TWI630637B - 具有浮動凸緣之電漿單元 - Google Patents
具有浮動凸緣之電漿單元 Download PDFInfo
- Publication number
- TWI630637B TWI630637B TW103143541A TW103143541A TWI630637B TW I630637 B TWI630637 B TW I630637B TW 103143541 A TW103143541 A TW 103143541A TW 103143541 A TW103143541 A TW 103143541A TW I630637 B TWI630637 B TW I630637B
- Authority
- TW
- Taiwan
- Prior art keywords
- plasma
- transmissive element
- radiation
- flanges
- flange
- Prior art date
Links
- 238000007667 floating Methods 0.000 title claims abstract description 57
- 210000004180 plasmocyte Anatomy 0.000 title 1
- 230000005855 radiation Effects 0.000 claims abstract description 113
- 238000005286 illumination Methods 0.000 claims abstract description 106
- 239000007789 gas Substances 0.000 claims description 86
- 230000006835 compression Effects 0.000 claims description 25
- 238000007906 compression Methods 0.000 claims description 25
- 239000002826 coolant Substances 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052902 vermiculite Inorganic materials 0.000 claims description 3
- 235000019354 vermiculite Nutrition 0.000 claims description 3
- 239000010455 vermiculite Substances 0.000 claims description 3
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 21
- 239000000463 material Substances 0.000 description 18
- 238000007789 sealing Methods 0.000 description 17
- 229910052786 argon Inorganic materials 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000007726 management method Methods 0.000 description 5
- 230000036316 preload Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910004261 CaF 2 Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000003570 air Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- BKZJXSDQOIUIIG-UHFFFAOYSA-N argon mercury Chemical compound [Ar].[Hg] BKZJXSDQOIUIIG-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000012421 spiking Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Lenses (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361916048P | 2013-12-13 | 2013-12-13 | |
| US61/916,048 | 2013-12-13 | ||
| US14/567,546 US9433070B2 (en) | 2013-12-13 | 2014-12-11 | Plasma cell with floating flange |
| US14/567,546 | 2014-12-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201532117A TW201532117A (zh) | 2015-08-16 |
| TWI630637B true TWI630637B (zh) | 2018-07-21 |
Family
ID=53371876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103143541A TWI630637B (zh) | 2013-12-13 | 2014-12-12 | 具有浮動凸緣之電漿單元 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9433070B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6437000B2 (cg-RX-API-DMAC7.html) |
| DE (1) | DE112014005636B4 (cg-RX-API-DMAC7.html) |
| TW (1) | TWI630637B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015089424A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9263238B2 (en) | 2014-03-27 | 2016-02-16 | Kla-Tencor Corporation | Open plasma lamp for forming a light-sustained plasma |
| US10887974B2 (en) | 2015-06-22 | 2021-01-05 | Kla Corporation | High efficiency laser-sustained plasma light source |
| US10257918B2 (en) | 2015-09-28 | 2019-04-09 | Kla-Tencor Corporation | System and method for laser-sustained plasma illumination |
| US9899205B2 (en) * | 2016-05-25 | 2018-02-20 | Kla-Tencor Corporation | System and method for inhibiting VUV radiative emission of a laser-sustained plasma source |
| US10109473B1 (en) * | 2018-01-26 | 2018-10-23 | Excelitas Technologies Corp. | Mechanically sealed tube for laser sustained plasma lamp and production method for same |
| US11972931B2 (en) * | 2020-12-21 | 2024-04-30 | Hamamatsu Photonics K.K. | Light emitting sealed body, light emitting unit, and light source device |
| US11776804B2 (en) * | 2021-04-23 | 2023-10-03 | Kla Corporation | Laser-sustained plasma light source with reverse vortex flow |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5829328A (en) * | 1995-08-02 | 1998-11-03 | Chen; Shyong-Chwan | Multiple sockets wrench |
| JP2007048516A (ja) * | 2005-08-08 | 2007-02-22 | Shibaura Mechatronics Corp | プラズマ発生装置及びプラズマ処理装置 |
| US20080286489A1 (en) * | 2007-05-18 | 2008-11-20 | Lam Research Corporation | Variable Volume Plasma Processing Chamber and Associated Methods |
