JP2017118412A - 圧電振動片、圧電デバイス、及び圧電振動片の製造方法 - Google Patents

圧電振動片、圧電デバイス、及び圧電振動片の製造方法 Download PDF

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Publication number
JP2017118412A
JP2017118412A JP2015253782A JP2015253782A JP2017118412A JP 2017118412 A JP2017118412 A JP 2017118412A JP 2015253782 A JP2015253782 A JP 2015253782A JP 2015253782 A JP2015253782 A JP 2015253782A JP 2017118412 A JP2017118412 A JP 2017118412A
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Japan
Prior art keywords
vibrating piece
piezoelectric vibrating
axis direction
excitation
vibration
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JP2015253782A
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English (en)
Japanese (ja)
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JP2017118412A5 (enExample
Inventor
重隆 加賀
Shigetaka Kaga
重隆 加賀
和博 廣田
Kazuhiro Hirota
和博 廣田
芳朗 手島
Yoshiro Tejima
芳朗 手島
正陽 中原
Masaaki Nakahara
正陽 中原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2015253782A priority Critical patent/JP2017118412A/ja
Priority to US15/387,654 priority patent/US10277197B2/en
Priority to CN201611196508.9A priority patent/CN107026632A/zh
Publication of JP2017118412A publication Critical patent/JP2017118412A/ja
Publication of JP2017118412A5 publication Critical patent/JP2017118412A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2015253782A 2015-12-25 2015-12-25 圧電振動片、圧電デバイス、及び圧電振動片の製造方法 Pending JP2017118412A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015253782A JP2017118412A (ja) 2015-12-25 2015-12-25 圧電振動片、圧電デバイス、及び圧電振動片の製造方法
US15/387,654 US10277197B2 (en) 2015-12-25 2016-12-22 Piezoelectric vibrating piece and piezoelectric device
CN201611196508.9A CN107026632A (zh) 2015-12-25 2016-12-22 压电振动片及压电装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015253782A JP2017118412A (ja) 2015-12-25 2015-12-25 圧電振動片、圧電デバイス、及び圧電振動片の製造方法

Publications (2)

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JP2017118412A true JP2017118412A (ja) 2017-06-29
JP2017118412A5 JP2017118412A5 (enExample) 2018-10-11

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JP2015253782A Pending JP2017118412A (ja) 2015-12-25 2015-12-25 圧電振動片、圧電デバイス、及び圧電振動片の製造方法

Country Status (3)

Country Link
US (1) US10277197B2 (enExample)
JP (1) JP2017118412A (enExample)
CN (1) CN107026632A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110002176A (zh) * 2018-12-17 2019-07-12 浙江大学台州研究院 一种石英晶片的散播式送料装置

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* Cited by examiner, † Cited by third party
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US10763821B2 (en) * 2016-08-22 2020-09-01 Nihon Dempa Kogyo Co., Ltd. Crystal resonator
JP2022139556A (ja) * 2021-03-12 2022-09-26 セイコーエプソン株式会社 振動子及び発振器

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US4344010A (en) * 1979-10-19 1982-08-10 The United States Of America As Represented By The Secretary Of The Army Acceleration resistant combination of opposite-handed piezoelectric crystals
JPH0685598A (ja) 1992-08-31 1994-03-25 Nippon Dempa Kogyo Co Ltd Ｓｃカットの水晶振動子
JP2002217675A (ja) * 2001-01-15 2002-08-02 Toyo Commun Equip Co Ltd 圧電振動素子の電極構造及び製造装置
EP1267426A3 (en) * 2001-06-14 2005-06-15 Matsushita Electric Industrial Co., Ltd. Piezoelectric transformer
CN1237713C (zh) * 2001-12-04 2006-01-18 株式会社村田制作所 压电滑动共振子、复合压电滑动共振子以及压电共振零件
CN2558087Y (zh) * 2002-05-10 2003-06-25 浙江嘉康电子股份有限公司 小型片式压电元件振子
JP2004147246A (ja) * 2002-10-28 2004-05-20 Matsushita Electric Ind Co Ltd 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法
CN1917365A (zh) * 2006-08-25 2007-02-21 宁波大学 一种石英晶体谐振器
JP5216210B2 (ja) * 2006-12-28 2013-06-19 日本電波工業株式会社 水晶振動片および水晶振動デバイス
JP4300431B2 (ja) * 2007-01-15 2009-07-22 セイコーエプソン株式会社 アクチュエータ装置及びそれを用いた液体噴射ヘッド
JP5279068B2 (ja) * 2008-02-15 2013-09-04 太陽誘電株式会社 圧電薄膜共振子、フィルタ、通信モジュール、および通信装置
JP4555359B2 (ja) * 2008-04-02 2010-09-29 日本電波工業株式会社 水晶振動子
WO2010098065A1 (ja) * 2009-02-25 2010-09-02 パナソニック株式会社 弾性波素子および弾性波フィルタ
US7936110B2 (en) * 2009-03-14 2011-05-03 Delaware Capital Formation, Inc. Lateral excitation of pure shear modes
JP2010220164A (ja) * 2009-03-19 2010-09-30 Seiko Epson Corp ラム波型共振子及び発振器
JP5085682B2 (ja) * 2010-04-26 2012-11-28 日本電波工業株式会社 圧電デバイス
JP5883665B2 (ja) * 2012-01-31 2016-03-15 日本電波工業株式会社 水晶振動片及び水晶デバイス
CN202586894U (zh) * 2012-05-09 2012-12-05 深圳市新天源电子有限公司 具有双电极的石英晶体谐振器
JP6017189B2 (ja) * 2012-06-12 2016-10-26 日本電波工業株式会社 圧電振動片及び圧電デバイス
JP2014204351A (ja) * 2013-04-08 2014-10-27 日本電波工業株式会社 圧電デバイス
JP2016021733A (ja) * 2014-06-16 2016-02-04 日本電波工業株式会社 圧電振動片及び圧電デバイス
CN104993044B (zh) * 2015-07-22 2017-08-29 湖南嘉业达电子有限公司 一种压电陶瓷片正反面电极电气连接装置
JP2017079388A (ja) * 2015-10-20 2017-04-27 セイコーエプソン株式会社 圧電振動子、電子機器及び移動体
JP2017192032A (ja) * 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP2018074267A (ja) * 2016-10-26 2018-05-10 日本電波工業株式会社 圧電振動片及び圧電デバイス

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110002176A (zh) * 2018-12-17 2019-07-12 浙江大学台州研究院 一种石英晶片的散播式送料装置
CN110002176B (zh) * 2018-12-17 2023-12-22 浙江大学台州研究院 一种石英晶片的散播式送料装置

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Publication number Publication date
US20170187348A1 (en) 2017-06-29
US10277197B2 (en) 2019-04-30
CN107026632A (zh) 2017-08-08

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