JP2017525796A5 - - Google Patents
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- JP2017525796A5 JP2017525796A5 JP2016575222A JP2016575222A JP2017525796A5 JP 2017525796 A5 JP2017525796 A5 JP 2017525796A5 JP 2016575222 A JP2016575222 A JP 2016575222A JP 2016575222 A JP2016575222 A JP 2016575222A JP 2017525796 A5 JP2017525796 A5 JP 2017525796A5
- Authority
- JP
- Japan
- Prior art keywords
- colloidal silica
- polishing
- copper
- composition
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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| JP2019148753A Division JP6928040B2 (ja) | 2014-06-25 | 2019-08-14 | 銅バリアの化学機械研磨組成物 |
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| JP2017525796A5 true JP2017525796A5 (OSRAM) | 2018-07-12 |
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| SG (1) | SG11201610332PA (OSRAM) |
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-
2015
- 2015-06-25 US US14/750,271 patent/US9556363B2/en active Active
- 2015-06-25 KR KR1020177001865A patent/KR102444548B1/ko active Active
- 2015-06-25 CN CN201580046257.3A patent/CN106661431B/zh active Active
- 2015-06-25 EP EP15811236.7A patent/EP3161095B8/en active Active
- 2015-06-25 WO PCT/US2015/037772 patent/WO2015200684A1/en not_active Ceased
- 2015-06-25 JP JP2016575222A patent/JP6612790B2/ja active Active
- 2015-06-25 TW TW104120493A patent/TWI564380B/zh active
- 2015-06-25 SG SG11201610332PA patent/SG11201610332PA/en unknown
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2019
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