JP2017514319A5 - - Google Patents
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- Publication number
- JP2017514319A5 JP2017514319A5 JP2017507937A JP2017507937A JP2017514319A5 JP 2017514319 A5 JP2017514319 A5 JP 2017514319A5 JP 2017507937 A JP2017507937 A JP 2017507937A JP 2017507937 A JP2017507937 A JP 2017507937A JP 2017514319 A5 JP2017514319 A5 JP 2017514319A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- semiconductor device
- substrate
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 53
- 239000000758 substrate Substances 0.000 claims 26
- 238000000034 method Methods 0.000 claims 23
- 239000002019 doping agent Substances 0.000 claims 12
- 239000000463 material Substances 0.000 claims 4
- 229910052787 antimony Inorganic materials 0.000 claims 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 3
- 230000000149 penetrating effect Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims 1
- 239000007943 implant Substances 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461984205P | 2014-04-25 | 2014-04-25 | |
| US61/984,205 | 2014-04-25 | ||
| US14/555,330 | 2014-11-26 | ||
| US14/555,330 US9385187B2 (en) | 2014-04-25 | 2014-11-26 | High breakdown N-type buried layer |
| PCT/US2015/027699 WO2015164853A1 (en) | 2014-04-25 | 2015-04-27 | High breakdown n-type buried layer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017514319A JP2017514319A (ja) | 2017-06-01 |
| JP2017514319A5 true JP2017514319A5 (cg-RX-API-DMAC7.html) | 2018-06-07 |
| JP6657183B2 JP6657183B2 (ja) | 2020-03-04 |
Family
ID=54333345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017507937A Active JP6657183B2 (ja) | 2014-04-25 | 2015-04-27 | 高ブレークダウンn型埋め込み層 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9385187B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6657183B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN106233439B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015164853A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9385187B2 (en) * | 2014-04-25 | 2016-07-05 | Texas Instruments Incorporated | High breakdown N-type buried layer |
| DE102017103782B4 (de) * | 2017-02-23 | 2021-03-25 | Infineon Technologies Ag | Halbleitervorrichtung mit einer vergrabenen Schicht und Herstellungsverfahren hierfür |
| FR3089679A1 (fr) | 2018-12-11 | 2020-06-12 | Stmicroelectronics (Tours) Sas | Dispositif de commutation et procédé de fabrication d'un tel dispositif |
| CN114695505B (zh) * | 2020-12-29 | 2025-01-24 | 无锡华润上华科技有限公司 | 电子设备、半导体器件及其制备方法 |
| CN118041270A (zh) * | 2022-11-04 | 2024-05-14 | 广州乐仪投资有限公司 | 半导体结构的制备方法、半导体结构及电子设备 |
| US20240363394A1 (en) * | 2023-04-28 | 2024-10-31 | Texas Instruments Incorporated | Integrated circuit with improved isolation |
Family Cites Families (45)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4666556A (en) | 1986-05-12 | 1987-05-19 | International Business Machines Corporation | Trench sidewall isolation by polysilicon oxidation |
| US4980747A (en) | 1986-12-22 | 1990-12-25 | Texas Instruments Inc. | Deep trench isolation with surface contact to substrate |
| JPH0271526A (ja) * | 1988-07-07 | 1990-03-12 | Matsushita Electric Ind Co Ltd | 半導体集積回路およびその製造方法 |
| JPH0442959A (ja) * | 1990-06-06 | 1992-02-13 | Fujitsu Ltd | 半導体集積回路装置 |
| GB2248142A (en) * | 1990-09-19 | 1992-03-25 | Koninkl Philips Electronics Nv | A method of manufacturing a semiconductor device |
| US5192708A (en) * | 1991-04-29 | 1993-03-09 | International Business Machines Corporation | Sub-layer contact technique using in situ doped amorphous silicon and solid phase recrystallization |
| JPH0536823A (ja) * | 1991-08-01 | 1993-02-12 | Mitsubishi Electric Corp | 半導体集積回路 |
| US5994755A (en) * | 1991-10-30 | 1999-11-30 | Intersil Corporation | Analog-to-digital converter and method of fabrication |
| JPH0799771B2 (ja) | 1992-06-26 | 1995-10-25 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 皮膜中の応力を制御する方法 |
| JP3285435B2 (ja) * | 1993-07-07 | 2002-05-27 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JPH08236614A (ja) * | 1995-02-27 | 1996-09-13 | Nippondenso Co Ltd | 半導体装置の製造方法 |
| JP3334027B2 (ja) * | 1996-02-06 | 2002-10-15 | 富士電機株式会社 | 高耐圧横型半導体装置 |
| US6218722B1 (en) | 1997-02-14 | 2001-04-17 | Gennum Corporation | Antifuse based on silicided polysilicon bipolar transistor |
| JPH11251447A (ja) * | 1998-02-27 | 1999-09-17 | Nippon Foundry Inc | 半導体装置及びその製造方法 |
