JP2017527854A5 - - Google Patents
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- Publication number
- JP2017527854A5 JP2017527854A5 JP2017512828A JP2017512828A JP2017527854A5 JP 2017527854 A5 JP2017527854 A5 JP 2017527854A5 JP 2017512828 A JP2017512828 A JP 2017512828A JP 2017512828 A JP2017512828 A JP 2017512828A JP 2017527854 A5 JP2017527854 A5 JP 2017527854A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- facet
- pupil
- optical assembly
- object field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims description 306
- 210000001747 pupil Anatomy 0.000 claims description 168
- 230000003287 optical effect Effects 0.000 claims description 83
- 238000006073 displacement reaction Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 9
- 238000001459 lithography Methods 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 58
- 238000009826 distribution Methods 0.000 description 14
- 230000010354 integration Effects 0.000 description 8
- 230000000007 visual effect Effects 0.000 description 8
- 238000012546 transfer Methods 0.000 description 5
- 238000000265 homogenisation Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001393 microlithography Methods 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101000683591 Homo sapiens Ras-responsive element-binding protein 1 Proteins 0.000 description 1
- 206010027646 Miosis Diseases 0.000 description 1
- 102100023544 Ras-responsive element-binding protein 1 Human genes 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014217610.7A DE102014217610A1 (de) | 2014-09-03 | 2014-09-03 | Beleuchtungsoptik für die Projektionslithografie |
| DE102014217610.7 | 2014-09-03 | ||
| PCT/EP2015/069216 WO2016034436A1 (en) | 2014-09-03 | 2015-08-21 | Illumination optical assembly for projection lithography |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017527854A JP2017527854A (ja) | 2017-09-21 |
| JP2017527854A5 true JP2017527854A5 (enExample) | 2018-10-04 |
| JP6683688B2 JP6683688B2 (ja) | 2020-04-22 |
Family
ID=53872082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017512828A Active JP6683688B2 (ja) | 2014-09-03 | 2015-08-21 | 投影リソグラフィのための照明光学アセンブリ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9996010B2 (enExample) |
| JP (1) | JP6683688B2 (enExample) |
| KR (1) | KR102618763B1 (enExample) |
| DE (1) | DE102014217610A1 (enExample) |
| TW (1) | TWI691797B (enExample) |
| WO (1) | WO2016034436A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020116091A1 (de) * | 2019-10-30 | 2021-05-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Abstimmbare beleuchtungsvorrichtung fürlithographiesysteme |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10317667A1 (de) | 2003-04-17 | 2004-11-18 | Carl Zeiss Smt Ag | Optisches Element für ein Beleuchtungssystem |
| DE102007045396A1 (de) * | 2007-09-21 | 2009-04-23 | Carl Zeiss Smt Ag | Bündelführender optischer Kollektor zur Erfassung der Emission einer Strahlungsquelle |
| CN101946190B (zh) * | 2008-02-15 | 2013-06-19 | 卡尔蔡司Smt有限责任公司 | 微光刻的投射曝光设备使用的分面镜 |
| DE102008009600A1 (de) * | 2008-02-15 | 2009-08-20 | Carl Zeiss Smt Ag | Facettenspiegel zum Einsatz in einer Projektionsbelichtungsanlage für die Mikro-Lithographie |
| DE102008002749A1 (de) * | 2008-06-27 | 2009-12-31 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die Mikrolithografie |
| JP5525550B2 (ja) | 2009-03-06 | 2014-06-18 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ用の照明光学系及び光学系 |
| DE102012210961A1 (de) * | 2012-06-27 | 2013-06-06 | Carl Zeiss Smt Gmbh | Baugruppe für eine Projektionsbelichtungsanlage für die EUV-Projektionslithografie |
| DE102014203187A1 (de) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Projektionslithografie |
-
2014
- 2014-09-03 DE DE102014217610.7A patent/DE102014217610A1/de not_active Ceased
-
2015
- 2015-08-21 KR KR1020177008187A patent/KR102618763B1/ko active Active
- 2015-08-21 JP JP2017512828A patent/JP6683688B2/ja active Active
- 2015-08-21 WO PCT/EP2015/069216 patent/WO2016034436A1/en not_active Ceased
- 2015-08-25 TW TW104127656A patent/TWI691797B/zh active
-
2017
- 2017-02-22 US US15/439,020 patent/US9996010B2/en active Active
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