KR102141270B1 - 공급 및 분배 센서를 갖는 펌프의 작동, 여과 및 분배 확인, 및 필터의 감압 프라이밍을 위한 시스템 및 방법 - Google Patents

공급 및 분배 센서를 갖는 펌프의 작동, 여과 및 분배 확인, 및 필터의 감압 프라이밍을 위한 시스템 및 방법 Download PDF

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Publication number
KR102141270B1
KR102141270B1 KR1020167036398A KR20167036398A KR102141270B1 KR 102141270 B1 KR102141270 B1 KR 102141270B1 KR 1020167036398 A KR1020167036398 A KR 1020167036398A KR 20167036398 A KR20167036398 A KR 20167036398A KR 102141270 B1 KR102141270 B1 KR 102141270B1
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South Korea
Prior art keywords
pressure
pump
fluid
pressure sensor
dispensing
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KR1020167036398A
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Korean (ko)
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KR20170013322A (ko
Inventor
제임스 시드론
이라지 가스가이
조지 엘 고넬라
Original Assignee
엔테그리스, 아이엔씨.
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • F16H25/2006—Screw mechanisms with arrangements for taking up backlash with more than one nut or with nuts consisting of more than one bearing part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/02—Pressure in the inlet chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F04B2205/503—Presence of foreign matter in the fluid of gas in a liquid flow, e.g. gas bubbles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Transmission Devices (AREA)
  • Details Of Reciprocating Pumps (AREA)
KR1020167036398A 2014-05-28 2015-05-28 공급 및 분배 센서를 갖는 펌프의 작동, 여과 및 분배 확인, 및 필터의 감압 프라이밍을 위한 시스템 및 방법 Active KR102141270B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28
US62/004,117 2014-05-28
PCT/US2015/032817 WO2015184057A1 (en) 2014-05-28 2015-05-28 System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter

Publications (2)

Publication Number Publication Date
KR20170013322A KR20170013322A (ko) 2017-02-06
KR102141270B1 true KR102141270B1 (ko) 2020-08-04

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020167036399A Active KR102141271B1 (ko) 2014-05-28 2015-05-28 정밀 시스템 및 용도에서 모터-구동식 부품을 위한 백래시 방지 메커니즘
KR1020167036398A Active KR102141270B1 (ko) 2014-05-28 2015-05-28 공급 및 분배 센서를 갖는 펌프의 작동, 여과 및 분배 확인, 및 필터의 감압 프라이밍을 위한 시스템 및 방법

Family Applications Before (1)

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KR1020167036399A Active KR102141271B1 (ko) 2014-05-28 2015-05-28 정밀 시스템 및 용도에서 모터-구동식 부품을 위한 백래시 방지 메커니즘

Country Status (8)

Country Link
US (2) US20170114879A1 (enExample)
EP (2) EP3149328B1 (enExample)
JP (2) JP6644712B2 (enExample)
KR (2) KR102141271B1 (enExample)
CN (2) CN106460811A (enExample)
SG (2) SG10201810172QA (enExample)
TW (2) TWI664350B (enExample)
WO (2) WO2015184057A1 (enExample)

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Also Published As

Publication number Publication date
JP6543646B2 (ja) 2019-07-10
KR20170013322A (ko) 2017-02-06
TWI670417B (zh) 2019-09-01
JP2017516944A (ja) 2017-06-22
JP6644712B2 (ja) 2020-02-12
CN106662083A (zh) 2017-05-10
WO2015184057A1 (en) 2015-12-03
SG11201609910XA (en) 2016-12-29
SG10201810172QA (en) 2018-12-28
WO2015184056A1 (en) 2015-12-03
EP3149328B1 (en) 2019-03-20
CN106460811A (zh) 2017-02-22
EP3149328A1 (en) 2017-04-05
JP2017517696A (ja) 2017-06-29
KR20170012423A (ko) 2017-02-02
US20170107982A1 (en) 2017-04-20
TW201608133A (zh) 2016-03-01
US20170114879A1 (en) 2017-04-27
TW201608131A (zh) 2016-03-01
WO2015184057A9 (en) 2016-09-01
EP3149329A1 (en) 2017-04-05
TWI664350B (zh) 2019-07-01
EP3149329B1 (en) 2020-01-29
CN106662083B (zh) 2018-11-27
KR102141271B1 (ko) 2020-08-04

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