning material 1 and the middle cushioning material 5, and three lower storage containers 7 are provided between the middle cushioning material 5 and the lower cushioning material 3.
The cushioning material 100 further includes a vibration absorbing material 9 provided on the bottom surface of the lower cushioning material 3.
The above is a description of the schematic configuration of the cushioning material 100 according to the present embodiment.

Next, the details of the configuration of the storage container 7 and the cushioning material 100 according to the present embodiment will be described.

First, the structure of the storage container 7 will be described with reference to FIGS. 2, 4, and 5.
The storage container 7 is a container for storing the semiconductor wafer 200 shown in FIG. 2, and is, for example, a FOSB (Front Opening Shipping Box). As shown in FIG. 4, the storage container 7 has a box-shaped main body 81 having an open upper surface and a lid 83 that closes the upper surface.

The main body 81 includes legs 87.
The legs 87 are at least a pair of legs provided at the ends of the bottom surface 86 so as to project from the bottom surface 86 of the main body 81. Here, one is provided at each of the four corners.

As shown in FIGS. 2 and 4, a comb-shaped wafer storage portion 85 having a storage groove for storing a plurality of semiconductor wafers 200 at intervals is provided in the main body 81 of the storage container 7. Be done.
The wafer accommodating portion 85 is composed of a side accommodating portion 85A that contacts the outer edge side portion of the semiconductor wafer 200 and a bottom accommodating portion 85B that contacts the outer edge bottom portion of the semiconductor wafer 200.
Here, a pair of side storage portions 85A are provided on the opposite inner peripheral side surfaces of the main body 81. Two bottom storage portions 85B are provided directly above the bottom surface 86. The two side accommodating portions 85A are arranged parallel to each other in the arrangement direction of the grooves.
The lid 83 is a plate-shaped member having a rectangular planar shape, and has a pair of lock portions 89 and a holding portion 91 as shown in FIGS. 4 and 5.

The lock portion 89 is a member that fixes the lid 83 to the main body 81, and has lock rods 89A and 89B and a lock lever 89C as shown in FIG.

The lock rods 89A and 89B are members provided along the opposite sides of the lid 83, and can move in the directions D1 and D2 of FIG.

The lock lever 89C is a lever protruding from the side surface of the lock portion 89.
By pushing the lock lever 89C toward the lock portion, the lock rod 89A is moved in the direction of D1 and the lock rod 89B is moved in the direction of D2, and is pushed out of the lid 83. The tips of the extruded lock rods 89A and 89B engage with the recess 81A of the main body 81, and lock and fix the lid 83 to the main body 81. By returning the position of the lock lever 89C to the original position in the locked state, the lock rods 89A and 89B are pulled back to the inside of the lid 83 to release the lock.

As shown in FIG. 5, the holding portion 91 is a vertically long comb-shaped member provided on the back side of the lid 83, and is provided between the lock portions 89. The holding portion 91 moves the semiconductor wafer 200 in the axial direction or rotates in the radial direction by inserting the upper peripheral edge of the semiconductor wafer 200 housed in the main body 81 between the teeth of the comb and bringing them into contact with each other. Regulate and keep the semiconductor wafers 200 out of contact with each other.
In FIG. 5, the holding portion 91 is provided in the central portion of the lid 83 in parallel with the arrangement direction (longitudinal direction) of the semiconductor wafer 200 so as to be parallel to one of the sides forming the rectangle of the lid 83. ..
The above is the description of the structure of the storage container 7.

Next, the structure of the upper cushioning material 1 will be described with reference to FIGS. 2 and 6.
The upper cushioning material 1 is a cushioning material provided on the upper surface of the upper storage container 7, and is a plate material having a rectangular planar shape. As shown in FIG. 6, the upper cushioning material 1 includes upper storage portions 13A, 13B, and 13C that come into contact with the lid 83 of the storage container 7.

The upper storage portions 13A, 13B, and 13C are recesses provided on the bottom surface of the upper cushioning material 1 and fitted into and held at the upper end of the storage container 7. Here, the concave portion has a rectangular planar shape. The upper storage portions 13A, 13B, and 13C include an upper facing surface 14, upper ribs 15, 17, upper holes 19, and reinforcing ribs 21.