| TW201448678A (zh) * | 2013-03-29 | 2014-12-16 | Kla Tencor Corp | 用於控制一光維持電漿中之對流之方法及系統 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5008593A (en) | 1990-07-13 | 1991-04-16 | The United States Of America As Represented By The Secretary Of The Air Force | Coaxial liquid cooling of high power microwave excited plasma UV lamps |
| US5235251A (en) | 1991-08-09 | 1993-08-10 | The United States Of America As Represented By The Secretary Of The Air Force | Hydraulic fluid cooling of high power microwave plasma tubes |
| EP0726593A1 (en) * | 1995-02-13 | 1996-08-14 | Applied Materials, Inc. | A high power, plasma-based, reactive species generator |
| US6528760B1 (en) | 2000-07-14 | 2003-03-04 | Micron Technology, Inc. | Apparatus and method using rotational indexing for laser marking IC packages carried in trays |
| WO2004006288A1 (ja) * | 2002-07-02 | 2004-01-15 | Matsushita Electric Industrial Co., Ltd. | 電球形無電極蛍光ランプおよび無電極放電ランプ点灯装置 |
| JP2004079587A (ja) | 2002-08-09 | 2004-03-11 | Reitetsukusu:Kk | ウエハ回転装置とこれを有する端部傷検査装置 |
| KR100772740B1 (ko) | 2002-11-28 | 2007-11-01 | 동경 엘렉트론 주식회사 | 플라즈마 처리 용기 내부재 |
| JP2004304035A (ja) | 2003-03-31 | 2004-10-28 | Shibaura Mechatronics Corp | プラズマ発生装置 |
| JP2005249745A (ja) | 2004-03-08 | 2005-09-15 | Ebara Corp | 試料表面検査方法および検査装置 |
| US7427571B2 (en) | 2004-10-15 | 2008-09-23 | Asm International, N.V. | Reactor design for reduced particulate generation |
| US8789493B2 (en) | 2006-02-13 | 2014-07-29 | Lam Research Corporation | Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch |
| US7435982B2 (en) * | 2006-03-31 | 2008-10-14 | Energetiq Technology, Inc. | Laser-driven light source |
| KR101580421B1 (ko) | 2006-09-01 | 2015-12-24 | 가부시키가이샤 니콘 | 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법 |
| US7732320B2 (en) | 2007-02-05 | 2010-06-08 | Suss Microtec Ag | Apparatus and method for semiconductor wafer bumping via injection molded solder |
| JP5074248B2 (ja) * | 2008-03-14 | 2012-11-14 | 株式会社オーク製作所 | エキシマランプ |
| US8161906B2 (en) | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
| JP5252586B2 (ja) * | 2009-04-15 | 2013-07-31 | ウシオ電機株式会社 | レーザー駆動光源 |
| GB0918515D0 (en) * | 2009-10-21 | 2009-12-09 | Ceravision Ltd | Light source |
| US8927339B2 (en) | 2010-11-22 | 2015-01-06 | Bridge Semiconductor Corporation | Method of making thermally enhanced semiconductor assembly with bump/base/flange heat spreader and build-up circuitry |
| US9318311B2 (en) | 2011-10-11 | 2016-04-19 | Kla-Tencor Corporation | Plasma cell for laser-sustained plasma light source |
| US9927094B2 (en) | 2012-01-17 | 2018-03-27 | Kla-Tencor Corporation | Plasma cell for providing VUV filtering in a laser-sustained plasma light source |
| US9185788B2 (en) | 2013-05-29 | 2015-11-10 | Kla-Tencor Corporation | Method and system for controlling convection within a plasma cell |
-
2014
- 2014-12-11 US US14/567,546 patent/US9433070B2/en active Active
- 2014-12-12 JP JP2016538680A patent/JP6437000B2/ja active Active
- 2014-12-12 WO PCT/US2014/070063 patent/WO2015089424A1/en not_active Ceased
- 2014-12-12 DE DE112014005636.7T patent/DE112014005636B4/de active Active
- 2014-12-12 TW TW103143541A patent/TWI630637B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5829328A (en) * | 1995-08-02 | 1998-11-03 | Chen; Shyong-Chwan | Multiple sockets wrench |
| JP2007048516A (ja) * | 2005-08-08 | 2007-02-22 | Shibaura Mechatronics Corp | プラズマ発生装置及びプラズマ処理装置 |
| US20080286489A1 (en) * | 2007-05-18 | 2008-11-20 | Lam Research Corporation | Variable Volume Plasma Processing Chamber and Associated Methods |
| TW201448678A (zh) * | 2013-03-29 | 2014-12-16 | Kla Tencor Corp | 用於控制一光維持電漿中之對流之方法及系統 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201532117A (zh) | 2015-08-16 |
| JP6437000B2 (ja) | 2018-12-12 |
| JP2017509098A (ja) | 2017-03-30 |
| DE112014005636B4 (de) | 2022-10-27 |
| US20150201483A1 (en) | 2015-07-16 |
| DE112014005636T5 (de) | 2016-09-01 |
| WO2015089424A1 (en) | 2015-06-18 |
| US9433070B2 (en) | 2016-08-30 |
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