JP2017532566A - 迅速応答センサ筐体 - Google Patents
迅速応答センサ筐体 Download PDFInfo
- Publication number
- JP2017532566A JP2017532566A JP2017521487A JP2017521487A JP2017532566A JP 2017532566 A JP2017532566 A JP 2017532566A JP 2017521487 A JP2017521487 A JP 2017521487A JP 2017521487 A JP2017521487 A JP 2017521487A JP 2017532566 A JP2017532566 A JP 2017532566A
- Authority
- JP
- Japan
- Prior art keywords
- sensor assembly
- internal cavity
- internal
- housing
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 36
- 239000000853 adhesive Substances 0.000 claims abstract description 13
- 230000001070 adhesive effect Effects 0.000 claims abstract description 13
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
Claims (15)
- 近位端部分および遠位端部分を含む本体を具備する筐体であって、前記遠位端部分が、内部空洞を画定し、前記遠位端部分が、前記内部空洞内に延びて開口している複数の内部通路を画定する、筐体と、
前記内部空洞内に配置されるマイクロ・センサであって、前記複数の内部通路の少なくとも一部を通ってマイクロ・センサから延びる複数のリードワイヤを有するマイクロ・センサとを具備するセンサ・アセンブリ。 - 前記マイクロ・センサは、薄膜抵抗温度デバイス(RTD)である請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞は、前記マイクロ・センサの接触表面と幾何学的に一致する少なくとも一つの表面を画定する請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞の前記少なくとも一つの表面と前記マイクロ・センサの前記接触表面は平坦である請求項3に記載のセンサ・アセンブリ。
- 前記マイクロ・センサは、熱接着剤によって前記内部空洞内に固定される請求項1に記載のセンサ・アセンブリ。
- 前記筐体、前記熱接着剤、および前記マイクロ・センサの基板は、一致した熱膨張率係数を有する請求項5に記載のセンサ・アセンブリ。
- 前記本体は、一体型本体である請求項1に記載のセンサ・アセンブリ。
- 前記リードワイヤは、熱接着剤によって前記内部通路内に固定されている請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞および前記内部通路は、円筒形状を画定する請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞および前記内部通路は、長方形形状を画定する請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞は、前記内部通路の外壁をさらに画定するために、近接して延びる2つの対向する側壁を画定する請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞は、前記マイクロ・センサの外部の幾何学的な周囲と一致する幾何学的形状を画定する請求項1に記載のセンサ・アセンブリ。
- 前記内部空洞を前記内部通路から分ける内壁をさらに具備し、前記マイクロ・センサは、前記筐体内の適切な位置決めのために前記内壁に当接する請求項1に記載のセンサ・アセンブリ。
- 前記筐体の前記遠位端部分は、前記内部空洞が外部環境に露出されるように開口している請求項1に記載のセンサ・アセンブリ。
- 前記マイクロ・センサは、2−ワイヤ、3−ワイヤ、または4−ワイヤRTDのうちの一つである請求項1に記載のセンサ・アセンブリ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462068596P | 2014-10-24 | 2014-10-24 | |
US62/068,596 | 2014-10-24 | ||
PCT/US2015/057250 WO2016065344A1 (en) | 2014-10-24 | 2015-10-23 | Rapid response sensor housing |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017532566A true JP2017532566A (ja) | 2017-11-02 |
JP6804439B2 JP6804439B2 (ja) | 2020-12-23 |
Family
ID=54477321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017521487A Active JP6804439B2 (ja) | 2014-10-24 | 2015-10-23 | 迅速応答センサ筐体 |
Country Status (7)
Country | Link |
---|---|
US (2) | US10571343B2 (ja) |
EP (1) | EP3209985B1 (ja) |
JP (1) | JP6804439B2 (ja) |
KR (1) | KR102376169B1 (ja) |
CN (1) | CN107076619B (ja) |
TW (1) | TWI589848B (ja) |
WO (1) | WO2016065344A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016114963B3 (de) * | 2016-08-11 | 2018-01-11 | Endress+Hauser Flowtec Ag | Sensor für ein thermisches Durchflussmessgerät, ein thermisches Durchflussmessgerät und ein Verfahren zum Herstellen eines Sensors eines thermischen Durchflussmessgeräts |
KR102276278B1 (ko) * | 2019-11-05 | 2021-07-12 | 주식회사 이큐셀 | 반도체 공정 진단을 위한 플라즈마 센서 장치 및 이의 제조 방법 |
US11650106B2 (en) * | 2020-12-30 | 2023-05-16 | Rosemount Inc. | Temperature probe with improved response time |
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-
2015
- 2015-10-23 EP EP15791157.9A patent/EP3209985B1/en active Active
- 2015-10-23 US US14/922,075 patent/US10571343B2/en active Active
- 2015-10-23 WO PCT/US2015/057250 patent/WO2016065344A1/en active Application Filing
- 2015-10-23 KR KR1020177012918A patent/KR102376169B1/ko active IP Right Grant
- 2015-10-23 TW TW104134934A patent/TWI589848B/zh active
- 2015-10-23 JP JP2017521487A patent/JP6804439B2/ja active Active
- 2015-10-23 CN CN201580057263.9A patent/CN107076619B/zh active Active
-
2020
- 2020-01-17 US US16/746,150 patent/US11029217B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI589848B (zh) | 2017-07-01 |
WO2016065344A1 (en) | 2016-04-28 |
US20200149977A1 (en) | 2020-05-14 |
KR102376169B1 (ko) | 2022-03-18 |
TW201623928A (zh) | 2016-07-01 |
EP3209985B1 (en) | 2020-04-29 |
US11029217B2 (en) | 2021-06-08 |
US10571343B2 (en) | 2020-02-25 |
CN107076619A (zh) | 2017-08-18 |
EP3209985A1 (en) | 2017-08-30 |
CN107076619B (zh) | 2021-01-22 |
US20160116347A1 (en) | 2016-04-28 |
JP6804439B2 (ja) | 2020-12-23 |
KR20170072252A (ko) | 2017-06-26 |
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