The upper facing surface 14 is a surface facing away from the lid 83 of the storage container 7, and is the bottom surface of the upper storage portions 13A, 13B, and 13C.
The upper ribs 15 and 17 are vertically long ribs protruding from the upper facing surface 14, and at least one of them is in contact with the upper surface of the lid 83 and is located directly above the region where the holding portion 91 is provided. , Is provided at a position in contact with the upper surface region of the lid 83 (here, the region surrounded by the dotted line indicated by reference numeral 91 in FIG. 5).
Here, as shown in FIG. 2, the upper rib 17 is provided at a position in contact with the upper surface region of the lid 83, which is located directly above the region where the holding portion 91 is provided. Further, the upper rib 17 is provided at a position where its extending direction (longitudinal direction) coincides with the extending direction of the holding portion 91.
Since the holding portion 91 is a member that holds the semiconductor wafer 200 and has a high possibility of deforming or damaging the semiconductor wafer 200 at the time of impact, the holding portion 91 is given priority by pressing the holding portion 91 by the upper rib 17. Can be protected.

The upper rib 15 and the upper rib 17 are provided so as to be orthogonal to each other, and the upper rib 15 and the upper rib 17 have a cross-shaped planar shape. Due to the cross shape, one of the upper ribs 15 and 17 is positioned at a position where the holding portion 91 can be held even if the installation angle of the upper cushioning material 1 on the plane is deviated by 90 °.
Therefore, the degree of freedom of the position when the upper cushioning material 1 is provided can be increased, and the work efficiency is excellent.

The upper side hole 19 is a through hole provided at the intersection of the crosses of the upper side ribs 15 and 17.
The upper side hole 19 is used to visually recognize the upper surface of the storage container 7 in a state where the upper cushioning material 1 is provided in the storage container 7. The upper side hole 19 is also used as a substitute for a handle when removing the upper cushioning material 1 from the storage container 7. Specifically, the upper cushioning material 1 can be easily removed by grasping the inner circumference of the upper side hole 19.

The reinforcing rib 21 is an L-shaped rib provided so as to connect the adjacent side surfaces of the upper storage portions 13A, 13B, 13C, and reinforces the side surfaces of the upper storage portions 13A, 13B, 13C.
The above is the description of the structure of the upper cushioning material 1.

Next, the structure of the lower cushioning material 3 will be described with reference to FIGS. 2, 3 and 7.
The lower cushioning material 3 is a cushioning material provided on the bottom surface of the lower storage container 7, and is a plate material having a rectangular planar shape. The lower cushioning material 3 includes lower storage portions 31A, 31B, and 31C that come into contact with the bottom surface of the storage container 7.

The lower storage portions 31A, 31B, and 31C are recesses having a shape that fits into and is held at the lower end of the storage container 7. Here, the concave portion has a rectangular planar shape. The lower storage portions 31A, 31B, and 31C are provided with a lower facing surface 33, a lower rib 35, and a lower hole 37.
The lower facing surface 33 is a surface that is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and is the bottom surface of the lower storage portions 31A, 31B, and 31C.

As shown in FIGS. 2 and 3, since the leg portion 87 is provided so as to straddle the lower rib 35, the lower rib 35 does not come into contact with the bottom surface of the leg 87.
Since the lower facing surface 33 is separated from the leg portion 87, as shown in FIGS. 2 and 3, the height H1 of the lower rib 35 is such that the leg portion 87 is in contact with the bottom surface 86 of the storage container 7. It is a height separated from the facing surface 33.
Therefore, it is possible to prevent the leg portion 87 from coming into contact with the lower facing surface 33 and the bottom surface 86 of the storage container 7 from floating from the lower rib 35, and the bottom surface 86 of the storage container 7 can be reliably protected.

The lower rib 35 is a rib protruding from the lower facing surface 33, and is provided at a position where it comes into contact with the bottom surface 86 of the storage container 7, as shown in FIGS. 2 and 3.
The lower rib 35 is preferably provided at a position facing the bottom storage portion 85B (here, directly below). The reason is as follows.
In FIGS. 2 and 3, since the bottom storage portion 85B is provided directly above the bottom surface 86, when an impact is applied to the bottom surface 86, the impact is transmitted to the bottom storage portion 85B, which deforms and damages the semiconductor wafer 200. there is a possibility. Therefore, by providing the lower rib 35 at a position facing the bottom storage portion 85B, the bottom storage portion 85B can be pressed via the bottom surface 86. As a result, the bottom storage portion 85B can be preferentially protected, which is preferable.

