JP2017516944A5 - - Google Patents
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- Publication number
- JP2017516944A5 JP2017516944A5 JP2016569640A JP2016569640A JP2017516944A5 JP 2017516944 A5 JP2017516944 A5 JP 2017516944A5 JP 2016569640 A JP2016569640 A JP 2016569640A JP 2016569640 A JP2016569640 A JP 2016569640A JP 2017516944 A5 JP2017516944 A5 JP 2017516944A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- supply
- supply chamber
- stage
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 13
- 238000000034 method Methods 0.000 claims 5
- 238000004891 communication Methods 0.000 claims 2
- 238000012790 confirmation Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000001914 filtration Methods 0.000 claims 2
- 230000037452 priming Effects 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462004117P | 2014-05-28 | 2014-05-28 | |
| US62/004,117 | 2014-05-28 | ||
| PCT/US2015/032817 WO2015184057A1 (en) | 2014-05-28 | 2015-05-28 | System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017516944A JP2017516944A (ja) | 2017-06-22 |
| JP2017516944A5 true JP2017516944A5 (enExample) | 2018-07-05 |
| JP6644712B2 JP6644712B2 (ja) | 2020-02-12 |
Family
ID=53433273
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016569637A Active JP6543646B2 (ja) | 2014-05-28 | 2015-05-28 | 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム |
| JP2016569640A Active JP6644712B2 (ja) | 2014-05-28 | 2015-05-28 | 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016569637A Active JP6543646B2 (ja) | 2014-05-28 | 2015-05-28 | 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US20170114879A1 (enExample) |
| EP (2) | EP3149329B1 (enExample) |
| JP (2) | JP6543646B2 (enExample) |
| KR (2) | KR102141271B1 (enExample) |
| CN (2) | CN106460811A (enExample) |
| SG (2) | SG11201609910XA (enExample) |
| TW (2) | TWI664350B (enExample) |
| WO (2) | WO2015184056A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10969805B2 (en) | 2013-02-11 | 2021-04-06 | Graco Minnesota Inc. | Paint sprayer distributed control and output volume monitoring architectures |
| US11124406B1 (en) * | 2014-07-13 | 2021-09-21 | Sestra Systems, Inc. | System and method for piston detection in a metering mechanism for use with beverage dispensing system |
| FR3049993B1 (fr) * | 2016-04-07 | 2018-04-20 | Dosatron International | Mecanisme de dosage d'une pompe, procedes de verrouillage et de deverrouillage d'un tel mecanisme |
| US10519942B2 (en) * | 2016-07-28 | 2019-12-31 | Accriva Diagnostics, Inc. | Methods of operating a pump to reduce or eliminate pump backlash errors |
| US10570896B1 (en) * | 2017-04-28 | 2020-02-25 | Vp Sales And Company Lp | Packing nut lock |
| US10792697B2 (en) * | 2017-05-17 | 2020-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Drippage prevention system and method of operating same |
| JP6920133B2 (ja) * | 2017-08-23 | 2021-08-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理液供給装置 |
| JP6920923B2 (ja) * | 2017-08-25 | 2021-08-18 | 株式会社Ｓｃｒｅｅｎホールディングス | ポンプ装置および基板処理装置 |
| KR101933062B1 (ko) | 2017-09-19 | 2019-03-15 | 서강대학교산학협력단 | 이송대상유체의 압력을 측정하는 펌프, 이를 이용하는 유체운송 시스템과 그 시스템의 동작 방법 |
