JP6263800B2 - 結像光学ユニット - Google Patents
結像光学ユニット Download PDFInfo
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- JP6263800B2 JP6263800B2 JP2014513130A JP2014513130A JP6263800B2 JP 6263800 B2 JP6263800 B2 JP 6263800B2 JP 2014513130 A JP2014513130 A JP 2014513130A JP 2014513130 A JP2014513130 A JP 2014513130A JP 6263800 B2 JP6263800 B2 JP 6263800B2
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- optical unit
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- projection optical
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- 230000003287 optical effect Effects 0.000 title claims description 193
- 238000003384 imaging method Methods 0.000 title claims description 84
- 210000001747 pupil Anatomy 0.000 claims description 104
- 238000005286 illumination Methods 0.000 claims description 33
- 238000000926 separation method Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 4
- 238000001393 microlithography Methods 0.000 claims description 4
- 239000002086 nanomaterial Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 6
- 101100190847 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) PMP3 gene Proteins 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 101100366061 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) SNA2 gene Proteins 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
- G02B17/0663—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
8 像視野
12 ウェーハ
38、39 半空間
TAS 部分結像ビーム経路
Claims (13)
- 物体視野(4)を像視野(8)に結像するマイクロリソグラフィのための結像光学ユニット(7;17;28;50;53;56;59)であって、
前記物体視野(4)と前記像視野(8)の間の結像ビーム経路(27;AS)が、複数の部分結像ビーム経路(22,23;TAS)に分離され、
結像光学ユニット(7;17;28;50;53;56;59)は、前記部分結像ビーム経路(22,23;TAS)が、互いから完全に分離される方式、及び結像光学ユニット(7;17;28;50;53;56;59)の光学構成要素(18,19;M1からM6;GI,M1からM6)によって誘導される方式で前記物体視野(4)と前記像視野(8)の間で延びるように、すなわち、該物体視野(4)と該像視野(8)の間の前記ビーム経路内のいかなる場所においても、該部分結像ビーム経路(22,23,TAS)が、結像光学ユニット(7;17;28;50;53;56;59)のビーム誘導面(20)の同一領域上に当たらないように具現化され、
前記結像光学ユニットは、反射光学ユニットとして具現化される、
ことを特徴とする結像光学ユニット。 - 前記部分結像ビーム経路(22,23;TAS)を誘導する部分光学ユニット(29,30;51,52;54,55;57,58)の少なくとも2つの互いに分離された部分瞳(33から36;41から49)を有することを特徴とする請求項1に記載の結像光学ユニット。
- 前記部分結像ビーム経路(TAS)を誘導する結像光学ユニットの前記部分光学ユニット(29,30;51,52;54,55;57,58)の前記部分瞳(33から36;41から49)は、瞳(32;40)と垂直に延びる中心光軸(oA)に対して2回以上の多重対称性を伴って結像光学ユニットの前記瞳(32;40)に配置されることを特徴とする請求項1及び請求項2に記載の結像光学ユニット。
- 前記部分光学ユニット(29,30;51,52;54,55;57,58)は、前記光軸(oA)に関する2回以上の対称性を伴って配置されることを特徴とする請求項3に記載の結像光学ユニット。
- 結像光学ユニットの前記光学構成要素(18,19;M1からM6)は、光軸(oA)が延びる対称平面(SE)に対して鏡像反転の関係にあることを特徴とする請求項1から請求項4のいずれか1項に記載の結像光学ユニット。
- 2つの部分光学ユニット(18,19;29,30;51,52)の前記光学構成要素(18,19;M1からM6)の各々が、光軸(oA)が延びる半空間分離平面(HT)によって互いから分離された2つの半空間(38,39)の一方にそれぞれ完全に配置されることを特徴とする請求項1から請求項5のいずれか1項に記載の結像光学ユニット。
- 前記部分光学ユニット(53,54;57,58)のうちの少なくとも1つの前記光学構成要素(MlからM6;GI,MlからM6)は、半空間分離平面(HT)によって互いから分離された両方の半空間(38,39)に配置されることを特徴とする請求項1から請求項5のいずれか1項に記載の結像光学ユニット。
- 前記物体側において、結像光学ユニット(56)の少なくとも2つの部分光学ユニット(57,58)の前記部分結像ビーム経路(TAS)は、
中心物体視野点から進み、
前記少なくとも2つの部分光学ユニットの光学構成要素の各々を互いから分離する半空間分離平面(HT)と垂直に拡がる子午平面(yz)内で進み、
同じ半空間(38)内で進む、
主光線(HS1,HS2)を有する、
ことを特徴とする請求項1から請求項7のいずれか1項に記載の結像光学ユニット。 - 前記部分光学ユニット(29,30;51,52;54,55;57,58)の少なくとも1つが、0.2の像側開口数を有することを特徴とする請求項2から請求項8のいずれか1項に記載の結像光学ユニット。
- 前記光学構成要素(60)の少なくとも1つが、それぞれの部分結像ビーム経路(TAS)を誘導するための少なくとも2つの互いに分離されたビーム誘導領域(61,62)を有することを特徴とする請求項1から請求項9のいずれか1項に記載の結像光学ユニット。
- 物体視野(4)を照明するための照明光学ユニット(6)を含み、
請求項1から請求項10のいずれか1項に記載の結像光学ユニットを含む、
ことを特徴とする光学系。 - 請求項11に記載の光学系を含み、
光源(2)を含み、
物体ホルダ(11)を含み、
像ホルダ(13)を含む、
ことを特徴とする投影露光装置(1)。 - パターン付き構成要素を生成する方法であって、
レチクル(10)及びウェーハ(12)を与える段階と、
請求項12に記載の投影露光装置を用いて前記レチクル(10)上の構造を前記ウェーハ(12)の感光層上に投影する段階と、
前記ウェーハ(12)上に微細又はナノ構造を生成する段階と、
を含むことを特徴とする方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161491523P | 2011-05-31 | 2011-05-31 | |
DE102011076752.5 | 2011-05-31 | ||
US61/491523 | 2011-05-31 | ||
DE102011076752A DE102011076752A1 (de) | 2011-05-31 | 2011-05-31 | Abbildende Optik |
