JP2017156761A5 - - Google Patents

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Publication number
JP2017156761A5
JP2017156761A5 JP2017082777A JP2017082777A JP2017156761A5 JP 2017156761 A5 JP2017156761 A5 JP 2017156761A5 JP 2017082777 A JP2017082777 A JP 2017082777A JP 2017082777 A JP2017082777 A JP 2017082777A JP 2017156761 A5 JP2017156761 A5 JP 2017156761A5
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JP
Japan
Prior art keywords
exposure apparatus
support
support device
drive
driving device
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JP2017082777A
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English (en)
Japanese (ja)
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JP2017156761A (ja
JP6573131B2 (ja
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Publication of JP2017156761A5 publication Critical patent/JP2017156761A5/ja
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JP2017082777A 2017-04-19 2017-04-19 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 Active JP6573131B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017082777A JP6573131B2 (ja) 2017-04-19 2017-04-19 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017082777A JP6573131B2 (ja) 2017-04-19 2017-04-19 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012085475A Division JP6132079B2 (ja) 2012-04-04 2012-04-04 露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2017156761A JP2017156761A (ja) 2017-09-07
JP2017156761A5 true JP2017156761A5 (enExample) 2018-02-01
JP6573131B2 JP6573131B2 (ja) 2019-09-11

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ID=59810269

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JP2017082777A Active JP6573131B2 (ja) 2017-04-19 2017-04-19 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法

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JP (1) JP6573131B2 (enExample)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006086442A (ja) * 2004-09-17 2006-03-30 Nikon Corp ステージ装置及び露光装置
JP5448070B2 (ja) * 2007-03-05 2014-03-19 株式会社ニコン 移動体装置、パターン形成装置及びパターン形成方法、デバイス製造方法、並びに移動体駆動方法
TW201100975A (en) * 2009-04-21 2011-01-01 Nikon Corp Moving-object apparatus, exposure apparatus, exposure method, and device manufacturing method
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
JP2011145317A (ja) * 2010-01-12 2011-07-28 Nikon Corp 移動体装置の組み立て方法、及び移動体装置の調整方法
US20110244396A1 (en) * 2010-04-01 2011-10-06 Nikon Corporation Exposure apparatus, exchange method of object, exposure method, and device manufacturing method
US8988655B2 (en) * 2010-09-07 2015-03-24 Nikon Corporation Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

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