JP2018098478A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2018098478A JP2018098478A JP2017053220A JP2017053220A JP2018098478A JP 2018098478 A JP2018098478 A JP 2018098478A JP 2017053220 A JP2017053220 A JP 2017053220A JP 2017053220 A JP2017053220 A JP 2017053220A JP 2018098478 A JP2018098478 A JP 2018098478A
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Abstract
【解決手段】半導体装置は、基材110と、チャネル層120と、バリア層130と、溝と、電荷トラップ層220と、強誘電体材料230と、ゲート250と、ソースSと、ドレインDと、を含む。チャネル層120は、基材110に配置される。バリア層130は、チャネル層120に配置される。バリア層130は溝を有し、且つ、溝の下方のバリア層130は、厚さを有する。ドレインDとソースSは、バリア層130に配置される。電荷トラップ層220は、溝の底面を覆う。強誘電体材料230は、電荷トラップ層220に配置される。ゲート250は、強誘電体材料230に設けられる。
【選択図】図4A
Description
112 基板
114 緩衝層
120 チャネル層
130 バリア層
210 第1の誘電体層
220 電荷トラップ層
230 強誘電体材料
240 第2の誘電体層
250 ゲート
260 パッシペーション層
R 溝
S ソース
D ドレイン
W 幅
d1 深さ
d2 厚さ
Claims (10)
- 基材と
前記基材に配置されるチャネル層と
前記チャネル層に配置され、溝を有するバリア層と、
前記バリア層に配置されるドレインとソースと、
前記溝の底面を覆う電荷トラップ層と、
前記電荷トラップ層に配置される強誘電体材料と、
前記強誘電体材料に配置されるゲートと、を含み、
前記溝の下方の前記バリア層は、厚さを有する半導体装置。 - 前記溝の前記底面と前記電荷トラップ層との間に配置される第1の誘電体層を更に含む請求項1に記載の半導体装置。
- 前記強誘電体材料と前記ゲートとの間に配置される第2の誘電体層を更に含む請求項2に記載の半導体装置。
- 前記第1の誘電体層は、7−12eVであるバンドギャップ(bandgap)を有する請求項2に記載の半導体装置。
- 前記厚さは、5−15nmである請求項1に記載の半導体装置。
- 前記強誘電体材料は、BaTiO3、KH2PO4、HfZrO2、SrBi2Ta2O9又はPbZrTiO3である請求項1に記載の半導体装置。
- 基材を提供することと、
チャネル層を前記基材に形成することと、
バリア層を前記チャネル層に形成することと、
ソースとドレインを前記バリア層に形成することと、
底面を有する溝を前記バリア層の中に形成し、前記溝の下方の前記バリア層が厚さを有することと、
前記溝の前記底面を覆うように電荷トラップ層を形成することと、
強誘電体材料を前記電荷トラップ層に形成することと、
前記強誘電体材料を前記強誘電体材料の結晶温度よりも大きい第1の温度に加熱することと、
前記強誘電体材料を第2の温度に降温させて、前記強誘電体材料を結晶させることと、
ゲートを前記強誘電体材料に形成することと、
を含む半導体装置の製造方法。 - 溝を前記バリア層に形成した後に、前記溝を覆う前記底面に、第1の誘電体層を形成することを更に含む請求項7に記載の方法。
- 前記強誘電体材料を形成する方法は、プラズマ強化原子層堆積、有機金属化学気相蒸着、化学気相蒸着、物理気相蒸着、スパッタリング又はパルスレーザ蒸着を含む請求項7に記載の方法。
- 前記第1の温度は400−600℃である請求項7に記載の方法。
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US11621345B2 (en) * | 2018-08-14 | 2023-04-04 | Pawan Tyagi | Systems and methods of fabricating gate electrode on trenched bottom electrode based molecular spintronics device |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05235370A (ja) * | 1992-02-24 | 1993-09-10 | Rohm Co Ltd | 電界効果トランジスタ |
JP2009004743A (ja) * | 2007-05-18 | 2009-01-08 | Sanken Electric Co Ltd | 電界効果半導体装置 |
JP2013055148A (ja) * | 2011-09-01 | 2013-03-21 | Fujitsu Ltd | 半導体装置 |
JP2013131736A (ja) * | 2011-11-22 | 2013-07-04 | Renesas Electronics Corp | 半導体装置および半導体装置の製造方法 |
