JP2018015706A5 - - Google Patents
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- Publication number
- JP2018015706A5 JP2018015706A5 JP2016147898A JP2016147898A JP2018015706A5 JP 2018015706 A5 JP2018015706 A5 JP 2018015706A5 JP 2016147898 A JP2016147898 A JP 2016147898A JP 2016147898 A JP2016147898 A JP 2016147898A JP 2018015706 A5 JP2018015706 A5 JP 2018015706A5
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- manufacturing
- mists
- mist
- material solutions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000002994 raw material Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 6
- 239000003595 mist Substances 0.000 claims 5
- 239000012159 carrier gas Substances 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000000178 monomer Substances 0.000 claims 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000012528 membrane Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016147898A JP6849874B2 (ja) | 2016-07-27 | 2016-07-27 | 積層構造体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016147898A JP6849874B2 (ja) | 2016-07-27 | 2016-07-27 | 積層構造体の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018015706A JP2018015706A (ja) | 2018-02-01 |
| JP2018015706A5 true JP2018015706A5 (enExample) | 2019-09-12 |
| JP6849874B2 JP6849874B2 (ja) | 2021-03-31 |
Family
ID=61076879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016147898A Active JP6849874B2 (ja) | 2016-07-27 | 2016-07-27 | 積層構造体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6849874B2 (enExample) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0714771A (ja) * | 1993-06-26 | 1995-01-17 | Taiyo Yuden Co Ltd | 薄膜形成方法及び装置 |
| JP2003051499A (ja) * | 2001-08-07 | 2003-02-21 | Matsushita Electric Ind Co Ltd | 薄膜形成方法及び装置 |
| KR101481933B1 (ko) * | 2005-12-29 | 2015-01-14 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 코팅 공정을 위한 물질의 분무화 방법 |
| WO2013015417A1 (ja) * | 2011-07-28 | 2013-01-31 | 凸版印刷株式会社 | 積層体、ガスバリアフィルム、積層体の製造方法、及び積層体製造装置 |
| JP6547930B2 (ja) * | 2014-08-29 | 2019-07-24 | 株式会社Flosfia | 金属膜形成方法 |
-
2016
- 2016-07-27 JP JP2016147898A patent/JP6849874B2/ja active Active
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