JP2017532789A - バリア層の除去方法及び半導体構造体の形成方法 - Google Patents
バリア層の除去方法及び半導体構造体の形成方法 Download PDFInfo
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- 230000004888 barrier function Effects 0.000 title claims abstract description 145
- 238000000034 method Methods 0.000 title claims abstract description 100
- 239000004065 semiconductor Substances 0.000 title claims abstract description 68
- 229910052751 metal Inorganic materials 0.000 claims abstract description 106
- 239000002184 metal Substances 0.000 claims abstract description 106
- 238000005530 etching Methods 0.000 claims abstract description 48
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 42
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 38
- 239000010941 cobalt Substances 0.000 claims abstract description 38
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 38
- 239000000463 material Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 23
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 18
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 17
- 239000010936 titanium Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 229910052715 tantalum Inorganic materials 0.000 claims description 9
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- -1 SiOC Inorganic materials 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000010937 tungsten Substances 0.000 description 6
- 229910020177 SiOF Inorganic materials 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
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Abstract
Description
Co+2XeF2−> CoF4(揮発)+2Xe(気体)
ルテニウムを含むバリア層106に対する熱流エッチングの温度は、0℃から400℃であり、100℃から350℃がより良い。ルテニウムを含むバリア層106に対する熱流エッチングの圧力は、10mTorrから20Torrである。XeF2の流量は、0sccmから50sccmであり、該流量は、質量流量計によって調節され得る。これらの条件下において、Ruのエッチングレートは、Ta、TaN、Ti又はTiNのエッチングレートとほぼ同一である。110℃において、Ruのエッチングレートは、流量が9sccmの場合に、約250オングストローム/分である。Coを含むバリア層106に対する熱流エッチングの条件は、温度が120℃から600℃であり、200℃から400℃が好ましい。バリア層106とハードマスク層105とが除去された後は、図1−3に示すように、金属線が分離される。
Claims (23)
- ルテニウム又はコバルトからなる少なくとも1層を含むバリア層の除去方法であって、
熱流エッチングにより、半導体構造体における非凹部領域の上に形成されたルテニウム又はコバルトを含む前記バリア層を除去する工程を備えている、バリア層の除去方法。 - 請求項1に記載の除去方法において、
熱流エッチング用の化学ガスは、XeF2、XeF4及びXeF6のうちの1つ、又はこれらのうちの1つを含む混合ガスである、バリア層の除去方法。 - 請求項1に記載の除去方法において、
Ruを含む前記バリア層に対する熱流エッチングの温度は、0℃から400℃である、バリア層の除去方法。 - 請求項3に記載の除去方法において、
Ruを含む前記バリア層に対する熱流エッチングの温度は、100℃から350℃である、バリア層の除去方法。 - 請求項3に記載の除去方法において、
Ruを含む前記バリア層に対する熱流エッチングの温度は、50℃から120℃である、バリア層の除去方法。 - 請求項1に記載の除去方法において、
Ruを含む前記バリア層に対する熱流エッチングの圧力は、10mTorrから20Torrである、バリア層の除去方法。 - 請求項2に記載の除去方法において、
熱流エッチングの流量は、0sccmから50sccmである、バリア層の除去方法。 - 請求項1に記載の除去方法において、
Coを含む前記バリア層に対する熱流エッチングの温度は、120℃から600℃である、バリア層の除去方法。 - 請求項8に記載の除去方法において、
Coを含む前記バリア層に対する熱流エッチングの温度は、200℃から400℃である、バリア層の除去方法。 - 請求項1に記載の除去方法において、
前記バリア層は、材料がチタン、窒化チタン、タンタル又は窒化タンタルである他の層を含む、バリア層の除去方法。 - 誘電体層と、該誘電体層の上に形成されたハードマスク層と、該ハードマスク層及び前記誘電体層に形成された凹部領域と、前記ハードマスク層、前記凹部領域の側面及び該凹部領域の底面の上に形成されたルテニウム又はコバルトからなる少なくとも1層を含むバリア層と、該バリア層の上に形成されると共に前記凹部領域を埋める金属層とを含む半導体構造体を用意する工程と、
非凹部領域の上に形成された前記金属層及び前記凹部領域の金属を除去し、前記凹部領域内に所定量の金属を残す工程と、
熱流エッチングにより、前記非凹部領域の上に形成されたルテニウム又はコバルトを含む前記バリア層と、前記ハードマスク層とを除去する工程とを備えている、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
前記凹部領域の金属表面は、前記誘電体層の上面と同一の高さである、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
前記凹部領域の金属表面は、前記誘電体層の上面よりも低い、半導体構造体の形成方法。 - 請求項13に記載の形成方法において、
前記凹部領域における前記金属表面をキャップ層によって選択的に覆う工程をさらに備えている、半導体構造体の形成方法。 - 請求項14に記載の形成方法において、
前記凹部領域における前記キャップ層の上面は、前記誘電体層の上面と同一の高さである、半導体構造体の形成方法。 - 請求項14に記載の形成方法において、
前記キャップ層は、材料にコバルトを選択する、半導体構造体の形成方法。 - 請求項14に記載の形成方法において、
前記凹部領域における前記金属表面を前記キャップ層によって選択的に覆う工程は、熱流エッチングにより、前記非凹部領域の上に形成されたルテニウム又はコバルトを含む前記バリア層と、前記ハードマスク層とを除去する工程よりも前に実行される、半導体構造体の形成方法。 - 請求項14に記載の形成方法において、
前記凹部領域における前記金属表面を前記キャップ層によって選択的に覆う工程は、熱流エッチングにより、前記非凹部領域の上に形成されたルテニウム又はコバルトを含む前記バリア層と、前記ハードマスク層とを除去する工程よりも後に実行される、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
前記バリア層は、材料がチタン、窒化チタン、タンタル又は窒化タンタルである他の層を含む、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
前記非凹部領域の上に形成された前記金属層、及び前記凹部領域の金属は、CMP若しくは電解研磨によって、又はCMPと電解研磨との組み合わせによって除去される、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
前記金属層は銅層である、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
熱流エッチング用の化学ガスは、XeF2、XeF4及びXeF6のうちの1つ、又はこれらのうちの1つを含む混合ガスである、半導体構造体の形成方法。 - 請求項11に記載の形成方法において、
前記バリア層を除去するよりも前に、前記基板の表面に対してHFを含む溶液による処理又はHF蒸気を含む気相による処理を行う工程をさらに備えている、半導体構造体の形成方法。
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