JP2017055082A - 不揮発性記憶装置の製造方法 - Google Patents
不揮発性記憶装置の製造方法 Download PDFInfo
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- JP2017055082A JP2017055082A JP2015180079A JP2015180079A JP2017055082A JP 2017055082 A JP2017055082 A JP 2017055082A JP 2015180079 A JP2015180079 A JP 2015180079A JP 2015180079 A JP2015180079 A JP 2015180079A JP 2017055082 A JP2017055082 A JP 2017055082A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- 150000002500 ions Chemical class 0.000 claims abstract description 96
- 229910052751 metal Inorganic materials 0.000 claims abstract description 62
- 239000002184 metal Substances 0.000 claims abstract description 62
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 10
- 239000001301 oxygen Substances 0.000 claims abstract description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000000137 annealing Methods 0.000 claims abstract description 7
- 229910052709 silver Inorganic materials 0.000 claims description 23
- 239000004332 silver Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 9
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 7
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 abstract description 34
- 230000004888 barrier function Effects 0.000 abstract description 17
- 230000006866 deterioration Effects 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 108
- 239000010408 film Substances 0.000 description 43
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 22
- 239000011229 interlayer Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 230000008018 melting Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 229910021645 metal ion Inorganic materials 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910000314 transition metal oxide Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- -1 Ta 2 O 5 Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8416—Electrodes adapted for supplying ionic species
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
Abstract
Description
前記第1層および前記第2層を酸化し、
酸化された前記第1層に含まれる酸素をアニール処理によって分解して、前記第1層の金属を還元し、
前記第1層の金属を還元した後、酸化された前記第2層の上に、導電性の第3層を形成し、
前記第3層の上に、前記第1配線層と交差する方向に延びる第2配線層を形成する、不揮発性記憶装置の製造方法が提供される。
Claims (8)
- 第1配線層の上に、第1金属のイオンを供給可能な第1層と、前記第1金属のイオンが拡散可能であるとともに第2金属を含有する第2層と、を順に連続して成膜し、
前記第1層および前記第2層を酸化し、
酸化された前記第1層に含まれる酸素をアニール処理によって分解して、前記第1層の金属を還元し、
前記第1層の金属を還元した後、酸化された前記第2層の上に、導電性の第3層を形成し、
前記第3層の上に、前記第1配線層と交差する方向に延びる第2配線層を形成する、不揮発性記憶装置の製造方法。 - 前記第1配線層と交差する方向に延びる第3配線層を形成し、
前記第3配線層の上に、導電性の第4層を形成し、
前記第1金属のイオンを拡散可能であるとともに前記第2金属を含有する第5層と、前記第1金属のイオンを供給可能な第6層と、を順に形成し、
前記第6層の上に、前記第1配線層を形成する請求項1に記載の不揮発性記憶装置の製造方法。 - 前記第1配線層の上に、導電性の第7層を形成し、
前記第3層の上に、導電性の第8層を形成し、
前記第8層の上に、導電性の第9層を形成し、
前記第7層の上に、前記第1層および前記第2層が順に連続して成膜され、
前記第9層の上に前記第2配線層が形成される請求項1または2に記載の製造方法。 - 前記第3配線層の上に、導電性の第10層を形成し、
前記第10層の上に、前記第4層を形成し、
前記第6層の上に、導電性の第11層を形成し、
前記第11層の上に、導電性の第12層を形成し、
前記第12層の上に、前記第1配線層が形成される請求項2または3に記載の製造方法。 - 前記第1金属は、前記第2金属よりイオン化エネルギが高く、かつ前記第1金属の酸化物の熱分解温度は、前記第2金属の酸化物の熱分解温度より低い請求項1乃至4のいずれか1項に記載の製造方法。
- 前記第1金属の酸化物の熱分解温度は280℃以下であり、
前記第2金属の酸化物の熱分解温度は1000℃以上であり、
前記アニール処理の温度は300℃以上である請求項1乃至5のいずれか1項に記載の製造方法。 - 前記第1金属は、銀である請求項1乃至6のいずれか1項に記載の製造方法。
- 前記第2金属は、アルミニウム、ハフニウム、チタンまたは亜鉛である請求項7に記載の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015180079A JP2017055082A (ja) | 2015-09-11 | 2015-09-11 | 不揮発性記憶装置の製造方法 |
US15/253,603 US9947866B2 (en) | 2015-09-11 | 2016-08-31 | Nonvolatile memory device manufacturing method |
Applications Claiming Priority (1)
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JP2015180079A JP2017055082A (ja) | 2015-09-11 | 2015-09-11 | 不揮発性記憶装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
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JP2017055082A true JP2017055082A (ja) | 2017-03-16 |
Family
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Family Applications (1)
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JP2015180079A Abandoned JP2017055082A (ja) | 2015-09-11 | 2015-09-11 | 不揮発性記憶装置の製造方法 |
Country Status (2)
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US (1) | US9947866B2 (ja) |
JP (1) | JP2017055082A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI676273B (zh) * | 2018-11-20 | 2019-11-01 | 大陸商長江存儲科技有限責任公司 | 磊晶層和三維反及記憶體的形成方法、退火設備 |
US10720576B2 (en) | 2018-09-18 | 2020-07-21 | Toshiba Memory Corporation | Semiconductor device |
US10755778B1 (en) | 2019-03-19 | 2020-08-25 | Toshiba Memory Corporation | Semiconductor switch and semiconductor device |
US10803936B2 (en) | 2019-03-07 | 2020-10-13 | Toshiba Memory Corporation | Semiconductor memory device |
Families Citing this family (5)
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US10381558B1 (en) * | 2018-03-16 | 2019-08-13 | 4D-S, Ltd. | Resistive memory device having a retention layer |
US10319907B1 (en) | 2018-03-16 | 2019-06-11 | 4D-S, Ltd. | Resistive memory device having a template layer |
KR102534631B1 (ko) * | 2018-05-11 | 2023-05-19 | 에스케이하이닉스 주식회사 | 카운팅 회로 블록을 포함하는 반도체 시스템 |
US11024372B2 (en) * | 2018-08-13 | 2021-06-01 | Micron Technology, Inc. | Segregation-based memory |
EP3621126B1 (en) * | 2018-09-05 | 2021-06-16 | IMEC vzw | Manufacturing of an integrated electronic circuit which includes a component based on metal ion migration and reduction |
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2015
- 2015-09-11 JP JP2015180079A patent/JP2017055082A/ja not_active Abandoned
-
2016
- 2016-08-31 US US15/253,603 patent/US9947866B2/en active Active
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US10720576B2 (en) | 2018-09-18 | 2020-07-21 | Toshiba Memory Corporation | Semiconductor device |
TWI676273B (zh) * | 2018-11-20 | 2019-11-01 | 大陸商長江存儲科技有限責任公司 | 磊晶層和三維反及記憶體的形成方法、退火設備 |
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US20170077100A1 (en) | 2017-03-16 |
US9947866B2 (en) | 2018-04-17 |
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