| US20010013610A1 (en) * | 1999-08-02 | 2001-08-16 | Min-Hwa Chi | Vertical bipolar transistor based on gate induced drain leakage current |
| US6661042B2 (en) * | 2002-03-11 | 2003-12-09 | Monolithic System Technology, Inc. | One-transistor floating-body DRAM cell in bulk CMOS process with electrically isolated charge storage region |
| US6943426B2 (en) | 2002-08-14 | 2005-09-13 | Advanced Analogic Technologies, Inc. | Complementary analog bipolar transistors with trench-constrained isolation diffusion |
| US7041572B2 (en) | 2002-10-25 | 2006-05-09 | Vanguard International Semiconductor Corporation | Fabrication method for a deep trench isolation structure of a high-voltage device |
| US7635621B2 (en) * | 2002-11-22 | 2009-12-22 | Micrel, Inc. | Lateral double-diffused metal oxide semiconductor (LDMOS) device with an enhanced drift region that has an improved Ron area product |
| SE526366C3 (sv) * | 2003-03-21 | 2005-10-26 | Silex Microsystems Ab | Elektriska anslutningar i substrat |
| US6815780B1 (en) | 2003-04-15 | 2004-11-09 | Motorola, Inc. | Semiconductor component with substrate injection protection structure |
| JP4292964B2 (ja) * | 2003-08-08 | 2009-07-08 | 三菱電機株式会社 | 縦型半導体装置 |
| US7639713B2 (en) | 2004-01-21 | 2009-12-29 | Emc Corporation | Database block network attached storage packet joining |
| JP4592340B2 (ja) | 2004-06-29 | 2010-12-01 | 三洋電機株式会社 | 半導体装置の製造方法 |
| KR100797896B1 (ko) * | 2004-11-12 | 2008-01-24 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 다양한 동작 전압들을 갖는 집적 회로들을 절연시키기 위한반도체 구조 |
| WO2006100640A1 (en) * | 2005-03-24 | 2006-09-28 | Nxp B.V. | Method of manufacturing a semiconductor device having a buried doped region |
| CN1897282A (zh) * | 2005-06-30 | 2007-01-17 | St微电子克鲁勒斯图股份公司 | 包括具有隔离体的一个mos晶体管的存储单元 |
| US7723204B2 (en) | 2006-03-27 | 2010-05-25 | Freescale Semiconductor, Inc. | Semiconductor device with a multi-plate isolation structure |
| US7410862B2 (en) | 2006-04-28 | 2008-08-12 | International Business Machines Corporation | Trench capacitor and method for fabricating the same |
| EP2109879A4 (en) | 2007-01-09 | 2011-05-18 | Maxpower Semiconductor Inc | Semiconductor device and method of manufacturing the same |
| US8614151B2 (en) | 2008-01-04 | 2013-12-24 | Micron Technology, Inc. | Method of etching a high aspect ratio contact |
| US7989875B2 (en) * | 2008-11-24 | 2011-08-02 | Nxp B.V. | BiCMOS integration of multiple-times-programmable non-volatile memories |
| KR101610826B1 (ko) | 2009-03-18 | 2016-04-11 | 삼성전자주식회사 | 커패시터를 갖는 반도체 장치의 형성방법 |
| US8476530B2 (en) | 2009-06-22 | 2013-07-02 | International Business Machines Corporation | Self-aligned nano-scale device with parallel plate electrodes |
| US20110062554A1 (en) | 2009-09-17 | 2011-03-17 | Hsing Michael R | High voltage floating well in a silicon die |
| US8334190B2 (en) | 2010-05-07 | 2012-12-18 | Texas Instruments Incorporated | Single step CMP for polishing three or more layer film stacks |
| US8399924B2 (en) | 2010-06-17 | 2013-03-19 | Texas Instruments Incorporated | High voltage transistor using diluted drain |
| JP5743831B2 (ja) * | 2011-09-29 | 2015-07-01 | 株式会社東芝 | 半導体装置 |
| US8785971B2 (en) * | 2011-11-23 | 2014-07-22 | Amazing Microelectronic Corp. | Transient voltage suppressor without leakage current |
| US8642423B2 (en) * | 2011-11-30 | 2014-02-04 | International Business Machines Corporation | Polysilicon/metal contact resistance in deep trench |
| US9356133B2 (en) * | 2012-02-01 | 2016-05-31 | Texas Instruments Incorporated | Medium voltage MOSFET device |
| US9293357B2 (en) | 2012-07-02 | 2016-03-22 | Texas Instruments Incorporated | Sinker with a reduced width |
| US9082719B2 (en) | 2012-10-19 | 2015-07-14 | Infineon Technologies Ag | Method for removing a dielectric layer from a bottom of a trench |
| US9136368B2 (en) * | 2013-10-03 | 2015-09-15 | Texas Instruments Incorporated | Trench gate trench field plate semi-vertical semi-lateral MOSFET |
| US9385187B2 (en) * | 2014-04-25 | 2016-07-05 | Texas Instruments Incorporated | High breakdown N-type buried layer |
-
2014
- 2014-11-26 US US14/555,330 patent/US9385187B2/en active Active
-
2015
- 2015-04-27 CN CN201580020171.3A patent/CN106233439B/zh active Active
- 2015-04-27 WO PCT/US2015/027699 patent/WO2015164853A1/en not_active Ceased
- 2015-04-27 JP JP2017507937A patent/JP6657183B2/ja active Active
-
2016
- 2016-06-07 US US15/175,192 patent/US9673273B2/en active Active
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