JP2018037175A - ステージ装置、及び荷電粒子線装置 - Google Patents
ステージ装置、及び荷電粒子線装置 Download PDFInfo
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- JP2018037175A JP2018037175A JP2016167476A JP2016167476A JP2018037175A JP 2018037175 A JP2018037175 A JP 2018037175A JP 2016167476 A JP2016167476 A JP 2016167476A JP 2016167476 A JP2016167476 A JP 2016167476A JP 2018037175 A JP2018037175 A JP 2018037175A
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- 239000002245 particle Substances 0.000 title claims abstract description 13
- 238000005096 rolling process Methods 0.000 claims abstract description 41
- 238000009413 insulation Methods 0.000 abstract description 9
- 238000005259 measurement Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 8
- 230000009466 transformation Effects 0.000 description 8
- 230000000007 visual effect Effects 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005489 elastic deformation Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/72—Auxiliary arrangements; Interconnections between auxiliary tables and movable machine elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/001—Bearings for parts moving only linearly adjustable for alignment or positioning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/004—Fixing of a carriage or rail, e.g. rigid mounting to a support structure or a movable part
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/005—Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
- F16C29/06—Ball or roller bearings in which the rolling bodies circulate partly without carrying load
- F16C29/0633—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides
- F16C29/0669—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the main body of the U-shaped carriage is an assembly of at least three major parts, e.g. an assembly of a top plate with two separate legs attached thereto in the form of bearing shoes
- F16C29/0673—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the main body of the U-shaped carriage is an assembly of at least three major parts, e.g. an assembly of a top plate with two separate legs attached thereto in the form of bearing shoes with rollers
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/18—Handling tools for semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
- H01J2237/2062—Mechanical constraints
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
- H01J2237/2811—Large objects
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
104 レーザ干渉計
105 テーブル
106 ウェハ
107 ガイド
108 チャック
109 コントローラ
111 ミラー
112 試料室
113 除振マウント
201 キャリッジ
202 ガイドレール
203 転動体
301 レーザ光軸
302 ベース
401 アダプタ
501 逃げ1
502 逃げ2
601 歪みが最大となる領域
602 歪みが最小となる領域
1001 アダプタ構造
1201 断面
Claims (6)
- 試料を支持するテーブルと、当該テーブルを特定方向に案内するガイドレールと、前記テーブルを支持すると共に、内部に含まれる転動体の回転を伴う移動によって、前記テーブルと共に前記ガイドテーブルに沿って移動するキャリッジを備えた試料ステージであって、
前記テーブルと前記キャリッジ間を接続すると共に、前記テーブル及び前記キャリッジの少なくとも一方に向かって突出する第1の突出部を有するアダプタを備え、前記第1の突出部は、前記テーブル、或いは前記キャリッジに接続されると共に、前記テーブルの前記第1の移動方向、及び当該第1の移動方向に直交する方向の少なくとも一方の長さが、他方の長さより長く形成される、又は前記第1の移動方向、或いは当該第1の移動方向に直交する方向に、複数の突起が配列されるように形成されることを特徴とする試料ステージ。 - 請求項1において、
前記アダプタは、前記テーブル及び前記キャリッジの他方に向かって突出する第2の突出部を備え、当該第2の突出部は、前記テーブル、或いは前記キャリッジに接続されると共に、前記第1の突出部の長手方向に直交する方向に長手方向を持つように形成される、或いは前記第1の突出部の長手方向に直交する方向に、複数の突起が配列されるように形成されることを特徴とする試料ステージ。 - 請求項1において、
前記テーブルには前記アダプタを収めるための掘り込みが設けられていることを特徴とする試料ステージ。 - 請求項1において、
前記試料ステージを備えたことを特徴とする荷電粒子線装置。 - 試料を支持するテーブルと、当該テーブルを特定方向に案内するガイドレールと、前記テーブルを支持すると共に、内部に含まれる転動体の回転を伴う移動によって、前記テーブルと共に前記ガイドテーブルに沿って移動するキャリッジを備えた試料ステージであって、
