JP6437000B2 - 浮動型フランジを備えるプラズマセル - Google Patents

浮動型フランジを備えるプラズマセル Download PDF

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Publication number
JP6437000B2
JP6437000B2 JP2016538680A JP2016538680A JP6437000B2 JP 6437000 B2 JP6437000 B2 JP 6437000B2 JP 2016538680 A JP2016538680 A JP 2016538680A JP 2016538680 A JP2016538680 A JP 2016538680A JP 6437000 B2 JP6437000 B2 JP 6437000B2
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JP
Japan
Prior art keywords
plasma
radiation
flanges
transmissive element
plasma cell
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Active
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JP2016538680A
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English (en)
Japanese (ja)
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JP2017509098A5 (cg-RX-API-DMAC7.html
JP2017509098A (ja
Inventor
イリヤ ベゼル
イリヤ ベゼル
アナトリー シェメリニン
アナトリー シェメリニン
アミール トルカマン
アミール トルカマン
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KLA Corp
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KLA Corp
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Publication of JP2017509098A5 publication Critical patent/JP2017509098A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Lenses (AREA)
  • X-Ray Techniques (AREA)
JP2016538680A 2013-12-13 2014-12-12 浮動型フランジを備えるプラズマセル Active JP6437000B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361916048P 2013-12-13 2013-12-13
US61/916,048 2013-12-13
US14/567,546 US9433070B2 (en) 2013-12-13 2014-12-11 Plasma cell with floating flange
US14/567,546 2014-12-11
PCT/US2014/070063 WO2015089424A1 (en) 2013-12-13 2014-12-12 Plasma cell with floating flange

Publications (3)

Publication Number Publication Date
JP2017509098A JP2017509098A (ja) 2017-03-30
JP2017509098A5 JP2017509098A5 (cg-RX-API-DMAC7.html) 2018-01-25
JP6437000B2 true JP6437000B2 (ja) 2018-12-12

Family

ID=53371876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016538680A Active JP6437000B2 (ja) 2013-12-13 2014-12-12 浮動型フランジを備えるプラズマセル

Country Status (5)

Country Link
US (1) US9433070B2 (cg-RX-API-DMAC7.html)
JP (1) JP6437000B2 (cg-RX-API-DMAC7.html)
DE (1) DE112014005636B4 (cg-RX-API-DMAC7.html)
TW (1) TWI630637B (cg-RX-API-DMAC7.html)
WO (1) WO2015089424A1 (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9263238B2 (en) 2014-03-27 2016-02-16 Kla-Tencor Corporation Open plasma lamp for forming a light-sustained plasma
US10887974B2 (en) 2015-06-22 2021-01-05 Kla Corporation High efficiency laser-sustained plasma light source
US10257918B2 (en) 2015-09-28 2019-04-09 Kla-Tencor Corporation System and method for laser-sustained plasma illumination
US9899205B2 (en) * 2016-05-25 2018-02-20 Kla-Tencor Corporation System and method for inhibiting VUV radiative emission of a laser-sustained plasma source
US10109473B1 (en) * 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same
US11972931B2 (en) * 2020-12-21 2024-04-30 Hamamatsu Photonics K.K. Light emitting sealed body, light emitting unit, and light source device
US11776804B2 (en) * 2021-04-23 2023-10-03 Kla Corporation Laser-sustained plasma light source with reverse vortex flow

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US5235251A (en) 1991-08-09 1993-08-10 The United States Of America As Represented By The Secretary Of The Air Force Hydraulic fluid cooling of high power microwave plasma tubes
EP0726593A1 (en) * 1995-02-13 1996-08-14 Applied Materials, Inc. A high power, plasma-based, reactive species generator
US5829328A (en) * 1995-08-02 1998-11-03 Chen; Shyong-Chwan Multiple sockets wrench
US6528760B1 (en) 2000-07-14 2003-03-04 Micron Technology, Inc. Apparatus and method using rotational indexing for laser marking IC packages carried in trays
WO2004006288A1 (ja) * 2002-07-02 2004-01-15 Matsushita Electric Industrial Co., Ltd. 電球形無電極蛍光ランプおよび無電極放電ランプ点灯装置
JP2004079587A (ja) 2002-08-09 2004-03-11 Reitetsukusu:Kk ウエハ回転装置とこれを有する端部傷検査装置
KR100772740B1 (ko) 2002-11-28 2007-11-01 동경 엘렉트론 주식회사 플라즈마 처리 용기 내부재
JP2004304035A (ja) 2003-03-31 2004-10-28 Shibaura Mechatronics Corp プラズマ発生装置
JP2005249745A (ja) 2004-03-08 2005-09-15 Ebara Corp 試料表面検査方法および検査装置
US7427571B2 (en) 2004-10-15 2008-09-23 Asm International, N.V. Reactor design for reduced particulate generation
JP4761442B2 (ja) 2005-08-08 2011-08-31 芝浦メカトロニクス株式会社 プラズマ発生装置及びプラズマ処理装置
US8789493B2 (en) 2006-02-13 2014-07-29 Lam Research Corporation Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch
US7435982B2 (en) * 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
KR101580421B1 (ko) 2006-09-01 2015-12-24 가부시키가이샤 니콘 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
US7732320B2 (en) 2007-02-05 2010-06-08 Suss Microtec Ag Apparatus and method for semiconductor wafer bumping via injection molded solder
US7824519B2 (en) * 2007-05-18 2010-11-02 Lam Research Corporation Variable volume plasma processing chamber and associated methods
JP5074248B2 (ja) * 2008-03-14 2012-11-14 株式会社オーク製作所 エキシマランプ
US8161906B2 (en) 2008-07-07 2012-04-24 Lam Research Corporation Clamped showerhead electrode assembly
JP5252586B2 (ja) * 2009-04-15 2013-07-31 ウシオ電機株式会社 レーザー駆動光源
GB0918515D0 (en) * 2009-10-21 2009-12-09 Ceravision Ltd Light source
US8927339B2 (en) 2010-11-22 2015-01-06 Bridge Semiconductor Corporation Method of making thermally enhanced semiconductor assembly with bump/base/flange heat spreader and build-up circuitry
US9318311B2 (en) 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US9927094B2 (en) 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source
US9390902B2 (en) * 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
US9185788B2 (en) 2013-05-29 2015-11-10 Kla-Tencor Corporation Method and system for controlling convection within a plasma cell

Also Published As

Publication number Publication date
TW201532117A (zh) 2015-08-16
JP2017509098A (ja) 2017-03-30
DE112014005636B4 (de) 2022-10-27
US20150201483A1 (en) 2015-07-16
TWI630637B (zh) 2018-07-21
DE112014005636T5 (de) 2016-09-01
WO2015089424A1 (en) 2015-06-18
US9433070B2 (en) 2016-08-30

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