TWI664350B - 多級泵及泵送系統 - Google Patents

多級泵及泵送系統 Download PDF

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Publication number
TWI664350B
TWI664350B TW104117224A TW104117224A TWI664350B TW I664350 B TWI664350 B TW I664350B TW 104117224 A TW104117224 A TW 104117224A TW 104117224 A TW104117224 A TW 104117224A TW I664350 B TWI664350 B TW I664350B
Authority
TW
Taiwan
Prior art keywords
pressure
pump
feed
fluid
dispensing
Prior art date
Application number
TW104117224A
Other languages
English (en)
Chinese (zh)
Other versions
TW201608131A (zh
Inventor
James Cedrone
詹姆斯 切德羅內
Iraj Gashgaee
伊萊 蓋許蓋伊
George L. Gonnella
喬治Ｌ 葛諾拉
Original Assignee
Entegris, Inc.
美商恩特葛瑞斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc., 美商恩特葛瑞斯股份有限公司 filed Critical Entegris, Inc.
Publication of TW201608131A publication Critical patent/TW201608131A/zh
Application granted granted Critical
Publication of TWI664350B publication Critical patent/TWI664350B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • F16H25/2006—Screw mechanisms with arrangements for taking up backlash with more than one nut or with nuts consisting of more than one bearing part
    • H10P72/0448—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/02—Pressure in the inlet chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F04B2205/503—Presence of foreign matter in the fluid of gas in a liquid flow, e.g. gas bubbles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Transmission Devices (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
TW104117224A 2014-05-28 2015-05-28 多級泵及泵送系統 TWI664350B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28
US62/004,117 2014-05-28

Publications (2)

Publication Number Publication Date
TW201608131A TW201608131A (zh) 2016-03-01
TWI664350B true TWI664350B (zh) 2019-07-01

Family

ID=53433273

Family Applications (2)

Application Number Title Priority Date Filing Date
TW104117224A TWI664350B (zh) 2014-05-28 2015-05-28 多級泵及泵送系統
TW104117225A TWI670417B (zh) 2014-05-28 2015-05-28 活塞總成及泵抽系統

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW104117225A TWI670417B (zh) 2014-05-28 2015-05-28 活塞總成及泵抽系統

Country Status (8)

Country Link
US (2) US20170114879A1 (enExample)
EP (2) EP3149328B1 (enExample)
JP (2) JP6644712B2 (enExample)
KR (2) KR102141270B1 (enExample)
CN (2) CN106460811A (enExample)
SG (2) SG10201810172QA (enExample)
TW (2) TWI664350B (enExample)
WO (2) WO2015184056A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
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TWI838108B (zh) * 2022-03-01 2024-04-01 日商島津製作所股份有限公司 真空泵的控制裝置以及控制方法

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US10519942B2 (en) * 2016-07-28 2019-12-31 Accriva Diagnostics, Inc. Methods of operating a pump to reduce or eliminate pump backlash errors
US10570896B1 (en) * 2017-04-28 2020-02-25 Vp Sales And Company Lp Packing nut lock
US10792697B2 (en) * 2017-05-17 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Drippage prevention system and method of operating same
JP6920133B2 (ja) * 2017-08-23 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス 処理液供給装置
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
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US10663865B2 (en) * 2018-06-29 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist recycling apparatus
EP4144444B1 (en) * 2018-09-24 2023-06-07 Graco Minnesota Inc. Paint sprayer distributed control and output volume monitoring architectures
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KR102115101B1 (ko) * 2018-11-01 2020-05-26 강현석 Iot기반 지능형 원격관리 서비스 시스템
PL3882471T3 (pl) * 2018-11-14 2024-09-09 Drausuisse Brasil Comercio E Locacao De Unidades Hidraulicas Inteligentes S.A. Jednostka hydrauliczna z równoległymi pompami połączonymi z serwomotorem i jej zastosowanie
CN111219248B (zh) * 2018-11-27 2024-10-11 罗伯特·博世有限公司 检测系统中过滤器的存在的方法
JP7193376B2 (ja) * 2019-02-22 2022-12-20 Ｔｏｗａ株式会社 樹脂成型装置及び樹脂成型品の製造方法
IT201900007779A1 (it) * 2019-05-31 2020-12-01 Corob Spa Metodo di controllo della dispensazione di prodotti fluidi
US11260669B2 (en) 2019-10-01 2022-03-01 Hewlett-Packard Development Company, L.P. Gas purger anomaly condition indication
TWI768379B (zh) * 2020-06-19 2022-06-21 緯創資通股份有限公司 壓力緩衝模組及生物培養裝置
JP7585124B2 (ja) * 2021-04-08 2024-11-18 株式会社Ｓｃｒｅｅｎホールディングス 処理液流通方法、及び、処理液供給装置
JP7530861B2 (ja) 2021-04-27 2024-08-08 東京エレクトロン株式会社 処理液供給装置、液体置換方法、および記憶媒体

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Publication number Priority date Publication date Assignee Title
TWI838108B (zh) * 2022-03-01 2024-04-01 日商島津製作所股份有限公司 真空泵的控制裝置以及控制方法

Also Published As

Publication number Publication date
JP2017517696A (ja) 2017-06-29
EP3149329A1 (en) 2017-04-05
KR102141270B1 (ko) 2020-08-04
KR20170013322A (ko) 2017-02-06
CN106460811A (zh) 2017-02-22
TW201608131A (zh) 2016-03-01
SG10201810172QA (en) 2018-12-28
JP6644712B2 (ja) 2020-02-12
EP3149328A1 (en) 2017-04-05
CN106662083A (zh) 2017-05-10
EP3149329B1 (en) 2020-01-29
SG11201609910XA (en) 2016-12-29
TWI670417B (zh) 2019-09-01
KR20170012423A (ko) 2017-02-02
WO2015184057A9 (en) 2016-09-01
US20170114879A1 (en) 2017-04-27
CN106662083B (zh) 2018-11-27
EP3149328B1 (en) 2019-03-20
TW201608133A (zh) 2016-03-01
JP2017516944A (ja) 2017-06-22
JP6543646B2 (ja) 2019-07-10
KR102141271B1 (ko) 2020-08-04
WO2015184056A1 (en) 2015-12-03
US20170107982A1 (en) 2017-04-20
WO2015184057A1 (en) 2015-12-03

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