JP6635904B2 - 投影光学系、露光装置及び物品の製造方法 - Google Patents

投影光学系、露光装置及び物品の製造方法 Download PDF

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Publication number
JP6635904B2
JP6635904B2 JP2016203033A JP2016203033A JP6635904B2 JP 6635904 B2 JP6635904 B2 JP 6635904B2 JP 2016203033 A JP2016203033 A JP 2016203033A JP 2016203033 A JP2016203033 A JP 2016203033A JP 6635904 B2 JP6635904 B2 JP 6635904B2
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Japan
Prior art keywords
optical system
projection optical
concave
reflecting surface
convex
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JP2016203033A
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English (en)
Japanese (ja)
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JP2018063406A5 (enExample
JP2018063406A (ja
Inventor
道生 河野
道生 河野
深見　清司
清司 深見
亮介 福岡
亮介 福岡
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2016203033A priority Critical patent/JP6635904B2/ja
Priority to TW107127048A priority patent/TWI695232B/zh
Priority to TW106132027A priority patent/TWI639063B/zh
Priority to KR1020170123990A priority patent/KR102115279B1/ko
Priority to US15/728,631 priority patent/US10067325B2/en
Priority to CN201710934813.1A priority patent/CN107957658B/zh
Priority to CN202010697850.7A priority patent/CN111665688A/zh
Publication of JP2018063406A publication Critical patent/JP2018063406A/ja
Priority to US16/051,937 priority patent/US10578846B2/en
Publication of JP2018063406A5 publication Critical patent/JP2018063406A5/ja
Application granted granted Critical
Publication of JP6635904B2 publication Critical patent/JP6635904B2/ja
Priority to KR1020200060144A priority patent/KR102266723B1/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0836—Catadioptric systems using more than three curved mirrors
    • G02B17/084—Catadioptric systems using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0615—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in wich all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0852—Catadioptric systems having a field corrector only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/642—Optical derotators, i.e. systems for compensating for image rotation, e.g. using rotating prisms, mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0836—Catadioptric systems using more than three curved mirrors
    • G02B17/0844—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2016203033A 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法 Active JP6635904B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2016203033A JP6635904B2 (ja) 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法
TW107127048A TWI695232B (zh) 2016-10-14 2017-09-19 投影光學系統、曝光裝置及物品製造方法
TW106132027A TWI639063B (zh) 2016-10-14 2017-09-19 投影光學系統、曝光裝置及物品製造方法
KR1020170123990A KR102115279B1 (ko) 2016-10-14 2017-09-26 투영 광학계, 노광 장치 및 물품 제조 방법
CN201710934813.1A CN107957658B (zh) 2016-10-14 2017-10-10 投影光学系统、曝光装置及物品制造方法
CN202010697850.7A CN111665688A (zh) 2016-10-14 2017-10-10 投影光学系统、曝光装置及物品制造方法
US15/728,631 US10067325B2 (en) 2016-10-14 2017-10-10 Projection optical system, exposure apparatus, and article manufacturing method
US16/051,937 US10578846B2 (en) 2016-10-14 2018-08-01 Projection optical system, exposure apparatus, and article manufacturing method
KR1020200060144A KR102266723B1 (ko) 2016-10-14 2020-05-20 투영 광학계, 노광 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016203033A JP6635904B2 (ja) 2016-10-14 2016-10-14 投影光学系、露光装置及び物品の製造方法

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JP2019169552A Division JP2019211798A (ja) 2019-09-18 2019-09-18 投影光学系、露光装置及び物品の製造方法

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JP2018063406A JP2018063406A (ja) 2018-04-19
JP2018063406A5 JP2018063406A5 (enExample) 2019-05-16
JP6635904B2 true JP6635904B2 (ja) 2020-01-29

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US (2) US10067325B2 (enExample)
JP (1) JP6635904B2 (enExample)
KR (2) KR102115279B1 (enExample)
CN (2) CN111665688A (enExample)
TW (2) TWI639063B (enExample)

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JP6635904B2 (ja) 2016-10-14 2020-01-29 キヤノン株式会社 投影光学系、露光装置及び物品の製造方法
US11754822B2 (en) 2018-08-01 2023-09-12 Samsung Electro-Mechanics Co., Ltd. Optical imaging system
JP2021015141A (ja) * 2019-07-10 2021-02-12 キヤノン株式会社 光学装置、投影光学系、露光装置、および、物品の製造方法
KR102258458B1 (ko) * 2019-07-20 2021-05-28 한남대학교 산학협력단 주간과 야간에 동시에 사용할 수 있으며 배율변화가 가능한 전방위 줌 광학계
JP7332415B2 (ja) * 2019-10-01 2023-08-23 キヤノン株式会社 投影光学系、走査露光装置および物品製造方法
JP7614962B2 (ja) * 2021-07-08 2025-01-16 キヤノン株式会社 投影光学系、露光装置、および物品の製造方法

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Also Published As

Publication number Publication date
TWI639063B (zh) 2018-10-21
TWI695232B (zh) 2020-06-01
TW201841078A (zh) 2018-11-16
KR20180041567A (ko) 2018-04-24
US10067325B2 (en) 2018-09-04
JP2018063406A (ja) 2018-04-19
US10578846B2 (en) 2020-03-03
US20180106989A1 (en) 2018-04-19
CN107957658A (zh) 2018-04-24
TW201826037A (zh) 2018-07-16
US20180341093A1 (en) 2018-11-29
KR20200058356A (ko) 2020-05-27
CN107957658B (zh) 2020-07-31
KR102266723B1 (ko) 2021-06-21
KR102115279B1 (ko) 2020-05-26
CN111665688A (zh) 2020-09-15

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