JP2017501553A5 - - Google Patents

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JP2017501553A5
JP2017501553A5 JP2016544160A JP2016544160A JP2017501553A5 JP 2017501553 A5 JP2017501553 A5 JP 2017501553A5 JP 2016544160 A JP2016544160 A JP 2016544160A JP 2016544160 A JP2016544160 A JP 2016544160A JP 2017501553 A5 JP2017501553 A5 JP 2017501553A5
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JP
Japan
Prior art keywords
cathode
beamlet
electron
structure according
focusing electrode
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JP2016544160A
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English (en)
Japanese (ja)
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JP2017501553A (ja
JP6590811B2 (ja
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Priority claimed from PCT/EP2014/078993 external-priority patent/WO2015101537A1/en
Publication of JP2017501553A publication Critical patent/JP2017501553A/ja
Publication of JP2017501553A5 publication Critical patent/JP2017501553A5/ja
Priority to JP2019168023A priority Critical patent/JP6929910B2/ja
Application granted granted Critical
Publication of JP6590811B2 publication Critical patent/JP6590811B2/ja
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JP2016544160A 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム Active JP6590811B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019168023A JP6929910B2 (ja) 2013-12-30 2019-09-17 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361921546P 2013-12-30 2013-12-30
US61/921,546 2013-12-30
PCT/EP2014/078993 WO2015101537A1 (en) 2013-12-30 2014-12-22 Cathode arrangement, electron gun, and lithography system comprising such electron gun

Related Child Applications (1)

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JP2019168023A Division JP6929910B2 (ja) 2013-12-30 2019-09-17 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

Publications (3)

Publication Number Publication Date
JP2017501553A JP2017501553A (ja) 2017-01-12
JP2017501553A5 true JP2017501553A5 (OSRAM) 2018-02-08
JP6590811B2 JP6590811B2 (ja) 2019-10-16

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ID=52146507

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2016544160A Active JP6590811B2 (ja) 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2016544063A Active JP6208371B2 (ja) 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2017171156A Active JP6462805B2 (ja) 2013-12-30 2017-09-06 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2019168023A Active JP6929910B2 (ja) 2013-12-30 2019-09-17 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

Family Applications After (3)

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JP2016544063A Active JP6208371B2 (ja) 2013-12-30 2014-12-22 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2017171156A Active JP6462805B2 (ja) 2013-12-30 2017-09-06 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
JP2019168023A Active JP6929910B2 (ja) 2013-12-30 2019-09-17 陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム

Country Status (9)

Country Link
US (3) US9466453B2 (OSRAM)
EP (2) EP3090438B1 (OSRAM)
JP (4) JP6590811B2 (OSRAM)
KR (2) KR102359077B1 (OSRAM)
CN (3) CN105874555B (OSRAM)
NL (2) NL2014029B1 (OSRAM)
RU (1) RU2689391C2 (OSRAM)
TW (2) TWI661457B (OSRAM)
WO (2) WO2015101537A1 (OSRAM)

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