The lower side hole 37 is a through hole provided in the lower rib 35, and is used for visually recognizing the bottom surface of the storage container 7 in a state where the lower cushioning material 3 is provided in the storage container 7. The lower side hole 37 is also used as a substitute for a handle when removing the lower cushioning material 3 from the storage container 7. Specifically, the lower cushioning material 3 can be easily removed by grasping the inner circumference of the upper side hole 19.
The above is the description of the structure of the lower cushioning material 3.

Next, the structure of the central cushioning material 5 will be described with reference to FIGS. 2, 3, 8, and 9.
The central cushioning material 5 is a cushioning material provided on the bottom surface of the upper storage container 7 and the upper surface of the lower storage container 7, and includes a plate-shaped central cushioning material main body 51.

The central cushioning material main body 51 has central lid storage portions 53A, 53B, and 53C on the bottom surface.
The central lid storage portions 53A, 53B, and 53C are recesses that are fitted and held in the upper end of the storage container 7. Here, the concave portion has a rectangular planar shape.
The central lid accommodating portions 53A, 53B, and 53C include a lid facing surface 54, a lid side rib 55, 57, a lid side hole 59, and a lid side reinforcing rib 61.

The lid facing surface 54 is a surface facing the lid 83 of the storage container 7, and is the bottom surface of the middle lid storage portions 53A, 53B, and 53C.
The lid-side ribs 55 and 57 are ribs protruding from the lid facing surface 54, and at least one of them is in contact with the upper surface of the lid 83 and is located directly above the region where the holding portion 91 is provided. It is provided at a position where it comes into contact with the upper surface region of 83. Here, as shown in FIG. 2, the lid side rib 57 is provided at a position in contact with the upper surface region of the lid 83, which is located directly above the region where the holding portion 91 is provided. Further, the lid side rib 57 is provided at a position where its extending direction (longitudinal direction) coincides with the extending direction of the holding portion 91.
Therefore, similarly to the upper rib 17, the lid side rib 57 presses the holding portion 91, so that the holding portion 91 can be preferentially protected.

The lid-side rib 55 and the lid-side rib 57 are provided so as to intersect each other, and the lid-side rib 55 and the lid-side rib 57 have a cross-shaped planar shape.
Due to the cross shape, one of the lid side ribs 55 and 57 is positioned at a position where the holding portion 91 can be held even if the installation angle of the central cushioning material 5 on the plane is deviated by 90 °.

The lid-side hole 59 is a through hole provided at the intersection of the crosses of the lid-side ribs 55 and 57, and is also used as a substitute for a handle when removing the central cushioning material 5 from the storage container 7.
The lid side reinforcing rib 61 is an L-shaped rib provided so as to connect the adjacent side surfaces of the middle lid storage portions 53A, 53B, 53C, and reinforces the side surfaces of the middle lid storage portions 53A, 53B, 53C. ..

The central cushioning material main body 51 has central bottom surface storage portions 71A, 71B, and 71C on the upper surface.
The central bottom bottom storage portions 71A, 71B, and 71C are recesses having a shape that fits into and is held at the lower end of the storage container 7. Here, the concave portion has a rectangular planar shape. The central bottom surface storage portions 71A, 71B, and 71C are provided with a bottom surface facing surface 73 and a bottom surface side rib 75.

The bottom surface facing surface 73 is a surface that is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and is the bottom surface of the middle bottom surface storage portions 71A, 71B, and 71C.
The bottom surface side rib 75 is a rib protruding from the central bottom surface storage portions 71A, 71B, and 71C, and is provided at a position where it comes into contact with the bottom surface 86 of the storage container 7 as shown in FIGS. 2 and 3.
Since the bottom surface facing surface 73 is separated from the leg portion 87, as shown in FIGS. 2 and 3, the height H2 of the bottom surface side rib 75 is such that the leg portion 87 is in contact with the bottom surface 86 of the storage container 7. It is a height separated from the facing surface 73.
Therefore, it is possible to prevent the leg portion 87 from coming into contact with the bottom surface facing surface 73 and the bottom surface 86 of the storage container 7 from floating from the lower rib 35, and the bottom surface 86 of the storage container 7 can be reliably protected.
The above is the description of the structure of the central cushioning material 5.