| US10663865B2 (en) * | 2018-06-29 | 2020-05-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photoresist recycling apparatus |
| EP4144443B1 (en) * | 2018-09-24 | 2023-12-20 | Graco Minnesota Inc. | Paint sprayer distributed control and output volume monitoring architectures |
| BR102018072471B1 (pt) | 2018-10-31 | 2023-01-03 | Drausuisse Brasil Comércio E Locação De Unidades Hidráulicas Inteligentes S.A. | Unidade hidráulica com acionamento combinado por via pneumática e servo motor e seu uso |
| KR102115101B1 (ko) * | 2018-11-01 | 2020-05-26 | 강현석 | Iot기반 지능형 원격관리 서비스 시스템 |
| PL3882471T3 (pl) * | 2018-11-14 | 2024-09-09 | Drausuisse Brasil Comercio E Locacao De Unidades Hidraulicas Inteligentes S.A. | Jednostka hydrauliczna z równoległymi pompami połączonymi z serwomotorem i jej zastosowanie |
| CN111219248B (zh) * | 2018-11-27 | 2024-10-11 | 罗伯特·博世有限公司 | 检测系统中过滤器的存在的方法 |
| JP7193376B2 (ja) * | 2019-02-22 | 2022-12-20 | Ｔｏｗａ株式会社 | 樹脂成型装置及び樹脂成型品の製造方法 |
| IT201900007779A1 (it) * | 2019-05-31 | 2020-12-01 | Corob Spa | Metodo di controllo della dispensazione di prodotti fluidi |
| US11260669B2 (en) | 2019-10-01 | 2022-03-01 | Hewlett-Packard Development Company, L.P. | Gas purger anomaly condition indication |
| TWI768379B (zh) * | 2020-06-19 | 2022-06-21 | 緯創資通股份有限公司 | 壓力緩衝模組及生物培養裝置 |
| JP7585124B2 (ja) * | 2021-04-08 | 2024-11-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理液流通方法、及び、処理液供給装置 |
| JP7530861B2 (ja) | 2021-04-27 | 2024-08-08 | 東京エレクトロン株式会社 | 処理液供給装置、液体置換方法、および記憶媒体 |
| JP2023127381A (ja) * | 2022-03-01 | 2023-09-13 | 株式会社島津製作所 | 真空ポンプの制御装置、及び、制御方法 |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4896552A (en) * | 1988-01-19 | 1990-01-30 | Ballscrews & Actuators Co., Inc. | Ballscrew follower and method of making and operating the same |
| US4954032A (en) * | 1989-11-13 | 1990-09-04 | Windfred M. Berg, Inc. | Anti-backlash nut |
| JP3715038B2 (ja) * | 1996-07-31 | 2005-11-09 | Ｎｔｎ株式会社 | バックラッシ除去送りねじ装置 |
| US5839321A (en) * | 1997-05-16 | 1998-11-24 | Ball Screw & Actuators Co. | Backlash compensating assembly |
| US6142032A (en) * | 1998-01-30 | 2000-11-07 | Creager; Wesley Carl | Adjustable anti-backlash nut assembly |
| US6234771B1 (en) * | 1998-06-02 | 2001-05-22 | Bayer Corporation | Precision pumping device |
| DE69917927T2 (de) * | 1998-11-23 | 2005-06-23 | Mykrolis Corp., Billerica | Pumpensteuergerät für hochpräzisionsdosierpumpe |
| US8172546B2 (en) | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
| US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
| US6131478A (en) * | 1999-01-07 | 2000-10-17 | Kerk Motion Products, Inc. | Anti-backlash nut assembly |
| JP2004143960A (ja) * | 2002-10-22 | 2004-05-20 | Smc Corp | ポンプ装置 |
| JP4311620B2 (ja) * | 2003-05-26 | 2009-08-12 | ケーエスエス株式会社 | バックラッシュ除去ナット |
| JP4206308B2 (ja) * | 2003-08-01 | 2009-01-07 | 株式会社日立ハイテクノロジーズ | 液体クロマトグラフ用ポンプ |
| US7328839B2 (en) * | 2004-10-21 | 2008-02-12 | International Business Machines Corporation | User configurable alerts for ATM transactions |
| US8292598B2 (en) * | 2004-11-23 | 2012-10-23 | Entegris, Inc. | System and method for a variable home position dispense system |
