JP2017509098A5 - - Google Patents
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- Publication number
- JP2017509098A5 JP2017509098A5 JP2016538680A JP2016538680A JP2017509098A5 JP 2017509098 A5 JP2017509098 A5 JP 2017509098A5 JP 2016538680 A JP2016538680 A JP 2016538680A JP 2016538680 A JP2016538680 A JP 2016538680A JP 2017509098 A5 JP2017509098 A5 JP 2017509098A5
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- radiation
- flanges
- floating
- transmissive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 claims 26
- 238000005286 illumination Methods 0.000 claims 16
- 210000004180 plasmocyte Anatomy 0.000 claims 12
- 239000007789 gas Substances 0.000 claims 11
- 230000005540 biological transmission Effects 0.000 claims 5
- 239000003507 refrigerant Substances 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 claims 3
- 230000006835 compression Effects 0.000 claims 3
- 238000007906 compression Methods 0.000 claims 3
- 239000011261 inert gas Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000011247 coating layer Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000005350 fused silica glass Substances 0.000 claims 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361916048P | 2013-12-13 | 2013-12-13 | |
| US61/916,048 | 2013-12-13 | ||
| US14/567,546 US9433070B2 (en) | 2013-12-13 | 2014-12-11 | Plasma cell with floating flange |
| US14/567,546 | 2014-12-11 | ||
| PCT/US2014/070063 WO2015089424A1 (en) | 2013-12-13 | 2014-12-12 | Plasma cell with floating flange |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509098A JP2017509098A (ja) | 2017-03-30 |
| JP2017509098A5 true JP2017509098A5 (cg-RX-API-DMAC7.html) | 2018-01-25 |
| JP6437000B2 JP6437000B2 (ja) | 2018-12-12 |
Family
ID=53371876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016538680A Active JP6437000B2 (ja) | 2013-12-13 | 2014-12-12 | 浮動型フランジを備えるプラズマセル |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9433070B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6437000B2 (cg-RX-API-DMAC7.html) |
| DE (1) | DE112014005636B4 (cg-RX-API-DMAC7.html) |
| TW (1) | TWI630637B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015089424A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9263238B2 (en) | 2014-03-27 | 2016-02-16 | Kla-Tencor Corporation | Open plasma lamp for forming a light-sustained plasma |
| US10887974B2 (en) | 2015-06-22 | 2021-01-05 | Kla Corporation | High efficiency laser-sustained plasma light source |
| US10257918B2 (en) | 2015-09-28 | 2019-04-09 | Kla-Tencor Corporation | System and method for laser-sustained plasma illumination |
| US9899205B2 (en) * | 2016-05-25 | 2018-02-20 | Kla-Tencor Corporation | System and method for inhibiting VUV radiative emission of a laser-sustained plasma source |
| US10109473B1 (en) * | 2018-01-26 | 2018-10-23 | Excelitas Technologies Corp. | Mechanically sealed tube for laser sustained plasma lamp and production method for same |
| US11972931B2 (en) * | 2020-12-21 | 2024-04-30 | Hamamatsu Photonics K.K. | Light emitting sealed body, light emitting unit, and light source device |
| US11776804B2 (en) * | 2021-04-23 | 2023-10-03 | Kla Corporation | Laser-sustained plasma light source with reverse vortex flow |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5008593A (en) | 1990-07-13 | 1991-04-16 | The United States Of America As Represented By The Secretary Of The Air Force | Coaxial liquid cooling of high power microwave excited plasma UV lamps |