Next, the material constituting the cushioning material 100 will be described.
The cushioning material 100 needs to have a hardness that can withstand an impact from the outside without being damaged, and a softness that can absorb the impact and prevent the impact from being transmitted to the storage container 7. As a material satisfying such requirements, a foam having a foaming ratio of 20 times or more and 40 times or less is preferable.
Specific foams include polyurethane foam, polyethylene foam, polypropylene foam, and polystyrene foam.
The above is the description of the material constituting the cushioning material 100.

Next, the structure of the vibration absorbing material 9 will be described with reference to FIGS. 2 and 3.
The vibration absorbing material 9 is a member that absorbs vibration generated when the storage container 7 is placed on the floor in a state of being packed with the cushioning material 100, and includes plate materials 9A, 9B, and an elastic body 9C.
The plate members 9A and 9B are members that are provided so as to face each other and come into contact with the cushioning material and the floor, respectively. The plate materials 9A and 9B are made of, for example, plastic plates.
The elastic body 9C is a member that absorbs vibration by elastically deforming with respect to vibration, and is provided so as to be sandwiched between the plate members 9A and 9B. The elastic body 9C is composed of, for example, polyurethane, synthetic rubber, or polyethylene.
The above is the description of the structure of the vibration absorber 9.

The above is a detailed description of the configuration of the cushioning material 100 and the storage container 7 according to the present embodiment.

As described above, according to the present embodiment, the cushioning material 100 has the upper cushioning material 1, and the upper cushioning material 1 is in contact with the lid 83, and in the contacted state, at least the region where the holding portion 91 is provided. The upper rib 17 is provided at a position directly above the lid 83 so as to come into contact with the upper surface region of the lid 83.
Therefore, when the upper cushioning material 1 is provided in the storage container 7, the upper rib 17 can hold the holding portion 91, and the holding portion 91, which is highly likely to deform or damage the semiconductor wafer 200 at the time of impact, is prioritized. Can be protected.

According to the present embodiment, since the upper ribs 15 and 17 have a cross-shaped plane shape, the holding portion is held even if the installation angle of the upper cushioning material 1 on the plane is deviated by 90 ° with respect to the storage container 7. Either the upper ribs 15 or 17 is located at a position where the 91 can be pressed.
Therefore, the degree of freedom of the position when the upper cushioning material 1 is provided can be increased, and the work efficiency is excellent.

According to the present embodiment, since the upper side hole 19 is provided at the intersection of the upper side ribs 15 and 17, and the cross, the storage container is provided from the upper side hole 19 even when the upper cushioning material 1 is in contact with the storage container 7. 7 can be visually recognized.
Therefore, it can be easily confirmed whether the upper cushioning material 1 is securely held in the storage container 7. Further, when the upper cushioning material 1 is removed from the storage container 7, the upper cushioning material 1 can be easily removed from the storage container 7 by grasping the inner circumference of the upper side hole 19 instead of the handle, which is excellent in work efficiency.

According to the present embodiment, the cushioning material 100 has a lower cushioning material 3, and the lower cushioning material 3 has a lower facing surface 33 which is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and a storage container. A lower rib 35 that comes into contact with the bottom surface 86 of 7 is provided.
Therefore, it is possible to prevent the leg portion 87 from coming into contact with the lower facing surface 33 and the bottom surface 86 of the storage container 7 from floating from the lower rib 35, and the bottom surface 86 of the storage container 7 can be reliably protected.

According to the present embodiment, the cushioning material 100 has the central cushioning material 5, and the central cushioning material 5 is in contact with the lid 83 and is located at least directly above the region where the holding portion 91 is provided in the contacted state. The lid side rib 57 is provided at a position where the lid 83 comes into contact with the upper surface region.
Therefore, when the central cushioning material 5 is provided in the storage container 7, the lid side rib 57 can hold the holding portion 91, and the holding portion 91, which is highly likely to deform or damage the semiconductor wafer 200 at the time of impact, is prioritized. Can be protected.

Further, the central cushioning material 5 includes a bottom surface facing surface 73 that is separated from the leg portion 87 and faces the bottom surface 86 of the storage container 7, and a bottom surface side rib 75 that contacts the bottom surface 86 of the storage container 7.
Therefore, it is possible to prevent the leg portion 87 from coming into contact with the bottom surface facing surface 73 and the bottom surface 86 of the storage container 7 from floating from the bottom surface side rib 75, and the bottom surface 86 of the storage container 7 can be reliably protected.

