JP2018098316A - ドーパント導入方法および熱処理方法 - Google Patents
ドーパント導入方法および熱処理方法 Download PDFInfo
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- JP2018098316A JP2018098316A JP2016240162A JP2016240162A JP2018098316A JP 2018098316 A JP2018098316 A JP 2018098316A JP 2016240162 A JP2016240162 A JP 2016240162A JP 2016240162 A JP2016240162 A JP 2016240162A JP 2018098316 A JP2018098316 A JP 2018098316A
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides
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Abstract
【解決手段】半導体ウェハーの表面にドーパントを含む薄膜を成膜する。ドーパントを含む薄膜が成膜された半導体ウェハーをハロゲンランプからの光照射によって第1ピーク温度Tsに急速加熱して薄膜から半導体ウェハーの表面にドーパントを拡散させる。急速加熱による熱拡散であれば、欠陥を生じさせることなく必要十分なドーパントを半導体ウェハーに導入することができる。さらに、その半導体ウェハーにフラッシュランプからフラッシュ光を照射して半導体ウェハーの表面を第2ピーク温度Tpに加熱してドーパントを活性化させる。照射時間の極めて短いフラッシュ光照射であれば、ドーパントを過剰に拡散させることなく、高い活性化率を得ることができる。
【選択図】図10
Description
まず、本発明に係るドーパント導入方法を実施する際に必要となる熱処理を実行する熱処理装置について説明する。図1は、本発明に係るドーパント導入方法および熱処理方法に使用する熱処理装置1の構成を示す縦断面図である。図1の熱処理装置1は、基板として円板形状の半導体ウェハーWに対してフラッシュ光照射を行うことによってその半導体ウェハーWを加熱するフラッシュランプアニール装置である。処理対象となる半導体ウェハーWのサイズは特に限定されるものではないが、例えばφ300mmやφ450mmである。なお、図1および以降の各図においては、理解容易のため、必要に応じて各部の寸法や数を誇張または簡略化して描いている。
次に、本発明の第2実施形態について説明する。第2実施形態の熱処理装置1の全体構成は第1実施形態と同じである。また、第2実施形態の熱処理装置1における半導体ウェハーWの処理手順も第1実施形態と概ね同じである。第2実施形態が第1実施形態と相違するのは、熱処理プロセスを減圧状態で実行している点である。
次に、本発明の第3実施形態について説明する。第3実施形態の熱処理装置1の全体構成は第1実施形態と同じである。また、第3実施形態の熱処理装置1における半導体ウェハーWの処理手順も第1実施形態と概ね同じである。半導体ウェハーWの表面にはPSGの薄膜21が成膜されている。第3実施形態が第1実施形態と相違するのは、熱処理プロセスを実行する際のチャンバー6内の雰囲気である。
以上、本発明の実施の形態について説明したが、この発明はその趣旨を逸脱しない限りにおいて上述したもの以外に種々の変更を行うことが可能である。例えば、上記各実施形態においては、急速加熱後にハロゲンランプHLを消灯して半導体ウェハーWの温度を冷却温度Taに降温させていたが、これに代えて、ハロゲンランプHLの出力を低下させて半導体ウェハーWの温度を第1ピーク温度Tsから冷却温度Taにまで降温させるようにしても良い。
3 制御部
4 ハロゲン加熱部
5 フラッシュ加熱部
6 チャンバー
7 保持部
21 薄膜
22 ドーパント層
65 熱処理空間
74 サセプタ
75 保持プレート
77 基板支持ピン
93 コンデンサ
95 電源ユニット
96 IGBT
120 放射温度計
FL フラッシュランプ
HL ハロゲンランプ
W 半導体ウェハー
Claims (5)
- 半導体基板にドーパントを導入して活性化させるドーパント導入方法であって、
半導体基板の表面にドーパントを含む薄膜を形成する成膜工程と、
ハロゲンランプからの光照射によって前記半導体基板を第1の温度に加熱して前記薄膜から前記半導体基板の表面に前記ドーパントを拡散させる第1加熱工程と、
前記ハロゲンランプを消灯または前記ハロゲンランプの出力を低下させて前記半導体基板を前記第1の温度よりも低い第2の温度に降温させる降温工程と、
前記半導体基板にフラッシュランプからフラッシュ光を照射して前記半導体基板の表面を前記第2の温度よりも高い第3の温度に加熱して前記ドーパントを活性化させる第2加熱工程と、
を備えることを特徴とするドーパント導入方法。 - 請求項1記載のドーパント導入方法において、
前記第3の温度は前記第1の温度よりも高温であることを特徴とするドーパント導入方法。 - 請求項1または請求項2記載のドーパント導入方法において、
前記第1加熱工程の前に、前記半導体基板を収容するチャンバー内を13330Pa以下にまで減圧する減圧工程をさらに備えることを特徴とするドーパント導入方法。 - 請求項1または請求項2記載のドーパント導入方法において、
前記薄膜はPSG膜またはBSG膜であり、
前記第1加熱工程は、水素を含む雰囲気中にて実行し、
前記第2加熱工程は、水素を排除した雰囲気中にて実行することを特徴とするドーパント導入方法。 - その表面にドーパントを含む薄膜を形成した半導体基板を加熱し、当該半導体基板にドーパントを導入して活性化する熱処理方法であって、
ハロゲンランプからの光照射によって前記半導体基板を第1の温度に加熱して前記薄膜から前記半導体基板の表面に前記ドーパントを拡散させる第1加熱工程と、
前記ハロゲンランプを消灯または前記ハロゲンランプの出力を低下させて前記半導体基板を前記第1の温度よりも低い第2の温度に降温させる降温工程と、
前記半導体基板にフラッシュランプからフラッシュ光を照射して前記半導体基板の表面を前記第2の温度よりも高い第3の温度に加熱して前記ドーパントを活性化させる第2加熱工程と、
を備えることを特徴とする熱処理方法。
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