JP2017526969A5 - - Google Patents

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Publication number
JP2017526969A5
JP2017526969A5 JP2017511203A JP2017511203A JP2017526969A5 JP 2017526969 A5 JP2017526969 A5 JP 2017526969A5 JP 2017511203 A JP2017511203 A JP 2017511203A JP 2017511203 A JP2017511203 A JP 2017511203A JP 2017526969 A5 JP2017526969 A5 JP 2017526969A5
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JP
Japan
Prior art keywords
mirror
facet
optical unit
illumination
facet mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2017511203A
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English (en)
Japanese (ja)
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JP6691105B2 (ja
JP2017526969A (ja
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Priority claimed from DE102014216802.3A external-priority patent/DE102014216802A1/de
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Publication of JP2017526969A publication Critical patent/JP2017526969A/ja
Publication of JP2017526969A5 publication Critical patent/JP2017526969A5/ja
Application granted granted Critical
Publication of JP6691105B2 publication Critical patent/JP6691105B2/ja
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JP2017511203A 2014-08-25 2015-08-19 Ｅｕｖ投影リソグラフィのための照明光学ユニット Active JP6691105B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014216802.3 2014-08-25
DE102014216802.3A DE102014216802A1 (de) 2014-08-25 2014-08-25 Beleuchtungsoptik für die EUV-Projektions-Lithographie
PCT/EP2015/069038 WO2016030248A1 (de) 2014-08-25 2015-08-19 Beleuchtungsoptik für die euv-projektions-lithografie

Publications (3)

Publication Number Publication Date
JP2017526969A JP2017526969A (ja) 2017-09-14
JP2017526969A5 true JP2017526969A5 (enExample) 2018-09-27
JP6691105B2 JP6691105B2 (ja) 2020-04-28

Family

ID=53872074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017511203A Active JP6691105B2 (ja) 2014-08-25 2015-08-19 Ｅｕｖ投影リソグラフィのための照明光学ユニット

Country Status (4)

Country Link
US (1) US10018917B2 (enExample)
JP (1) JP6691105B2 (enExample)
DE (1) DE102014216802A1 (enExample)
WO (1) WO2016030248A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017220586A1 (de) * 2017-11-17 2019-05-23 Carl Zeiss Smt Gmbh Pupillenfacettenspiegel, Beleuchtungsoptik und optisches System für eine Projek-tionsbelichtungsanlage
DE102020210829A1 (de) 2020-08-27 2022-03-03 Carl Zeiss Smt Gmbh Pupillenfacettenspiegel für eine Beleuchtungsoptik einer Projektionsbelichtungsanlage

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19903807A1 (de) * 1998-05-05 1999-11-11 Zeiss Carl Fa Beleuchtungssystem insbesondere für die EUV-Lithographie
DE10100265A1 (de) * 2001-01-08 2002-07-11 Zeiss Carl Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe
CN101946190B (zh) * 2008-02-15 2013-06-19 卡尔蔡司Smt有限责任公司 微光刻的投射曝光设备使用的分面镜
DE102008009600A1 (de) * 2008-02-15 2009-08-20 Carl Zeiss Smt Ag Facettenspiegel zum Einsatz in einer Projektionsbelichtungsanlage für die Mikro-Lithographie
JP5525550B2 (ja) 2009-03-06 2014-06-18 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ用の照明光学系及び光学系
US9372413B2 (en) * 2011-04-15 2016-06-21 Asml Netherlands B.V. Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices
DE102012206612A1 (de) * 2012-04-23 2013-10-24 Carl Zeiss Smt Gmbh Optisches Bauelement zur Führung eines Strahlungsbündels
DE102012212453A1 (de) * 2012-07-17 2014-01-23 Carl Zeiss Smt Gmbh Beleuchtungsoptik

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