Further, since the central cushioning material 5 includes both lid-side ribs 55 and 57 and bottom-side ribs 75, it is provided on both the upper surface and the bottom surface of the storage container 7.
Therefore, the central cushioning material 5 can also be used as the upper cushioning material 1 and the lower cushioning material 3. Further, the storage container 7 can be stored in multiple stages in the height direction.

According to the present embodiment, the cushioning material 100 is composed of a foam having a foaming ratio of 20 times or more and 40 times or less. Therefore, it is possible to achieve both hardness that can withstand an external impact and softness that absorbs the impact.

According to the present embodiment, the cushioning material 100 is made of either polyurethane foam, polyethylene foam, polypropylene foam, or polystyrene foam.
Therefore, the cushioning material 100 can be easily formed into a foam having a foaming ratio of 20 times or more and 40 times or less.

According to the present embodiment, in the cushioning material 100, the upper storage portions 13A, 13B, 13C, the lower storage portions 31A, 31B, 31C, the middle lid storage portions 53A, 53B, 53C, and the middle bottom bottom storage portions 71A, 71B, 71C are Multiple sets are arranged. Here, three sets are arranged.
Therefore, since one set of the upper cushioning material 1, the lower cushioning material 3, and the middle cushioning material 5 can protect four or more (six in this case) storage containers 7, the work efficiency at the time of transportation and packing is excellent.

Although the present invention has been described above based on the embodiments, the present invention is not limited to the above embodiments. It is natural for a person skilled in the art to come up with various modifications and improvements within the scope of the idea of the present invention, and these are also included in the scope of the present invention.

1 ... Upper cushioning material, 3 ... Lower cushioning material, 5 ... Middle cushioning material, 7 ... Storage container, 13A, 13B, 13C ... Upper storage part, 14 ... Upper facing surface, 15, 17 ... Upper rib, 19 ... Upper Side holes, 31A, 31B, 31C ... Lower storage part, 33 ... Lower facing surface, 35 ... Lower rib, 51 ... Middle cushioning material body, 53A, 53B, 53C ... Middle lid storage part, 54 ... Lid facing surface, 55 , 57 ... lid side rib, 59 ... lid side hole, 71A, 71B, 71C ... middle bottom bottom storage part, 73 ... bottom facing surface, 75 ... bottom side rib, 81 ... main body, 83 ... lid, 85 ... wafer storage part, 86 ... bottom surface, 87 ... legs, 91 ... holding part, 100 ... cushioning material.

Claims (5)

A plate-shaped cushioning material arranged between the plurality of storage containers and the packing case when a plurality of storage containers for storing semiconductor wafers are packed in a packing case.
Each said storage container
A box-shaped main body with an open upper surface, a lid that closes the upper surface, and an upper peripheral edge of the semiconductor wafer provided on the back side of the lid and housed in the main body are brought into contact with each other to regulate the movement of the semiconductor wafer. With a holding part,
The cushioning material has an upper cushioning material in which a plurality of upper storage portions in contact with the upper surface of the lid are linearly arranged.
Each of the upper storage portions is provided on the bottom surface of the upper cushioning material.
An upper facing surface that is separated from the upper surface of the lid and faces the upper surface, and an upper rib that projects from the upper facing surface and contacts the upper surface of the lid.
With
The upper rib has a cross-shaped plane shape, and is provided at a position in contact with an upper surface region of the lid located at least directly above the region where the holding portion is provided. .. The cushioning material according to claim 1.
The upper rib is a cushioning material, characterized in that an upper hole is provided at an intersection of crosses. The cushioning material according to claim 1 or 2.
The storage container includes at least a pair of legs provided on the bottom surface so as to project from the bottom surface.
The cushioning material has a lower cushioning material in which a plurality of lower storage portions in contact with the bottom surface are linearly arranged.
Each of the lower storage portions is provided on the upper surface of the lower cushioning material.
A cushioning material provided with a lower facing surface that is separated from the legs and faces the bottom surface of the storage container, and a lower rib that projects from the lower facing surface and contacts the bottom surface of the storage container. .. The cushioning material according to any one of claims 1 to 3, wherein the cushioning material is composed of a foam having a foaming ratio of 20 times or more and 40 times or less. The cushioning material according to any one of claims 1 to 4, wherein the cushioning material is made of any one of polyurethane foam, polyethylene foam, polypropylene foam, and polystyrene foam.

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