JP2018046248A - スイッチング素子の製造方法 - Google Patents
スイッチング素子の製造方法 Download PDFInfo
- Publication number
- JP2018046248A JP2018046248A JP2016181959A JP2016181959A JP2018046248A JP 2018046248 A JP2018046248 A JP 2018046248A JP 2016181959 A JP2016181959 A JP 2016181959A JP 2016181959 A JP2016181959 A JP 2016181959A JP 2018046248 A JP2018046248 A JP 2018046248A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- gate insulating
- nitride semiconductor
- switching element
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title abstract description 11
- 239000004065 semiconductor Substances 0.000 claims abstract description 72
- 150000004767 nitrides Chemical class 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000000151 deposition Methods 0.000 claims abstract description 21
- 239000010410 layer Substances 0.000 description 82
- 238000005530 etching Methods 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 7
- 229910002601 GaN Inorganic materials 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 208000012868 Overgrowth Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
12 :半導体基板
20 :ドレイン領域
22 :ドリフト領域
24 :ボディ層
25a :下側チャネル部
25b :上側チャネル部
26 :ソース領域
30 :ゲート電極
32 :ゲート絶縁膜
34 :ゲート配線
40 :層間絶縁膜
42 :ソース電極
50 :ドレイン電極
Claims (1)
- スイッチング素子の製造方法であって、
窒化物半導体基板上にn型窒化物半導体層を堆積する工程と、
前記n型窒化物半導体層上に第1p型窒化物半導体層を堆積する工程と、
前記第1p型窒化物半導体層上に第1ゲート絶縁膜を堆積する工程と、
前記第1ゲート絶縁膜上にゲート電極を堆積する工程と、
前記ゲート電極上に第2ゲート絶縁膜を堆積する工程と、
前記第2ゲート絶縁膜上に第2p型窒化物半導体層を堆積する工程と、
前記第1ゲート絶縁膜と前記第1p型窒化物半導体層の界面、及び、前記第2ゲート絶縁膜と前記第2p型窒化物半導体層の界面に隣接するn型のソース領域を形成する工程、
を有する製造方法。
Priority Applications (1)
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JP2016181959A JP6680161B2 (ja) | 2016-09-16 | 2016-09-16 | スイッチング素子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2016181959A JP6680161B2 (ja) | 2016-09-16 | 2016-09-16 | スイッチング素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018046248A true JP2018046248A (ja) | 2018-03-22 |
JP6680161B2 JP6680161B2 (ja) | 2020-04-15 |
Family
ID=61695166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016181959A Active JP6680161B2 (ja) | 2016-09-16 | 2016-09-16 | スイッチング素子の製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP6680161B2 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11103057A (ja) * | 1997-03-17 | 1999-04-13 | Toshiba Corp | 半導体装置 |
JP2002158356A (ja) * | 2000-11-21 | 2002-05-31 | Fuji Electric Co Ltd | Mis半導体装置およびその製造方法 |
JP2006140368A (ja) * | 2004-11-15 | 2006-06-01 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
JP2008053312A (ja) * | 2006-08-22 | 2008-03-06 | Toyota Motor Corp | 半導体装置 |
JP2008103636A (ja) * | 2006-10-20 | 2008-05-01 | Sumitomo Electric Ind Ltd | 縦型トランジスタ、および縦型トランジスタを作製する方法 |
JP2014135494A (ja) * | 2013-01-14 | 2014-07-24 | Samsung Electronics Co Ltd | 二重並列チャネル構造を持つ半導体素子及びその半導体素子の製造方法 |
-
2016
- 2016-09-16 JP JP2016181959A patent/JP6680161B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11103057A (ja) * | 1997-03-17 | 1999-04-13 | Toshiba Corp | 半導体装置 |
JP2002158356A (ja) * | 2000-11-21 | 2002-05-31 | Fuji Electric Co Ltd | Mis半導体装置およびその製造方法 |
JP2006140368A (ja) * | 2004-11-15 | 2006-06-01 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
JP2008053312A (ja) * | 2006-08-22 | 2008-03-06 | Toyota Motor Corp | 半導体装置 |
JP2008103636A (ja) * | 2006-10-20 | 2008-05-01 | Sumitomo Electric Ind Ltd | 縦型トランジスタ、および縦型トランジスタを作製する方法 |
JP2014135494A (ja) * | 2013-01-14 | 2014-07-24 | Samsung Electronics Co Ltd | 二重並列チャネル構造を持つ半導体素子及びその半導体素子の製造方法 |
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JP6680161B2 (ja) | 2020-04-15 |
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