| US5235251A (en) | 1991-08-09 | 1993-08-10 | The United States Of America As Represented By The Secretary Of The Air Force | Hydraulic fluid cooling of high power microwave plasma tubes |
| EP0726593A1 (en) * | 1995-02-13 | 1996-08-14 | Applied Materials, Inc. | A high power, plasma-based, reactive species generator |
| US5829328A (en) * | 1995-08-02 | 1998-11-03 | Chen; Shyong-Chwan | Multiple sockets wrench |
| US6528760B1 (en) | 2000-07-14 | 2003-03-04 | Micron Technology, Inc. | Apparatus and method using rotational indexing for laser marking IC packages carried in trays |
| WO2004006288A1 (ja) * | 2002-07-02 | 2004-01-15 | Matsushita Electric Industrial Co., Ltd. | 電球形無電極蛍光ランプおよび無電極放電ランプ点灯装置 |
| JP2004079587A (ja) | 2002-08-09 | 2004-03-11 | Reitetsukusu:Kk | ウエハ回転装置とこれを有する端部傷検査装置 |
| KR100772740B1 (ko) | 2002-11-28 | 2007-11-01 | 동경 엘렉트론 주식회사 | 플라즈마 처리 용기 내부재 |
| JP2004304035A (ja) | 2003-03-31 | 2004-10-28 | Shibaura Mechatronics Corp | プラズマ発生装置 |
| JP2005249745A (ja) | 2004-03-08 | 2005-09-15 | Ebara Corp | 試料表面検査方法および検査装置 |
| US7427571B2 (en) | 2004-10-15 | 2008-09-23 | Asm International, N.V. | Reactor design for reduced particulate generation |
| JP4761442B2 (ja) | 2005-08-08 | 2011-08-31 | 芝浦メカトロニクス株式会社 | プラズマ発生装置及びプラズマ処理装置 |
| US8789493B2 (en) | 2006-02-13 | 2014-07-29 | Lam Research Corporation | Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch |
| US7435982B2 (en) * | 2006-03-31 | 2008-10-14 | Energetiq Technology, Inc. | Laser-driven light source |
| KR101580421B1 (ko) | 2006-09-01 | 2015-12-24 | 가부시키가이샤 니콘 | 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법 |
| US7732320B2 (en) | 2007-02-05 | 2010-06-08 | Suss Microtec Ag | Apparatus and method for semiconductor wafer bumping via injection molded solder |
| US7824519B2 (en) * | 2007-05-18 | 2010-11-02 | Lam Research Corporation | Variable volume plasma processing chamber and associated methods |
| JP5074248B2 (ja) * | 2008-03-14 | 2012-11-14 | 株式会社オーク製作所 | エキシマランプ |
| US8161906B2 (en) | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
| JP5252586B2 (ja) * | 2009-04-15 | 2013-07-31 | ウシオ電機株式会社 | レーザー駆動光源 |
| GB0918515D0 (en) * | 2009-10-21 | 2009-12-09 | Ceravision Ltd | Light source |
| US8927339B2 (en) | 2010-11-22 | 2015-01-06 | Bridge Semiconductor Corporation | Method of making thermally enhanced semiconductor assembly with bump/base/flange heat spreader and build-up circuitry |
| US9318311B2 (en) | 2011-10-11 | 2016-04-19 | Kla-Tencor Corporation | Plasma cell for laser-sustained plasma light source |
| US9927094B2 (en) | 2012-01-17 | 2018-03-27 | Kla-Tencor Corporation | Plasma cell for providing VUV filtering in a laser-sustained plasma light source |
| US9390902B2 (en) * | 2013-03-29 | 2016-07-12 | Kla-Tencor Corporation | Method and system for controlling convective flow in a light-sustained plasma |
| US9185788B2 (en) | 2013-05-29 | 2015-11-10 | Kla-Tencor Corporation | Method and system for controlling convection within a plasma cell |
-
2014
- 2014-12-11 US US14/567,546 patent/US9433070B2/en active Active
- 2014-12-12 JP JP2016538680A patent/JP6437000B2/ja active Active
- 2014-12-12 WO PCT/US2014/070063 patent/WO2015089424A1/en not_active Ceased
- 2014-12-12 DE DE112014005636.7T patent/DE112014005636B4/de active Active
- 2014-12-12 TW TW103143541A patent/TWI630637B/zh active
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