| DE102005017240A1 (de) * | 2005-04-14 | 2006-10-19 | Alldos Eichler Gmbh | Verfahren und Vorrichtung zur Überwachung eines mittels einer Pumpe geförderten Fluidstromes |
| WO2006116385A1 (en) | 2005-04-25 | 2006-11-02 | Entegris, Inc. | Method and apparatus for treating fluids to reduce microbubbles |
| CN101356488B (zh) | 2005-12-02 | 2012-05-16 | 恩特格里公司 | 与泵控制器对接的i/o系统、方法和设备 |
| JP5366555B2 (ja) | 2005-12-02 | 2013-12-11 | インテグリス・インコーポレーテッド | ポンプ内の圧力補償のためのシステムおよび方法 |
| US7850431B2 (en) * | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
| US7878765B2 (en) | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
| WO2007067359A2 (en) * | 2005-12-02 | 2007-06-14 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
| US8025486B2 (en) | 2005-12-02 | 2011-09-27 | Entegris, Inc. | System and method for valve sequencing in a pump |
| JP2007158663A (ja) * | 2005-12-05 | 2007-06-21 | Ricoh Co Ltd | アナログ画像信号のオフセット調整方法 |
| US7842010B2 (en) * | 2005-12-05 | 2010-11-30 | Medrad, Inc. | Pneumatically-operated thrombectomy catheter deployment system |
| TWI402423B (zh) * | 2006-02-28 | 2013-07-21 | Entegris Inc | 用於一幫浦操作之系統及方法 |
| US7443483B2 (en) | 2006-08-11 | 2008-10-28 | Entegris, Inc. | Systems and methods for fluid flow control in an immersion lithography system |
| US7992456B2 (en) * | 2007-12-10 | 2011-08-09 | Pacific Bearing Company | Anti-backlash nut, lead screw assembly and method |
| JP5419008B2 (ja) * | 2009-04-28 | 2014-02-19 | Ｓｍｃ株式会社 | ポンプ装置 |
| TWI563351B (en) | 2010-10-20 | 2016-12-21 | Entegris Inc | Method and system for pump priming |
| SG11201400072RA (en) | 2011-08-19 | 2014-07-30 | Entegris Inc | System and method for detecting air in a fluid |
| US9303742B2 (en) * | 2011-11-28 | 2016-04-05 | Pacific Bearing Company | Inverted spline rail system |
| US20140271264A1 (en) * | 2013-03-15 | 2014-09-18 | Anthony Florindi | Piston pump drive train anti-backlash |
| CN203488656U (zh) * | 2013-08-19 | 2014-03-19 | 高明铁企业股份有限公司 | 可减少背隙导螺杆结构 |
-
2015
- 2015-05-28 SG SG11201609910XA patent/SG11201609910XA/en unknown
- 2015-05-28 JP JP2016569637A patent/JP6543646B2/ja active Active
- 2015-05-28 KR KR1020167036399A patent/KR102141271B1/ko active Active
- 2015-05-28 TW TW104117224A patent/TWI664350B/zh active
- 2015-05-28 WO PCT/US2015/032816 patent/WO2015184056A1/en not_active Ceased
- 2015-05-28 SG SG10201810172QA patent/SG10201810172QA/en unknown
- 2015-05-28 US US15/314,469 patent/US20170114879A1/en not_active Abandoned
- 2015-05-28 EP EP15732082.1A patent/EP3149329B1/en active Active
- 2015-05-28 CN CN201580035323.7A patent/CN106460811A/zh active Pending
- 2015-05-28 US US15/314,461 patent/US20170107982A1/en not_active Abandoned
- 2015-05-28 TW TW104117225A patent/TWI670417B/zh active
- 2015-05-28 JP JP2016569640A patent/JP6644712B2/ja active Active
- 2015-05-28 WO PCT/US2015/032817 patent/WO2015184057A1/en not_active Ceased
- 2015-05-28 CN CN201580033267.3A patent/CN106662083B/zh active Active
- 2015-05-28 EP EP15729984.3A patent/EP3149328B1/en active Active
- 2015-05-28 KR KR1020167036398A patent/KR102141270B1/ko active Active
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