PCT/EP2012/059697 WO2012163794A1 (en) | 2011-05-31 | 2012-05-24 | Imaging optical unit |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014517349A JP2014517349A (ja) | 2014-07-17 |
JP2014517349A5 JP2014517349A5 (ja) | 2015-07-16 |
JP6263800B2 true JP6263800B2 (ja) | 2018-01-24 |
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ID=47173165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014513130A Active JP6263800B2 (ja) | 2011-05-31 | 2012-05-24 | 結像光学ユニット |
Country Status (7)
Country | Link |
---|---|
US (1) | US9377608B2 (ja) |
EP (1) | EP2715452B1 (ja) |
JP (1) | JP6263800B2 (ja) |
KR (1) | KR102092363B1 (ja) |
CN (1) | CN103635859B (ja) |
DE (1) | DE102011076752A1 (ja) |
WO (1) | WO2012163794A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9291751B2 (en) * | 2013-06-17 | 2016-03-22 | Carl Zeiss Smt Gmbh | Imaging optical unit and projection exposure apparatus for projection lithography comprising such an imaging optical unit |
DE102018201170A1 (de) | 2018-01-25 | 2019-07-25 | Carl Zeiss Smt Gmbh | Abbildende Optik für die EUV-Mikrolithographie |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6314113A (ja) * | 1986-07-07 | 1988-01-21 | Matsushita Electric Ind Co Ltd | 微細パタ−ン投影光学系 |
DE3787035T2 (de) * | 1986-03-12 | 1994-03-10 | Matsushita Electric Ind Co Ltd | Optisches Projektionssystem für Präzisionskopien. |
JPH1114913A (ja) * | 1997-06-23 | 1999-01-22 | Kazuo Kosho | 第1面に凹球面反射鏡を使用した望遠鏡。 |
DE19809055A1 (de) * | 1998-03-04 | 1999-09-16 | Ernst Brinkmeyer | Zweistrahl-Interferometer zur Gitterherstellung in photosensitiven Materialien |
US6307682B1 (en) * | 2000-02-16 | 2001-10-23 | Silicon Valley Group, Inc. | Zoom illumination system for use in photolithography |
US6943946B2 (en) * | 2003-05-01 | 2005-09-13 | Itt Manufacturing Enterprises, Inc. | Multiple aperture imaging system |
JP4495942B2 (ja) * | 2003-10-20 | 2010-07-07 | リコー光学株式会社 | 結像光学系・画像形成装置・プリンターおよび画像読取装置 |
EP1924888B1 (en) | 2005-09-13 | 2013-07-24 | Carl Zeiss SMT GmbH | Microlithography projection optical system, method for manufacturing a device and method to design an optical surface |
DE102006014380A1 (de) * | 2006-03-27 | 2007-10-11 | Carl Zeiss Smt Ag | Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille |
CN101379593A (zh) * | 2006-04-14 | 2009-03-04 | 株式会社尼康 | 曝光装置、元件制造方法以及曝光方法 |
KR101515663B1 (ko) | 2007-10-26 | 2015-04-27 | 칼 짜이스 에스엠티 게엠베하 | 결상 광학 시스템 및 이러한 유형의 결상 광학 시스템을 갖는 마이크로리소그래피용 투영 노광 장치 |
DE102007051669A1 (de) * | 2007-10-26 | 2009-04-30 | Carl Zeiss Smt Ag | Abbildende Optik, Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik sowie Verfahren zur Herstellung eines mikrostrukturierten Bauteils mit einer derartigen Projektionsbelichtungsanlage |
KR20100117281A (ko) * | 2009-04-24 | 2010-11-03 | 주식회사 프로텍 | Ldi용 다중 광 분할방법 및 장치 |
JP5328512B2 (ja) * | 2009-06-24 | 2013-10-30 | 富士フイルム株式会社 | 露光装置 |
DE102010039745A1 (de) * | 2010-08-25 | 2012-03-01 | Carl Zeiss Smt Gmbh | Abbildende Optik |
-
2011
- 2011-05-31 DE DE102011076752A patent/DE102011076752A1/de not_active Ceased
-
2012
- 2012-05-24 WO PCT/EP2012/059697 patent/WO2012163794A1/en active Application Filing
- 2012-05-24 KR KR1020137030787A patent/KR102092363B1/ko active IP Right Grant
- 2012-05-24 CN CN201280026502.0A patent/CN103635859B/zh active Active
- 2012-05-24 JP JP2014513130A patent/JP6263800B2/ja active Active
- 2012-05-24 EP EP12724117.2A patent/EP2715452B1/en active Active
-
2013
- 2013-11-14 US US14/080,743 patent/US9377608B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN103635859B (zh) | 2016-12-14 |
WO2012163794A1 (en) | 2012-12-06 |
KR102092363B1 (ko) | 2020-03-24 |
KR20140043732A (ko) | 2014-04-10 |
EP2715452A1 (en) | 2014-04-09 |
EP2715452B1 (en) | 2020-12-16 |
US20140071418A1 (en) | 2014-03-13 |
CN103635859A (zh) | 2014-03-12 |
DE102011076752A1 (de) | 2012-12-06 |
JP2014517349A (ja) | 2014-07-17 |
US9377608B2 (en) | 2016-06-28 |
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