前記キャリッジには、前記テーブルと接触する接触部と、当該接触部と前記キャリッジの他の部分を接続する接続部が形成され、当該接続部は、前記テーブルの前記第1の移動方向、及び当該第1の移動方向に直交する方向の少なくとも一方の長さが、他方の長さより長く形成される、又は前記第1の移動方向、或いは当該第1の移動方向に直交する方向に、複数の突起が配列されるように形成されることを特徴とする試料ステージ。 - 請求項5において、
前記試料ステージを備えたことを特徴とする荷電粒子線装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016167476A JP2018037175A (ja) | 2016-08-30 | 2016-08-30 | ステージ装置、及び荷電粒子線装置 |
US16/315,700 US10770259B2 (en) | 2016-08-30 | 2017-07-12 | Stage device and charged particle beam device |
PCT/JP2017/025365 WO2018042897A1 (ja) | 2016-08-30 | 2017-07-12 | ステージ装置、及び荷電粒子線装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016167476A JP2018037175A (ja) | 2016-08-30 | 2016-08-30 | ステージ装置、及び荷電粒子線装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2018037175A true JP2018037175A (ja) | 2018-03-08 |
Family
ID=61301900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016167476A Pending JP2018037175A (ja) | 2016-08-30 | 2016-08-30 | ステージ装置、及び荷電粒子線装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10770259B2 (ja) |
JP (1) | JP2018037175A (ja) |
WO (1) | WO2018042897A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10600614B2 (en) * | 2017-09-29 | 2020-03-24 | Hitachi High-Technologies Corporation | Stage device and charged particle beam device |
JP7114450B2 (ja) * | 2018-12-04 | 2022-08-08 | 株式会社日立ハイテク | ステージ装置、及び荷電粒子線装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62188636A (ja) * | 1986-02-12 | 1987-08-18 | Hiroshi Teramachi | 直線案内装置 |
JPH0251092A (ja) * | 1988-08-12 | 1990-02-21 | Nippon Seiko Kk | 基板保持方法及びその装置 |
JPH063211B2 (ja) * | 1989-03-01 | 1994-01-12 | テイエチケー株式会社 | 直線摺動用ベアリング及び直線摺動用ベアリングの組付け方法 |
JP2527219Y2 (ja) * | 1990-10-22 | 1997-02-26 | 日本トムソン株式会社 | 直動転がり案内ユニット |
JPH04127418U (ja) * | 1991-05-10 | 1992-11-19 | 日本トムソン株式会社 | 直動転がり案内ユニツト |
JP2000179548A (ja) * | 1998-12-17 | 2000-06-27 | Dainippon Screen Mfg Co Ltd | 移動装置 |
US6338573B1 (en) * | 1999-06-09 | 2002-01-15 | Thk Co., Ltd. | Universal guide device and moving table device using same |
US6572269B2 (en) * | 2000-11-30 | 2003-06-03 | Nsk Ltd. | Bearing apparatus |
JP2004132494A (ja) * | 2002-10-11 | 2004-04-30 | Nsk Ltd | リニアガイド装置 |
JP4329324B2 (ja) | 2002-10-18 | 2009-09-09 | 日本精工株式会社 | リニアガイド装置 |
JP2004176825A (ja) * | 2002-11-27 | 2004-06-24 | Thk Co Ltd | ダイナミックダンパ付運動案内装置及びテーブル装置 |
DE10300722B3 (de) * | 2003-01-11 | 2004-04-08 | Johann Anderl | Werkzeugführungsvorrichtung |
JP2006112458A (ja) * | 2004-10-12 | 2006-04-27 | Nsk Ltd | リニアガイド装置 |
JP5076752B2 (ja) * | 2006-10-06 | 2012-11-21 | 日本精工株式会社 | 直動案内装置 |
JP4871183B2 (ja) * | 2007-03-23 | 2012-02-08 | 株式会社ディスコ | 駆動機構、姿勢変化吸収体及び加工装置 |
JP5521524B2 (ja) | 2009-12-11 | 2014-06-18 | パナソニック株式会社 | 直動装置及び部品実装機 |
JP5452405B2 (ja) * | 2010-07-28 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | ステージ装置 |
US8796906B2 (en) * | 2011-12-06 | 2014-08-05 | Seiko Epson Corporation | Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot |
JP6475533B2 (ja) * | 2015-03-26 | 2019-02-27 | 日本トムソン株式会社 | 直動案内ユニット |
-
2016
- 2016-08-30 JP JP2016167476A patent/JP2018037175A/ja active Pending
-
2017
- 2017-07-12 US US16/315,700 patent/US10770259B2/en active Active
- 2017-07-12 WO PCT/JP2017/025365 patent/WO2018042897A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2018042897A1 (ja) | 2018-03-08 |
US10770259B2 (en) | 2020-09-08 |
US20190228947A1 (en) | 2019-07-25 |
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