JP2018063406A5 - - Google Patents

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Publication number
JP2018063406A5
JP2018063406A5 JP2016203033A JP2016203033A JP2018063406A5 JP 2018063406 A5 JP2018063406 A5 JP 2018063406A5 JP 2016203033 A JP2016203033 A JP 2016203033A JP 2016203033 A JP2016203033 A JP 2016203033A JP 2018063406 A5 JP2018063406 A5 JP 2018063406A5
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JP
Japan
Prior art keywords
reflective surface
concave
optical system
projection optical
convex
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2016203033A
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English (en)
Japanese (ja)
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JP2018063406A (ja
JP6635904B2 (ja
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Priority claimed from JP2016203033A external-priority patent/JP6635904B2/ja
Priority to JP2016203033A priority Critical patent/JP6635904B2/ja
Priority to TW107127048A priority patent/TWI695232B/zh
Priority to TW106132027A priority patent/TWI639063B/zh
Priority to KR1020170123990A priority patent/KR102115279B1/ko
Priority to US15/728,631 priority patent/US10067325B2/en
Priority to CN202010697850.7A priority patent/CN111665688A/zh
Priority to CN201710934813.1A priority patent/CN107957658B/zh
Publication of JP2018063406A publication Critical patent/JP2018063406A/ja
Priority to US16/051,937 priority patent/US10578846B2/en
Publication of JP2018063406A5 publication Critical patent/JP2018063406A5/ja
Publication of JP6635904B2 publication Critical patent/JP6635904B2/ja
Application granted granted Critical
Priority to KR1020200060144A priority patent/KR102266723B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016203033A 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法 Active JP6635904B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2016203033A JP6635904B2 (ja) 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法
TW107127048A TWI695232B (zh) 2016-10-14 2017-09-19 投影光學系統、曝光裝置及物品製造方法
TW106132027A TWI639063B (zh) 2016-10-14 2017-09-19 投影光學系統、曝光裝置及物品製造方法
KR1020170123990A KR102115279B1 (ko) 2016-10-14 2017-09-26 투영 광학계, 노광 장치 및 물품 제조 방법
CN201710934813.1A CN107957658B (zh) 2016-10-14 2017-10-10 投影光学系统、曝光装置及物品制造方法
CN202010697850.7A CN111665688A (zh) 2016-10-14 2017-10-10 投影光学系统、曝光装置及物品制造方法
US15/728,631 US10067325B2 (en) 2016-10-14 2017-10-10 Projection optical system, exposure apparatus, and article manufacturing method
US16/051,937 US10578846B2 (en) 2016-10-14 2018-08-01 Projection optical system, exposure apparatus, and article manufacturing method
KR1020200060144A KR102266723B1 (ko) 2016-10-14 2020-05-20 투영 광학계, 노광 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016203033A JP6635904B2 (ja) 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019169552A Division JP2019211798A (ja) 2019-09-18 2019-09-18 投影光学系、露光装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2018063406A JP2018063406A (ja) 2018-04-19
JP2018063406A5 true JP2018063406A5 (enExample) 2019-05-16
JP6635904B2 JP6635904B2 (ja) 2020-01-29

Family

ID=61903819

Family Applications (1)

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JP2016203033A Active JP6635904B2 (ja) 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法

Country Status (5)

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US (2) US10067325B2 (enExample)
JP (1) JP6635904B2 (enExample)
KR (2) KR102115279B1 (enExample)
CN (2) CN111665688A (enExample)
TW (2) TWI639063B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6635904B2 (ja) 2016-10-14 2020-01-29 キヤノン株式会社 投影光学系、露光装置及び物品の製造方法
US11754822B2 (en) 2018-08-01 2023-09-12 Samsung Electro-Mechanics Co., Ltd. Optical imaging system
JP2021015141A (ja) * 2019-07-10 2021-02-12 キヤノン株式会社 光学装置、投影光学系、露光装置、および、物品の製造方法
KR102258458B1 (ko) * 2019-07-20 2021-05-28 한남대학교 산학협력단 주간과 야간에 동시에 사용할 수 있으며 배율변화가 가능한 전방위 줌 광학계
JP7332415B2 (ja) * 2019-10-01 2023-08-23 キヤノン株式会社 投影光学系、走査露光装置および物品製造方法
JP7614962B2 (ja) * 2021-07-08 2025-01-16 キヤノン株式会社 投影光学系、露光装置、および物品の製造方法

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US4812028A (en) * 1984-07-23 1989-03-14 Nikon Corporation Reflection type reduction projection optical system
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CN103135356B (zh) * 2011-11-23 2015-04-15 上海微电子装备有限公司 反射式光刻投影物镜
JP6635904B2 (ja) * 2016-10-14 2020-01-29 キヤノン株式会社 投影光学系、露光装置及び物品の製造方法

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