JP2018015706A5 - - Google Patents

Claims (8)

  The first and second raw material solutions are atomized, respectively, and the obtained first and second mists are respectively transported to the vicinity of the substrate using the first and second carrier gases, respectively, and then the first and second mists are first detected near the substrate. The first and second films are respectively formed by directly reacting the second mist and the second mist directly or via another layer on the substrate. The two carrier gases are the same or different from each other, and one of the first and second raw material solutions contains a monomer, and the other contains a metal.   The manufacturing method according to claim 1, wherein the thermal reactions of the first and second mists are both performed in a non-oxygen atmosphere.   The manufacturing method of Claim 1 or 2 which attaches | subjects the obtained film | membrane to an oxidation process after the thermal reaction of either the 1st and 2nd mist.   The manufacturing method in any one of Claims 1-3 in which any raw material solution contains an organic complex among the 1st and 2nd raw material solutions.   The manufacturing method in any one of Claims 1-4 in which any raw material solution contains water among 1st and 2nd raw material solutions.   The first, second, and third raw material solutions are atomized, and the obtained first, second, and third mists are conveyed to the vicinity of the substrate using the first, second, and third carrier gases, respectively. Then, the first, second, and third mists are thermally reacted in the vicinity of the base, thereby forming the first, second, and third films on the base either directly or via other layers, respectively. The first, second, and third carrier gases are the same or different from each other, and any one of the first, second, and third raw material solutions contains a monomer. And the other raw material solutions each contain the same or different metals.   The manufacturing method according to claim 6, wherein the third raw material solution contains a metal, and the thermal reaction of the third mist is performed in an oxygen atmosphere. The manufacturing method according to claim 1, wherein the first raw material solution contains a monomer and the thermal reaction of the first mist is performed at a temperature of 350 ° C. or lower.