JP2017500448A5 - - Google Patents

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JP2017500448A5
JP2017500448A5 JP2016538729A JP2016538729A JP2017500448A5 JP 2017500448 A5 JP2017500448 A5 JP 2017500448A5 JP 2016538729 A JP2016538729 A JP 2016538729A JP 2016538729 A JP2016538729 A JP 2016538729A JP 2017500448 A5 JP2017500448 A5 JP 2017500448A5
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film
article
chemical
vertical
interface
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JP2016538729A
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Japanese (ja)
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JP2017500448A (ja
JP6381649B2 (ja
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Priority claimed from US14/104,796 external-priority patent/US9139908B2/en
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JP2016538729A 2013-12-12 2014-09-19 傾斜薄膜 Active JP6381649B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/104,796 2013-12-12
US14/104,796 US9139908B2 (en) 2013-12-12 2013-12-12 Gradient thin films
PCT/US2014/056467 WO2015088613A1 (en) 2013-12-12 2014-09-19 Gradient thin films

Publications (3)

Publication Number Publication Date
JP2017500448A JP2017500448A (ja) 2017-01-05
JP2017500448A5 true JP2017500448A5 (https=) 2017-11-02
JP6381649B2 JP6381649B2 (ja) 2018-08-29

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ID=51660657

Family Applications (1)

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JP2016538729A Active JP6381649B2 (ja) 2013-12-12 2014-09-19 傾斜薄膜

Country Status (8)

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US (1) US9139908B2 (https=)
EP (1) EP3080331B1 (https=)
JP (1) JP6381649B2 (https=)
KR (1) KR102374881B1 (https=)
CN (1) CN105723013B (https=)
AU (1) AU2014360781B2 (https=)
RU (1) RU2666198C1 (https=)
WO (1) WO2015088613A1 (https=)

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