JP2013168433A (ja) * | 2012-02-14 | 2013-08-29 | Toshiba Corp | 窒化物半導体装置および窒化物半導体装置の製造方法 |
JP2014099517A (ja) * | 2012-11-14 | 2014-05-29 | Renesas Electronics Corp | 半導体装置の製造方法及び半導体装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19946437A1 (de) * | 1999-09-28 | 2001-04-12 | Infineon Technologies Ag | Ferroelektrischer Transistor |
US7221586B2 (en) * | 2002-07-08 | 2007-05-22 | Micron Technology, Inc. | Memory utilizing oxide nanolaminates |
US7932539B2 (en) | 2005-11-29 | 2011-04-26 | The Hong Kong University Of Science And Technology | Enhancement-mode III-N devices, circuits, and methods |
JP2011523200A (ja) * | 2008-04-15 | 2011-08-04 | クナノ アーベー | ナノワイヤラップゲートデバイス |
WO2011039800A1 (ja) * | 2009-09-29 | 2011-04-07 | 株式会社 東芝 | 半導体装置 |
CN101916782A (zh) * | 2010-08-12 | 2010-12-15 | 复旦大学 | 使用铁电材料的凹陷沟道型晶体管及其制造方法 |
CN102299176B (zh) * | 2011-08-30 | 2013-04-03 | 电子科技大学 | 一种铁电薄膜栅增强型GaN异质结场效应晶体管 |
JP6478752B2 (ja) * | 2015-03-24 | 2019-03-06 | 株式会社東芝 | 半導体装置及びその製造方法 |
TW201637172A (zh) * | 2015-04-14 | 2016-10-16 | 國立交通大學 | 記憶體結構 |
US9978868B2 (en) * | 2015-11-16 | 2018-05-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Negative capacitance field effect transistor with charged dielectric material |
-
2016
- 2016-12-15 TW TW105141643A patent/TWI604605B/zh active
-
2017
- 2017-01-20 CN CN201710048777.9A patent/CN108231863B/zh active Active
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05235370A (ja) * | 1992-02-24 | 1993-09-10 | Rohm Co Ltd | 電界効果トランジスタ |
JP2009004743A (ja) * | 2007-05-18 | 2009-01-08 | Sanken Electric Co Ltd | 電界効果半導体装置 |
JP2013055148A (ja) * | 2011-09-01 | 2013-03-21 | Fujitsu Ltd | 半導体装置 |
JP2013131736A (ja) * | 2011-11-22 | 2013-07-04 | Renesas Electronics Corp | 半導体装置および半導体装置の製造方法 |
JP2013168433A (ja) * | 2012-02-14 | 2013-08-29 | Toshiba Corp | 窒化物半導体装置および窒化物半導体装置の製造方法 |
JP2014099517A (ja) * | 2012-11-14 | 2014-05-29 | Renesas Electronics Corp | 半導体装置の製造方法及び半導体装置 |
Non-Patent Citations (1)
Title |
---|
YOUN-SEON KANG, BO XIAO, YA. I. ALIVOV, QIAN FAN,JINQIAO XIE, AND HADIS MORKOC: "Ferroelectric PZT/AlGaN/GaN fieldeffect transistors", PROCEEDINGS OF SPIE, vol. 6121, JPN6017042040, 3 March 2003 (2003-03-03), US, pages 61210S, ISSN: 0003673187 * |
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